BR112014009659A2 - célula de transdutor micro-usinado, capacitivo, pré-colapsada; e método de fabricação de uma célula de transdutor micro-usinado, capacitivo, pré-colapsada - Google Patents

célula de transdutor micro-usinado, capacitivo, pré-colapsada; e método de fabricação de uma célula de transdutor micro-usinado, capacitivo, pré-colapsada

Info

Publication number
BR112014009659A2
BR112014009659A2 BR112014009659A BR112014009659A BR112014009659A2 BR 112014009659 A2 BR112014009659 A2 BR 112014009659A2 BR 112014009659 A BR112014009659 A BR 112014009659A BR 112014009659 A BR112014009659 A BR 112014009659A BR 112014009659 A2 BR112014009659 A2 BR 112014009659A2
Authority
BR
Brazil
Prior art keywords
transducer cell
membrane
collapsed
machined
micro
Prior art date
Application number
BR112014009659A
Other languages
English (en)
Inventor
Leeuwestein Adriaan
Marcelis Bout
Douglas Fraser John
Dirksen Peter
Dekker Ronald
Adrianus Henneken Vincent
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of BR112014009659A2 publication Critical patent/BR112014009659A2/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/008—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means by using ultrasonic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

resumo célula de transdutor micro-usinado, capacitivo, pré-colapsada; e método de fabricação de uma célula de transdutor micro-usinado, capacitivo, pré-colapsada a presente invenção se refere a uma célula de transdutor micro-usinado, capacitivo, pré-colapsada (10) compreendendo um substrato (12), e uma membrana (14) que cobre uma área de membrana total (atotal), em que uma cavidade (20) é formada entre a membrana (14) e o substrato (12), a membrana compreendendo um orifício (15) e uma parte de borda (14a) que circunda o orifício (15). a célula (10) ainda compreende uma camada de tensão (17) sobre a membrana (14), a camada de tensão (17) tendo um valor de tensão predeterminado em relação à membrana (14), a camada de tensão (17) sendo adaptada para prover um momento fletor na membrana (14) em uma direção para o substrato (12), de modo que a parte de borda (14a) da membrana (14) seja colapsada ao substrato (12). a presente invenção ainda se refere a um método de fabricação dessa célula de transdutor micro-usinado, capacitivo, pré-colapsada (10).
BR112014009659A 2011-10-28 2012-10-26 célula de transdutor micro-usinado, capacitivo, pré-colapsada; e método de fabricação de uma célula de transdutor micro-usinado, capacitivo, pré-colapsada BR112014009659A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161552482P 2011-10-28 2011-10-28
PCT/IB2012/055919 WO2013061298A2 (en) 2011-10-28 2012-10-26 Pre-collapsed capacitive micro-machined transducer cell with stress layer

Publications (1)

Publication Number Publication Date
BR112014009659A2 true BR112014009659A2 (pt) 2017-05-09

Family

ID=47505271

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112014009659A BR112014009659A2 (pt) 2011-10-28 2012-10-26 célula de transdutor micro-usinado, capacitivo, pré-colapsada; e método de fabricação de uma célula de transdutor micro-usinado, capacitivo, pré-colapsada

Country Status (8)

Country Link
US (1) US9534949B2 (pt)
EP (1) EP2771132B1 (pt)
JP (1) JP6210992B2 (pt)
CN (1) CN103917304B (pt)
BR (1) BR112014009659A2 (pt)
MX (1) MX347686B (pt)
RU (1) RU2603518C2 (pt)
WO (1) WO2013061298A2 (pt)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR112014014911A2 (pt) 2011-12-20 2017-06-13 Koninklijke Philips Nv dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom
US9624091B2 (en) 2013-05-31 2017-04-18 Robert Bosch Gmbh Trapped membrane
DE102013223695B4 (de) * 2013-11-20 2016-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum herstellen eines kapazitiven ultraschallwandlers und anordnung einer mehrzahl von kapazitiven ultraschallwandlern
WO2015131083A1 (en) * 2014-02-28 2015-09-03 The Regents Of The University Of California Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (pmut)
EP3223709B1 (en) * 2014-11-25 2019-02-20 Koninklijke Philips N.V. Ultrasound system and method
CN105792084B (zh) * 2016-04-26 2020-02-21 瑞声声学科技(深圳)有限公司 Mems麦克风及其制造方法
US11458504B2 (en) 2016-12-22 2022-10-04 Koninklijke Philips N.V. Systems and methods of operation of capacitive radio frequency micro-electromechanical switches
RU2672099C2 (ru) * 2016-12-23 2018-11-12 Евгений Анатольевич Обжиров Электрическая машина емкостная (эме) с ячейками внутреннего сжатия
JP6970935B2 (ja) * 2017-06-21 2021-11-24 パナソニックＩｐマネジメント株式会社 物理量センサ
DE102019203829B4 (de) * 2019-03-20 2020-12-31 Vitesco Technologies GmbH Verfahren zum Herstellen einer Fluidsensorvorrichtung und Fluidsensorvorrichtung
US11904357B2 (en) * 2020-05-22 2024-02-20 GE Precision Healthcare LLC Micromachined ultrasonic transducers with non-coplanar actuation and displacement

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US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
EP1028466B1 (en) 1999-02-09 2006-08-02 STMicroelectronics S.r.l. Method for manufacturing integrated devices including electromechanical microstructures, without residual stress
US20030022412A1 (en) 2001-07-25 2003-01-30 Motorola, Inc. Monolithic semiconductor-piezoelectric device structures and electroacoustic charge transport devices
US7489593B2 (en) 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
EP2207484B1 (en) * 2007-09-17 2016-11-09 Koninklijke Philips N.V. Production of pre-collapsed capacitive micro-machined ultrasonic transducers and applications thereof
WO2010097729A1 (en) * 2009-02-27 2010-09-02 Koninklijke Philips Electronics, N.V. Pre-collapsed cmut with mechanical collapse retention
WO2009041675A1 (en) * 2007-09-25 2009-04-02 Canon Kabushiki Kaisha Electrostatic transducer and manufacturing method therefor
US7745248B2 (en) 2007-10-18 2010-06-29 The Board Of Trustees Of The Leland Stanford Junior University Fabrication of capacitive micromachined ultrasonic transducers by local oxidation
JP5833312B2 (ja) * 2007-12-14 2015-12-16 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 輪郭成形基板を含む崩壊モードで動作可能なｃＭＵＴ
EP2145696A1 (en) * 2008-07-15 2010-01-20 UAB Minatech Capacitive micromachined ultrasonic transducer and its fabrication method
JP2010061976A (ja) * 2008-09-03 2010-03-18 Toshiba Corp スイッチ及びｅｓｄ保護素子
US9132693B2 (en) 2008-09-16 2015-09-15 Koninklijke Philps N.V. Capacitive micromachine ultrasound transducer
US8402831B2 (en) * 2009-03-05 2013-03-26 The Board Of Trustees Of The Leland Standford Junior University Monolithic integrated CMUTs fabricated by low-temperature wafer bonding
WO2013061204A2 (en) * 2011-10-28 2013-05-02 Koninklijke Philips Electronics N.V. Pre-collapsed capacitive micro-machined transducer cell with plug
CN103958079B (zh) * 2011-11-17 2016-08-24 皇家飞利浦有限公司 具有环形塌陷区域的预塌陷电容式微机械换能器元件
BR112014014911A2 (pt) * 2011-12-20 2017-06-13 Koninklijke Philips Nv dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom

Also Published As

Publication number Publication date
CN103917304A (zh) 2014-07-09
WO2013061298A3 (en) 2013-09-19
EP2771132B1 (en) 2018-08-29
EP2771132A2 (en) 2014-09-03
WO2013061298A2 (en) 2013-05-02
MX2014004910A (es) 2014-05-28
US9534949B2 (en) 2017-01-03
CN103917304B (zh) 2016-08-17
US20140251014A1 (en) 2014-09-11
JP2015501594A (ja) 2015-01-15
RU2014121392A (ru) 2015-12-10
JP6210992B2 (ja) 2017-10-11
MX347686B (es) 2017-05-09
RU2603518C2 (ru) 2016-11-27

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B11B Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements
B350 Update of information on the portal [chapter 15.35 patent gazette]