WO2012145278A3 - Mems composite transducer including compliant membrane - Google Patents

Mems composite transducer including compliant membrane Download PDF

Info

Publication number
WO2012145278A3
WO2012145278A3 PCT/US2012/033864 US2012033864W WO2012145278A3 WO 2012145278 A3 WO2012145278 A3 WO 2012145278A3 US 2012033864 W US2012033864 W US 2012033864W WO 2012145278 A3 WO2012145278 A3 WO 2012145278A3
Authority
WO
WIPO (PCT)
Prior art keywords
compliant membrane
mems
substrate
composite transducer
transducer including
Prior art date
Application number
PCT/US2012/033864
Other languages
French (fr)
Other versions
WO2012145278A2 (en
Inventor
James D. Huffman
Original Assignee
Eastman Kodak Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/089,532 external-priority patent/US8409900B2/en
Priority claimed from US13/089,541 external-priority patent/US8631711B2/en
Application filed by Eastman Kodak Company filed Critical Eastman Kodak Company
Publication of WO2012145278A2 publication Critical patent/WO2012145278A2/en
Publication of WO2012145278A3 publication Critical patent/WO2012145278A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14282—Structure of print heads with piezoelectric elements of cantilever type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14435—Moving nozzle made of thermal bend detached actuator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Abstract

A MEMS composite transducer (100) includes a substrate (110), a MEMS transducer (120), and a compliant membrane (130). Portions of the substrate define an outer boundary of a cavity (115). A first portion (121) of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion (131) of the compliant membrane covers the MEMS transducing member and a second portion (132) of the compliant membrane is anchored to the substrate.
PCT/US2012/033864 2011-04-19 2012-04-17 Mems composite transducer including compliant membrane WO2012145278A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US13/089,541 2011-04-19
US13/089,532 US8409900B2 (en) 2011-04-19 2011-04-19 Fabricating MEMS composite transducer including compliant membrane
US13/089,532 2011-04-19
US13/089,541 US8631711B2 (en) 2011-04-19 2011-04-19 MEMS composite transducer including compliant membrane

Publications (2)

Publication Number Publication Date
WO2012145278A2 WO2012145278A2 (en) 2012-10-26
WO2012145278A3 true WO2012145278A3 (en) 2013-08-15

Family

ID=46028160

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2012/033864 WO2012145278A2 (en) 2011-04-19 2012-04-17 Mems composite transducer including compliant membrane

Country Status (1)

Country Link
WO (1) WO2012145278A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3006112B1 (en) * 2013-05-24 2016-10-21 Chambre De Commerce Et D'industrie De Region Paris Ile De France PROCESS FOR MANUFACTURING A FLEXIBLE PIEZOELECTRIC SENSOR
EP3472829B1 (en) 2016-06-17 2023-08-16 InvenSense, Inc. Piezoelectric micromachined ultrasonic transducers having stress relief features
WO2019099013A1 (en) 2017-11-16 2019-05-23 Chirp Microsystems, Inc. Piezoelectric micromachined ultrasonic transducer with a patterned membrane structure
KR102395994B1 (en) 2017-12-27 2022-05-11 삼성전자주식회사 Directional microphone
US11239408B2 (en) * 2018-09-04 2022-02-01 Kathirgamasundaram Sooriakumar Acoustic transducer and related fabrication and packaging techniques
WO2024020846A1 (en) * 2022-07-27 2024-02-01 深圳市韶音科技有限公司 Acoustic output device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050046672A1 (en) * 2003-08-28 2005-03-03 Eastman Kodak Company Thermally conductive thermal actuator and liquid drop emitter using same
EP1630416A1 (en) * 2004-08-20 2006-03-01 Palo Alto Research Center Incorporated Shape memory material device and method for manufacturing
US20060132546A1 (en) * 2004-12-21 2006-06-22 Tien-Ho Gau Piezo-driven micro-droplet jet generator
US20070245827A1 (en) * 2006-04-20 2007-10-25 Li-Peng Wang Vibration spectrum sensor array having differing sensors

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6464347B2 (en) 2000-11-30 2002-10-15 Xerox Corporation Laser ablated filter
US6561627B2 (en) 2000-11-30 2003-05-13 Eastman Kodak Company Thermal actuator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050046672A1 (en) * 2003-08-28 2005-03-03 Eastman Kodak Company Thermally conductive thermal actuator and liquid drop emitter using same
EP1630416A1 (en) * 2004-08-20 2006-03-01 Palo Alto Research Center Incorporated Shape memory material device and method for manufacturing
US20060132546A1 (en) * 2004-12-21 2006-06-22 Tien-Ho Gau Piezo-driven micro-droplet jet generator
US20070245827A1 (en) * 2006-04-20 2007-10-25 Li-Peng Wang Vibration spectrum sensor array having differing sensors

Also Published As

Publication number Publication date
WO2012145278A2 (en) 2012-10-26

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