JP2015507321A5 - - Google Patents

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JP2015507321A5
JP2015507321A5 JP2014547347A JP2014547347A JP2015507321A5 JP 2015507321 A5 JP2015507321 A5 JP 2015507321A5 JP 2014547347 A JP2014547347 A JP 2014547347A JP 2014547347 A JP2014547347 A JP 2014547347A JP 2015507321 A5 JP2015507321 A5 JP 2015507321A5
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detector
image
scattered light
optimized
elements
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JP2014547347A
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JP2015507321A (ja
JP6328055B2 (ja
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光学収集サブシステム907は、散乱光収集器その他の要素(例えば、1つ以上の開口、スプリッタ、偏光要素、反射光学要素)を含み、サンプルからの散乱光を2つのイメージ検出器906に向けることができる。一実施形態では、光学収集サブシステム907は、屈折光学要素905をさらに含んでよい。屈折光学要素905は、光学収集サブシステム907の他の要素が散乱光をイメージ検出器906に向けて画像化するのを援助するように構成される。一実施形態では、イメージ検出器906の少なくとも一方は、制御デバイスを含む上記のEBCCD検出器を含むことができる。例えば、一実施形態では、一方の検出器を実質的な光散乱用に最適化し、別の検出器を実質的に低い光散乱用に最適化してよい。したがって、走査の一部の間、散乱光の一部分は実質的光散乱用に最適化された一方のイメージ検出器に向けられ、散乱光の別の部分は低光散乱用に最適化された別のイメージ検出器に向けられるように、光学要素を構成してよい。2011年7月12日に出願された米国特許仮出願第61/506,892号の優先権を主張している2012年7月9日に出願された米国特許出願第13/54,954号に、より詳細にシステム900のいくつかの態様が記載されている。この2つの特許出願は、参照により本明細書に組み込まれる。
JP2014547347A 2011-12-12 2012-12-11 Ebccd、ebccdを操作させる方法、暗視野検査システム、検査方法および検査システム Active JP6328055B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161569611P 2011-12-12 2011-12-12
US61/569,611 2011-12-12
US13/710,315 2012-12-10
US13/710,315 US10197501B2 (en) 2011-12-12 2012-12-10 Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors
PCT/US2012/068944 WO2013090261A1 (en) 2011-12-12 2012-12-11 Electron-bombarded charge-coupled device and inspection systems using ebccd detectors

Publications (3)

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JP2015507321A JP2015507321A (ja) 2015-03-05
JP2015507321A5 true JP2015507321A5 (ja) 2016-02-04
JP6328055B2 JP6328055B2 (ja) 2018-05-23

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JP2014547347A Active JP6328055B2 (ja) 2011-12-12 2012-12-11 Ebccd、ebccdを操作させる方法、暗視野検査システム、検査方法および検査システム

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US (1) US10197501B2 (ja)
EP (1) EP2791961B1 (ja)
JP (1) JP6328055B2 (ja)
KR (1) KR101980930B1 (ja)
TW (1) TWI581296B (ja)
WO (1) WO2013090261A1 (ja)

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