BR112014009698A2 - célula transdutora micromanufaturada capacitiva que sofreu colapso previamente e método de fabricação da mesma - Google Patents

célula transdutora micromanufaturada capacitiva que sofreu colapso previamente e método de fabricação da mesma

Info

Publication number
BR112014009698A2
BR112014009698A2 BR112014009698A BR112014009698A BR112014009698A2 BR 112014009698 A2 BR112014009698 A2 BR 112014009698A2 BR 112014009698 A BR112014009698 A BR 112014009698A BR 112014009698 A BR112014009698 A BR 112014009698A BR 112014009698 A2 BR112014009698 A2 BR 112014009698A2
Authority
BR
Brazil
Prior art keywords
micromanufactured
membrane
transducer cell
manufacturing
collapsed capacitive
Prior art date
Application number
BR112014009698A
Other languages
English (en)
Portuguese (pt)
Inventor
Leeuwenstein Adriaan
Marcelis Bout
Douglas Fraser John
Dirksen Peter
Dekker Ronald
Adrianus Henneken Vincent
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of BR112014009698A2 publication Critical patent/BR112014009698A2/pt

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Mechanical Engineering (AREA)
  • Multimedia (AREA)
  • Manufacturing & Machinery (AREA)
  • Signal Processing (AREA)
  • Pressure Sensors (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
BR112014009698A 2011-10-28 2012-10-15 célula transdutora micromanufaturada capacitiva que sofreu colapso previamente e método de fabricação da mesma BR112014009698A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161552485P 2011-10-28 2011-10-28
PCT/IB2012/055605 WO2013061204A2 (en) 2011-10-28 2012-10-15 Pre-collapsed capacitive micro-machined transducer cell with plug

Publications (1)

Publication Number Publication Date
BR112014009698A2 true BR112014009698A2 (pt) 2017-05-09

Family

ID=47227991

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112014009698A BR112014009698A2 (pt) 2011-10-28 2012-10-15 célula transdutora micromanufaturada capacitiva que sofreu colapso previamente e método de fabricação da mesma

Country Status (8)

Country Link
US (1) US9117438B2 (https=)
EP (1) EP2747904B1 (https=)
JP (1) JP5961697B2 (https=)
CN (1) CN103906579B (https=)
BR (1) BR112014009698A2 (https=)
MX (1) MX343897B (https=)
RU (1) RU2595800C2 (https=)
WO (1) WO2013061204A2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6210992B2 (ja) * 2011-10-28 2017-10-11 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 応力層を持つ事前圧壊容量マイクロマシン・トランスデューサセル
IN2014CN04975A (https=) 2011-12-20 2015-09-18 Koninkl Philips Nv
US10313027B2 (en) 2014-09-11 2019-06-04 Koninklijke Philips N.V. Wide band through-body ultrasonic communication system
JP6925286B2 (ja) * 2015-06-30 2021-08-25 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波システム及び超音波パルス送信方法
US10043903B2 (en) 2015-12-21 2018-08-07 Samsung Electronics Co., Ltd. Semiconductor devices with source/drain stress liner
US11061000B2 (en) * 2016-12-01 2021-07-13 Koninklijke Philips N.V. CMUT probe, system and method
RU2732839C1 (ru) * 2019-07-09 2020-09-23 Федеральное государственное бюджетное образовательное учреждение высшего образования "Пензенский государственный университет" (ФГБОУ ВО "ПГУ") Полупроводниковый преобразователь давления с повышенной точностью и чувствительностью
US11304005B2 (en) 2020-02-07 2022-04-12 xMEMS Labs, Inc. Crossover circuit
US11172300B2 (en) * 2020-02-07 2021-11-09 xMEMS Labs, Inc. Sound producing device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4347885B2 (ja) * 2004-06-03 2009-10-21 オリンパス株式会社 静電容量型超音波振動子の製造方法、当該製造方法によって製造された静電容量型超音波振動子を備えた超音波内視鏡装置、静電容量型超音波プローブおよび静電容量型超音波振動子
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
US8203912B2 (en) * 2007-07-31 2012-06-19 Koninklijke Philips Electronics N.V. CMUTs with a high-k dielectric
US8327521B2 (en) 2007-09-17 2012-12-11 Koninklijke Philips Electronics N.V. Method for production and using a capacitive micro-machined ultrasonic transducer
US10092270B2 (en) 2007-09-17 2018-10-09 Koninklijke Philips Electronics N.V. Pre-collapsed CMUT with mechanical collapse retention
US8787116B2 (en) * 2007-12-14 2014-07-22 Koninklijke Philips N.V. Collapsed mode operable cMUT including contoured substrate
EP2145696A1 (en) * 2008-07-15 2010-01-20 UAB Minatech Capacitive micromachined ultrasonic transducer and its fabrication method
US9132693B2 (en) 2008-09-16 2015-09-15 Koninklijke Philps N.V. Capacitive micromachine ultrasound transducer

Also Published As

Publication number Publication date
JP5961697B2 (ja) 2016-08-02
EP2747904A2 (en) 2014-07-02
JP2015504620A (ja) 2015-02-12
WO2013061204A3 (en) 2013-09-12
CN103906579A (zh) 2014-07-02
EP2747904B1 (en) 2020-04-08
RU2595800C2 (ru) 2016-08-27
US9117438B2 (en) 2015-08-25
RU2014121503A (ru) 2015-12-10
US20140247698A1 (en) 2014-09-04
MX2014004905A (es) 2014-05-28
MX343897B (es) 2016-11-28
WO2013061204A2 (en) 2013-05-02
CN103906579B (zh) 2016-08-24

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]

Free format text: REFERENTE A 7A ANUIDADE.

B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]

Free format text: EM VIRTUDE DO ARQUIVAMENTO PUBLICADO NA RPI 2536 DE 13-08-2019 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDO O ARQUIVAMENTO DO PEDIDO DE PATENTE, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.

B350 Update of information on the portal [chapter 15.35 patent gazette]