WO2012145278A3 - Mems composite transducer including compliant membrane - Google Patents
Mems composite transducer including compliant membrane Download PDFInfo
- Publication number
- WO2012145278A3 WO2012145278A3 PCT/US2012/033864 US2012033864W WO2012145278A3 WO 2012145278 A3 WO2012145278 A3 WO 2012145278A3 US 2012033864 W US2012033864 W US 2012033864W WO 2012145278 A3 WO2012145278 A3 WO 2012145278A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- compliant membrane
- mems
- substrate
- composite transducer
- transducer including
- Prior art date
Links
- 239000012528 membrane Substances 0.000 title abstract 5
- 239000002131 composite material Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 4
- 230000002463 transducing effect Effects 0.000 abstract 4
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14282—Structure of print heads with piezoelectric elements of cantilever type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
- B41J2002/14435—Moving nozzle made of thermal bend detached actuator
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/02—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Abstract
A MEMS composite transducer (100) includes a substrate (110), a MEMS transducer (120), and a compliant membrane (130). Portions of the substrate define an outer boundary of a cavity (115). A first portion (121) of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion (131) of the compliant membrane covers the MEMS transducing member and a second portion (132) of the compliant membrane is anchored to the substrate.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/089,541 | 2011-04-19 | ||
US13/089,532 US8409900B2 (en) | 2011-04-19 | 2011-04-19 | Fabricating MEMS composite transducer including compliant membrane |
US13/089,532 | 2011-04-19 | ||
US13/089,541 US8631711B2 (en) | 2011-04-19 | 2011-04-19 | MEMS composite transducer including compliant membrane |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012145278A2 WO2012145278A2 (en) | 2012-10-26 |
WO2012145278A3 true WO2012145278A3 (en) | 2013-08-15 |
Family
ID=46028160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2012/033864 WO2012145278A2 (en) | 2011-04-19 | 2012-04-17 | Mems composite transducer including compliant membrane |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2012145278A2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3006112B1 (en) * | 2013-05-24 | 2016-10-21 | Chambre De Commerce Et D'industrie De Region Paris Ile De France | PROCESS FOR MANUFACTURING A FLEXIBLE PIEZOELECTRIC SENSOR |
EP3472829B1 (en) | 2016-06-17 | 2023-08-16 | InvenSense, Inc. | Piezoelectric micromachined ultrasonic transducers having stress relief features |
WO2019099013A1 (en) | 2017-11-16 | 2019-05-23 | Chirp Microsystems, Inc. | Piezoelectric micromachined ultrasonic transducer with a patterned membrane structure |
KR102395994B1 (en) | 2017-12-27 | 2022-05-11 | 삼성전자주식회사 | Directional microphone |
US11239408B2 (en) * | 2018-09-04 | 2022-02-01 | Kathirgamasundaram Sooriakumar | Acoustic transducer and related fabrication and packaging techniques |
WO2024020846A1 (en) * | 2022-07-27 | 2024-02-01 | 深圳市韶音科技有限公司 | Acoustic output device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050046672A1 (en) * | 2003-08-28 | 2005-03-03 | Eastman Kodak Company | Thermally conductive thermal actuator and liquid drop emitter using same |
EP1630416A1 (en) * | 2004-08-20 | 2006-03-01 | Palo Alto Research Center Incorporated | Shape memory material device and method for manufacturing |
US20060132546A1 (en) * | 2004-12-21 | 2006-06-22 | Tien-Ho Gau | Piezo-driven micro-droplet jet generator |
US20070245827A1 (en) * | 2006-04-20 | 2007-10-25 | Li-Peng Wang | Vibration spectrum sensor array having differing sensors |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6464347B2 (en) | 2000-11-30 | 2002-10-15 | Xerox Corporation | Laser ablated filter |
US6561627B2 (en) | 2000-11-30 | 2003-05-13 | Eastman Kodak Company | Thermal actuator |
-
2012
- 2012-04-17 WO PCT/US2012/033864 patent/WO2012145278A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050046672A1 (en) * | 2003-08-28 | 2005-03-03 | Eastman Kodak Company | Thermally conductive thermal actuator and liquid drop emitter using same |
EP1630416A1 (en) * | 2004-08-20 | 2006-03-01 | Palo Alto Research Center Incorporated | Shape memory material device and method for manufacturing |
US20060132546A1 (en) * | 2004-12-21 | 2006-06-22 | Tien-Ho Gau | Piezo-driven micro-droplet jet generator |
US20070245827A1 (en) * | 2006-04-20 | 2007-10-25 | Li-Peng Wang | Vibration spectrum sensor array having differing sensors |
Also Published As
Publication number | Publication date |
---|---|
WO2012145278A2 (en) | 2012-10-26 |
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