MX343897B - Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe. - Google Patents

Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe.

Info

Publication number
MX343897B
MX343897B MX2014004905A MX2014004905A MX343897B MX 343897 B MX343897 B MX 343897B MX 2014004905 A MX2014004905 A MX 2014004905A MX 2014004905 A MX2014004905 A MX 2014004905A MX 343897 B MX343897 B MX 343897B
Authority
MX
Mexico
Prior art keywords
plug
membrane
capacitive micro
transducer cell
collapsed
Prior art date
Application number
MX2014004905A
Other languages
English (en)
Spanish (es)
Other versions
MX2014004905A (es
Inventor
Dirksen Peter
Dekker Ronald
Adrianus Henneken Vincent
Leeuwenstein Adriaan
Marcelis Bout
Douglas Fraser John
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of MX2014004905A publication Critical patent/MX2014004905A/es
Publication of MX343897B publication Critical patent/MX343897B/es

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Pressure Sensors (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
MX2014004905A 2011-10-28 2012-10-15 Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe. MX343897B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161552485P 2011-10-28 2011-10-28
PCT/IB2012/055605 WO2013061204A2 (en) 2011-10-28 2012-10-15 Pre-collapsed capacitive micro-machined transducer cell with plug

Publications (2)

Publication Number Publication Date
MX2014004905A MX2014004905A (es) 2014-05-28
MX343897B true MX343897B (es) 2016-11-28

Family

ID=47227991

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2014004905A MX343897B (es) 2011-10-28 2012-10-15 Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe.

Country Status (8)

Country Link
US (1) US9117438B2 (https=)
EP (1) EP2747904B1 (https=)
JP (1) JP5961697B2 (https=)
CN (1) CN103906579B (https=)
BR (1) BR112014009698A2 (https=)
MX (1) MX343897B (https=)
RU (1) RU2595800C2 (https=)
WO (1) WO2013061204A2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2771132B1 (en) * 2011-10-28 2018-08-29 Koninklijke Philips N.V. Pre-collapsed capacitive micro-machined transducer cell with stress layer
JP6069798B2 (ja) 2011-12-20 2017-02-01 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスデューサデバイス及びこれを製造する方法
EP3191233B1 (en) 2014-09-11 2022-11-23 Koninklijke Philips N.V. Wide band through-body ultrasonic communication system
WO2017001636A1 (en) * 2015-06-30 2017-01-05 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
US10043903B2 (en) 2015-12-21 2018-08-07 Samsung Electronics Co., Ltd. Semiconductor devices with source/drain stress liner
US11061000B2 (en) * 2016-12-01 2021-07-13 Koninklijke Philips N.V. CMUT probe, system and method
RU2732839C1 (ru) * 2019-07-09 2020-09-23 Федеральное государственное бюджетное образовательное учреждение высшего образования "Пензенский государственный университет" (ФГБОУ ВО "ПГУ") Полупроводниковый преобразователь давления с повышенной точностью и чувствительностью
US11172300B2 (en) * 2020-02-07 2021-11-09 xMEMS Labs, Inc. Sound producing device
US11304005B2 (en) 2020-02-07 2022-04-12 xMEMS Labs, Inc. Crossover circuit

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005120130A1 (ja) * 2004-06-03 2005-12-15 Olympus Corporation 静電容量型超音波振動子とその製造方法、静電容量型超音波プローブ
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
US8203912B2 (en) * 2007-07-31 2012-06-19 Koninklijke Philips Electronics N.V. CMUTs with a high-k dielectric
CN101969856B (zh) * 2007-09-17 2013-06-05 皇家飞利浦电子股份有限公司 预塌陷的电容微机械超声传感器的制造及其应用
US10092270B2 (en) 2007-09-17 2018-10-09 Koninklijke Philips Electronics N.V. Pre-collapsed CMUT with mechanical collapse retention
CN101896288B (zh) * 2007-12-14 2013-03-27 皇家飞利浦电子股份有限公司 包括经成型衬底的可以塌陷模式工作的cmut
EP2145696A1 (en) * 2008-07-15 2010-01-20 UAB Minatech Capacitive micromachined ultrasonic transducer and its fabrication method
WO2010032156A2 (en) 2008-09-16 2010-03-25 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasound transducer

Also Published As

Publication number Publication date
JP2015504620A (ja) 2015-02-12
WO2013061204A2 (en) 2013-05-02
EP2747904B1 (en) 2020-04-08
RU2014121503A (ru) 2015-12-10
RU2595800C2 (ru) 2016-08-27
CN103906579B (zh) 2016-08-24
CN103906579A (zh) 2014-07-02
WO2013061204A3 (en) 2013-09-12
US9117438B2 (en) 2015-08-25
EP2747904A2 (en) 2014-07-02
MX2014004905A (es) 2014-05-28
US20140247698A1 (en) 2014-09-04
BR112014009698A2 (pt) 2017-05-09
JP5961697B2 (ja) 2016-08-02

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