JP2015504620A5 - - Google Patents
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- Publication number
- JP2015504620A5 JP2015504620A5 JP2014537759A JP2014537759A JP2015504620A5 JP 2015504620 A5 JP2015504620 A5 JP 2015504620A5 JP 2014537759 A JP2014537759 A JP 2014537759A JP 2014537759 A JP2014537759 A JP 2014537759A JP 2015504620 A5 JP2015504620 A5 JP 2015504620A5
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- cell
- substrate
- plug
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims 25
- 239000000758 substrate Substances 0.000 claims 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 238000002604 ultrasonography Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161552485P | 2011-10-28 | 2011-10-28 | |
| US61/552,485 | 2011-10-28 | ||
| PCT/IB2012/055605 WO2013061204A2 (en) | 2011-10-28 | 2012-10-15 | Pre-collapsed capacitive micro-machined transducer cell with plug |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015504620A JP2015504620A (ja) | 2015-02-12 |
| JP2015504620A5 true JP2015504620A5 (https=) | 2015-11-12 |
| JP5961697B2 JP5961697B2 (ja) | 2016-08-02 |
Family
ID=47227991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014537759A Active JP5961697B2 (ja) | 2011-10-28 | 2012-10-15 | プラグを備える事前圧壊された容量マイクロマシン・トランスデューサセル |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9117438B2 (https=) |
| EP (1) | EP2747904B1 (https=) |
| JP (1) | JP5961697B2 (https=) |
| CN (1) | CN103906579B (https=) |
| BR (1) | BR112014009698A2 (https=) |
| MX (1) | MX343897B (https=) |
| RU (1) | RU2595800C2 (https=) |
| WO (1) | WO2013061204A2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2771132B1 (en) * | 2011-10-28 | 2018-08-29 | Koninklijke Philips N.V. | Pre-collapsed capacitive micro-machined transducer cell with stress layer |
| JP6069798B2 (ja) | 2011-12-20 | 2017-02-01 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | 超音波トランスデューサデバイス及びこれを製造する方法 |
| EP3191233B1 (en) | 2014-09-11 | 2022-11-23 | Koninklijke Philips N.V. | Wide band through-body ultrasonic communication system |
| WO2017001636A1 (en) * | 2015-06-30 | 2017-01-05 | Koninklijke Philips N.V. | Ultrasound system and ultrasonic pulse transmission method |
| US10043903B2 (en) | 2015-12-21 | 2018-08-07 | Samsung Electronics Co., Ltd. | Semiconductor devices with source/drain stress liner |
| US11061000B2 (en) * | 2016-12-01 | 2021-07-13 | Koninklijke Philips N.V. | CMUT probe, system and method |
| RU2732839C1 (ru) * | 2019-07-09 | 2020-09-23 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Пензенский государственный университет" (ФГБОУ ВО "ПГУ") | Полупроводниковый преобразователь давления с повышенной точностью и чувствительностью |
| US11172300B2 (en) * | 2020-02-07 | 2021-11-09 | xMEMS Labs, Inc. | Sound producing device |
| US11304005B2 (en) | 2020-02-07 | 2022-04-12 | xMEMS Labs, Inc. | Crossover circuit |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005120130A1 (ja) * | 2004-06-03 | 2005-12-15 | Olympus Corporation | 静電容量型超音波振動子とその製造方法、静電容量型超音波プローブ |
| JP4885779B2 (ja) * | 2007-03-29 | 2012-02-29 | オリンパスメディカルシステムズ株式会社 | 静電容量型トランスデューサ装置及び体腔内超音波診断システム |
| US8203912B2 (en) * | 2007-07-31 | 2012-06-19 | Koninklijke Philips Electronics N.V. | CMUTs with a high-k dielectric |
| CN101969856B (zh) * | 2007-09-17 | 2013-06-05 | 皇家飞利浦电子股份有限公司 | 预塌陷的电容微机械超声传感器的制造及其应用 |
| US10092270B2 (en) | 2007-09-17 | 2018-10-09 | Koninklijke Philips Electronics N.V. | Pre-collapsed CMUT with mechanical collapse retention |
| CN101896288B (zh) * | 2007-12-14 | 2013-03-27 | 皇家飞利浦电子股份有限公司 | 包括经成型衬底的可以塌陷模式工作的cmut |
| EP2145696A1 (en) * | 2008-07-15 | 2010-01-20 | UAB Minatech | Capacitive micromachined ultrasonic transducer and its fabrication method |
| WO2010032156A2 (en) | 2008-09-16 | 2010-03-25 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasound transducer |
-
2012
- 2012-10-15 MX MX2014004905A patent/MX343897B/es active IP Right Grant
- 2012-10-15 US US14/349,079 patent/US9117438B2/en active Active
- 2012-10-15 JP JP2014537759A patent/JP5961697B2/ja active Active
- 2012-10-15 EP EP12791561.9A patent/EP2747904B1/en active Active
- 2012-10-15 RU RU2014121503/28A patent/RU2595800C2/ru not_active IP Right Cessation
- 2012-10-15 WO PCT/IB2012/055605 patent/WO2013061204A2/en not_active Ceased
- 2012-10-15 CN CN201280052980.9A patent/CN103906579B/zh active Active
- 2012-10-15 BR BR112014009698A patent/BR112014009698A2/pt not_active IP Right Cessation
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