MX347686B - Celda transductora, micro-labrada, capacitiva, pre-colapsada con capa de tensión. - Google Patents
Celda transductora, micro-labrada, capacitiva, pre-colapsada con capa de tensión.Info
- Publication number
- MX347686B MX347686B MX2014004910A MX2014004910A MX347686B MX 347686 B MX347686 B MX 347686B MX 2014004910 A MX2014004910 A MX 2014004910A MX 2014004910 A MX2014004910 A MX 2014004910A MX 347686 B MX347686 B MX 347686B
- Authority
- MX
- Mexico
- Prior art keywords
- membrane
- stress layer
- capacitive micro
- transducer cell
- substrate
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/008—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means by using ultrasonic waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measuring Fluid Pressure (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
La presente invención se refiere a una celda transductora, micro-labrada, capacitiva, pre-colapsada (10) que comprende un substrato (12) y una membrana (14) que cubre un área total de la membrana (Atotal), en donde una cavidad (20) se forma entre la membrana (14) y el substrato (12), la membrana comprende un orificio (15) y una porción de borde (14a) que rodea el orificio (15). La celda (10) comprende además una capa de tensión (17) sobre la membrana (14), la capa de tensión (17) tiene un valor de tensión predeterminado con respecto a la membrana (14), la capa de tensión (17) está adaptada para proporcionar un momento de flexión sobre la membrana (14) en una dirección hacia el substrato (12) de tal manera que la porción de borde (14a) de la membrana (14) se colapse hacia el substrato (12). La presente invención se refiere además a un método para manufacturar esta celda transductora, micro-labrada, capacitiva, pre-colapsada (10).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161552482P | 2011-10-28 | 2011-10-28 | |
PCT/IB2012/055919 WO2013061298A2 (en) | 2011-10-28 | 2012-10-26 | Pre-collapsed capacitive micro-machined transducer cell with stress layer |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2014004910A MX2014004910A (es) | 2014-05-28 |
MX347686B true MX347686B (es) | 2017-05-09 |
Family
ID=47505271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2014004910A MX347686B (es) | 2011-10-28 | 2012-10-26 | Celda transductora, micro-labrada, capacitiva, pre-colapsada con capa de tensión. |
Country Status (8)
Country | Link |
---|---|
US (1) | US9534949B2 (es) |
EP (1) | EP2771132B1 (es) |
JP (1) | JP6210992B2 (es) |
CN (1) | CN103917304B (es) |
BR (1) | BR112014009659A2 (es) |
MX (1) | MX347686B (es) |
RU (1) | RU2603518C2 (es) |
WO (1) | WO2013061298A2 (es) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2607720C2 (ru) * | 2011-12-20 | 2017-01-10 | Конинклейке Филипс Н.В. | Устройство ультразвукового преобразователя и способ его изготовления |
CN105263851B (zh) | 2013-05-31 | 2017-10-13 | 罗伯特·博世有限公司 | 被限位的膜 |
DE102013223695B4 (de) * | 2013-11-20 | 2016-09-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum herstellen eines kapazitiven ultraschallwandlers und anordnung einer mehrzahl von kapazitiven ultraschallwandlern |
EP3110628B1 (en) * | 2014-02-28 | 2019-07-03 | The Regents of the University of California | Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (pmut) |
WO2016083273A1 (en) * | 2014-11-25 | 2016-06-02 | Koninklijke Philips N.V. | Ultrasound system and method |
CN105792084B (zh) * | 2016-04-26 | 2020-02-21 | 瑞声声学科技(深圳)有限公司 | Mems麦克风及其制造方法 |
CN110325293B (zh) * | 2016-12-22 | 2021-06-22 | 皇家飞利浦有限公司 | 电容式射频微机电开关的系统和操作方法 |
RU2672099C2 (ru) * | 2016-12-23 | 2018-11-12 | Евгений Анатольевич Обжиров | Электрическая машина емкостная (эме) с ячейками внутреннего сжатия |
WO2018235415A1 (ja) * | 2017-06-21 | 2018-12-27 | パナソニックIpマネジメント株式会社 | 物理量センサ |
DE102019203829B4 (de) * | 2019-03-20 | 2020-12-31 | Vitesco Technologies GmbH | Verfahren zum Herstellen einer Fluidsensorvorrichtung und Fluidsensorvorrichtung |
US11904357B2 (en) * | 2020-05-22 | 2024-02-20 | GE Precision Healthcare LLC | Micromachined ultrasonic transducers with non-coplanar actuation and displacement |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5619476A (en) * | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
DE69932587D1 (de) | 1999-02-09 | 2006-09-14 | St Microelectronics Srl | Verfahren zur Herstellung von integrierten Bauelementen mit elektromechanischen Mikrostrukturen, ohne Restspannung |
US20030022412A1 (en) | 2001-07-25 | 2003-01-30 | Motorola, Inc. | Monolithic semiconductor-piezoelectric device structures and electroacoustic charge transport devices |
US7489593B2 (en) | 2004-11-30 | 2009-02-10 | Vermon | Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor |
EP2207484B1 (en) * | 2007-09-17 | 2016-11-09 | Koninklijke Philips N.V. | Production of pre-collapsed capacitive micro-machined ultrasonic transducers and applications thereof |
WO2009041675A1 (en) * | 2007-09-25 | 2009-04-02 | Canon Kabushiki Kaisha | Electrostatic transducer and manufacturing method therefor |
US7745248B2 (en) | 2007-10-18 | 2010-06-29 | The Board Of Trustees Of The Leland Stanford Junior University | Fabrication of capacitive micromachined ultrasonic transducers by local oxidation |
EP2222417B1 (en) * | 2007-12-14 | 2019-10-23 | Koninklijke Philips N.V. | Collapsed mode operable cmut including contoured substrate |
EP2145696A1 (en) * | 2008-07-15 | 2010-01-20 | UAB Minatech | Capacitive micromachined ultrasonic transducer and its fabrication method |
JP2010061976A (ja) * | 2008-09-03 | 2010-03-18 | Toshiba Corp | スイッチ及びesd保護素子 |
RU2511671C2 (ru) | 2008-09-16 | 2014-04-10 | Конинклейке Филипс Электроникс Н.В. | Емкостной микрообработанный ультразвуковой преобразователь |
KR101689346B1 (ko) | 2009-02-27 | 2016-12-23 | 코닌클리케 필립스 엔.브이. | 기계적 붕괴 보유를 갖는 사전 붕괴된 cmut |
US8402831B2 (en) * | 2009-03-05 | 2013-03-26 | The Board Of Trustees Of The Leland Standford Junior University | Monolithic integrated CMUTs fabricated by low-temperature wafer bonding |
EP2747904B1 (en) * | 2011-10-28 | 2020-04-08 | Koninklijke Philips N.V. | Pre-collapsed capacitive micro-machined transducer cell with plug |
WO2013072803A1 (en) * | 2011-11-17 | 2013-05-23 | Koninklijke Philips Electronics N.V. | Pre-collapsed capacitive micro-machined transducer cell with annular-shaped collapsed region |
RU2607720C2 (ru) * | 2011-12-20 | 2017-01-10 | Конинклейке Филипс Н.В. | Устройство ультразвукового преобразователя и способ его изготовления |
-
2012
- 2012-10-26 JP JP2014537801A patent/JP6210992B2/ja active Active
- 2012-10-26 CN CN201280053001.1A patent/CN103917304B/zh active Active
- 2012-10-26 MX MX2014004910A patent/MX347686B/es active IP Right Grant
- 2012-10-26 WO PCT/IB2012/055919 patent/WO2013061298A2/en active Application Filing
- 2012-10-26 RU RU2014121392/28A patent/RU2603518C2/ru not_active IP Right Cessation
- 2012-10-26 EP EP12810422.1A patent/EP2771132B1/en active Active
- 2012-10-26 BR BR112014009659A patent/BR112014009659A2/pt not_active Application Discontinuation
- 2012-10-26 US US14/349,077 patent/US9534949B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2015501594A (ja) | 2015-01-15 |
WO2013061298A2 (en) | 2013-05-02 |
MX2014004910A (es) | 2014-05-28 |
RU2603518C2 (ru) | 2016-11-27 |
WO2013061298A3 (en) | 2013-09-19 |
EP2771132B1 (en) | 2018-08-29 |
BR112014009659A2 (pt) | 2017-05-09 |
US9534949B2 (en) | 2017-01-03 |
CN103917304A (zh) | 2014-07-09 |
RU2014121392A (ru) | 2015-12-10 |
JP6210992B2 (ja) | 2017-10-11 |
EP2771132A2 (en) | 2014-09-03 |
CN103917304B (zh) | 2016-08-17 |
US20140251014A1 (en) | 2014-09-11 |
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FG | Grant or registration |