JP2015501371A5 - - Google Patents
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- JP2015501371A5 JP2015501371A5 JP2014532353A JP2014532353A JP2015501371A5 JP 2015501371 A5 JP2015501371 A5 JP 2015501371A5 JP 2014532353 A JP2014532353 A JP 2014532353A JP 2014532353 A JP2014532353 A JP 2014532353A JP 2015501371 A5 JP2015501371 A5 JP 2015501371A5
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- pulse
- metal
- substrate
- power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP11183582 | 2011-09-30 | ||
| EP11183582.3 | 2011-09-30 | ||
| EP12157769 | 2012-03-01 | ||
| EP12157769.6 | 2012-03-01 | ||
| PCT/EP2012/068887 WO2013045454A2 (en) | 2011-09-30 | 2012-09-25 | Coating of substrates using hipims |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015501371A JP2015501371A (ja) | 2015-01-15 |
| JP2015501371A5 true JP2015501371A5 (cg-RX-API-DMAC7.html) | 2015-11-05 |
| JP6093363B2 JP6093363B2 (ja) | 2017-03-08 |
Family
ID=47010536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014532353A Active JP6093363B2 (ja) | 2011-09-30 | 2012-09-25 | Hipimsを用いた基材のコーティング |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9416440B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2761050B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6093363B2 (cg-RX-API-DMAC7.html) |
| WO (1) | WO2013045454A2 (cg-RX-API-DMAC7.html) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5892336B2 (ja) * | 2012-08-31 | 2016-03-23 | 三菱マテリアル株式会社 | 熱伝導性と潤滑特性にすぐれた表面被覆ドリル |
| JP6206133B2 (ja) * | 2012-11-30 | 2017-10-04 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
| EP2784799B1 (en) * | 2013-03-28 | 2022-12-21 | CemeCon AG | Dense, hard coatings on substrates using HIPIMS |
| WO2015120893A1 (en) | 2014-02-13 | 2015-08-20 | Mimsi Materials Ab | Method of coating a substrate so as to provide a controlled in-plane compositional modulation |
| EP3149104A4 (en) * | 2014-05-30 | 2018-02-21 | Services Pétroliers Schlumberger | Degradable powder blend |
| US10008667B2 (en) * | 2014-08-29 | 2018-06-26 | Intel Corporation | Materials and components in phase change memory devices |
| FR3025929B1 (fr) * | 2014-09-17 | 2016-10-21 | Commissariat Energie Atomique | Gaines de combustible nucleaire, procedes de fabrication et utilisation contre l'oxydation. |
| US11049702B2 (en) | 2015-04-27 | 2021-06-29 | Advanced Energy Industries, Inc. | Rate enhanced pulsed DC sputtering system |
| US9812305B2 (en) | 2015-04-27 | 2017-11-07 | Advanced Energy Industries, Inc. | Rate enhanced pulsed DC sputtering system |
| US10689748B2 (en) * | 2015-07-15 | 2020-06-23 | Sumitomo Electric Industries, Ltd. | Coating |
| US10373811B2 (en) | 2015-07-24 | 2019-08-06 | Aes Global Holdings, Pte. Ltd | Systems and methods for single magnetron sputtering |
| JP6519795B2 (ja) * | 2015-09-30 | 2019-05-29 | 三菱マテリアル株式会社 | 耐チッピング性、耐摩耗性にすぐれた表面被覆切削工具 |
| GB201517879D0 (en) * | 2015-10-09 | 2015-11-25 | Spts Technologies Ltd | Method of deposition |
| US11440102B2 (en) * | 2015-12-22 | 2022-09-13 | Sandvik Intellectual Property Ab | Coated cutting tool and method |
| RU2730312C2 (ru) * | 2015-12-22 | 2020-08-21 | Сандвик Интеллекчуал Проперти Аб | Способ изготовления pvd-слоя и режущий инструмент с покрытием |
| US9994958B2 (en) * | 2016-01-20 | 2018-06-12 | Sumitomo Electric Hardmetal Corp. | Coating, cutting tool, and method of manufacturing coating |
| CN110023530B (zh) | 2016-12-28 | 2021-06-15 | 住友电气工业株式会社 | 被膜 |
| EP3676422B1 (en) * | 2017-08-31 | 2023-10-18 | Walter AG | Wear resistant pvd tool coating containing tialn nanolayer films |
| KR102064172B1 (ko) * | 2017-09-01 | 2020-01-09 | 한국야금 주식회사 | 내마모성과 인성이 우수한 경질피막 |
| EP3625377A1 (en) | 2017-09-05 | 2020-03-25 | Oerlikon Surface Solutions AG, Pfäffikon | Al-rich aitin-based films |
| JP6476261B1 (ja) * | 2017-10-17 | 2019-02-27 | 株式会社神戸製鋼所 | 成膜方法 |
| JP7072053B2 (ja) * | 2018-04-11 | 2022-05-19 | 住友電気工業株式会社 | 被膜 |
| US11821073B2 (en) | 2018-10-26 | 2023-11-21 | Oerlikon Surface Solutions Ag, Pfäffikon | Vanadium aluminium nitride (VAlN) micro alloyed with Ti and/or Si |
| JP7217866B2 (ja) * | 2019-03-19 | 2023-02-06 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
| EP3736358A1 (en) * | 2019-05-08 | 2020-11-11 | Walter Ag | A coated cutting tool |
| KR20220038113A (ko) * | 2019-07-25 | 2022-03-25 | 어드밴스드 에너지 인더스트리즈 인코포레이티드 | 펄스형 dc 스퍼터링 시스템들 및 방법들 |
| DE102019124616A1 (de) * | 2019-09-12 | 2021-03-18 | Cemecon Ag | Mehrlagige Beschichtung |
| EP3839098A1 (en) * | 2019-12-20 | 2021-06-23 | Walter Ag | A coated cutting tool |
| WO2021187077A1 (ja) * | 2020-03-19 | 2021-09-23 | 日東電工株式会社 | 窒化物積層体、及び窒化物積層体の製造方法 |
| DE102020116157A1 (de) * | 2020-06-18 | 2021-12-23 | Cemecon Ag. | Verfahren und Vorrichtung zum Aufbringen einer Beschichtung sowie beschichteter Körper |
| CN111962034B (zh) * | 2020-08-14 | 2022-11-01 | 深圳后浪电子信息材料有限公司 | 一种覆铜板及其高速真空制备方法 |
| DE102020124032A1 (de) * | 2020-09-15 | 2022-03-17 | Cemecon Ag. | Beschichtungsvorrichtung und Beschichtungsverfahren mit unterteilten Pulsen |
| US12476090B2 (en) * | 2021-12-09 | 2025-11-18 | Ulvac, Inc. | Method of depositing silicon nitride film, apparatus for depositing film, and silicon nitride film |
| US11724317B1 (en) | 2022-03-10 | 2023-08-15 | Kennametal Inc. | Cubic phase refractory coatings and applications thereof |
| CN115029664A (zh) * | 2022-07-13 | 2022-09-09 | 海南大学 | 一种具有广谱抗菌性光热薄膜材料的制备方法 |
| CN116657104B (zh) * | 2023-05-31 | 2025-11-21 | 中国科学院宁波材料技术与工程研究所 | (110)面择优取向的max相涂层及制备方法与应用 |
| EP4471821A1 (de) * | 2023-06-02 | 2024-12-04 | Melec Gmbh | Verfahren zum magnetronsputtern |
| CN117448758A (zh) * | 2023-09-19 | 2024-01-26 | 中国科学院宁波材料技术与工程研究所 | 非晶碳涂层的磁控溅射方法 |
| CN118563265B (zh) * | 2024-05-23 | 2025-06-20 | 广东华升纳米科技股份有限公司 | 一种阴极一体化涂层制备方法、装置以及AlTiN涂层 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3705381B2 (ja) * | 1996-09-03 | 2005-10-12 | 日立ツール株式会社 | 多層被覆硬質工具 |
| JP3439993B2 (ja) * | 1998-07-22 | 2003-08-25 | 株式会社不二越 | マグネトロンスパッタ装置 |
| JP4112834B2 (ja) * | 2000-12-28 | 2008-07-02 | 株式会社神戸製鋼所 | 切削工具用硬質皮膜を形成するためのターゲット |
| SE526338C2 (sv) * | 2002-09-04 | 2005-08-23 | Seco Tools Ab | Skär med utskiljningshärdad slitstark refraktär beläggning |
| ATE355395T1 (de) * | 2002-11-19 | 2006-03-15 | Hitachi Tool Eng | Hartstoffschicht und damit beschichtetes werkzeug |
| JP2004230515A (ja) * | 2003-01-30 | 2004-08-19 | Nachi Fujikoshi Corp | 高機能加工用工具 |
| JP2006082210A (ja) * | 2004-09-17 | 2006-03-30 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
| JP5060714B2 (ja) * | 2004-09-30 | 2012-10-31 | 株式会社神戸製鋼所 | 耐摩耗性および耐酸化性に優れた硬質皮膜、並びに該硬質皮膜形成用ターゲット |
| DE102005033769B4 (de) | 2005-07-15 | 2009-10-22 | Systec System- Und Anlagentechnik Gmbh & Co.Kg | Verfahren und Vorrichtung zur Mehrkathoden-PVD-Beschichtung und Substrat mit PVD-Beschichtung |
| JP2007119810A (ja) * | 2005-10-26 | 2007-05-17 | Hitachi Tool Engineering Ltd | 被覆部材 |
| GB0608582D0 (en) * | 2006-05-02 | 2006-06-07 | Univ Sheffield Hallam | High power impulse magnetron sputtering vapour deposition |
| US8435389B2 (en) * | 2006-12-12 | 2013-05-07 | Oc Oerlikon Balzers Ag | RF substrate bias with high power impulse magnetron sputtering (HIPIMS) |
| SE0602814L (sv) * | 2006-12-27 | 2008-06-28 | Sandvik Intellectual Property | Skärverktyg med multiskiktbeläggning |
| JP4668214B2 (ja) * | 2007-01-17 | 2011-04-13 | 株式会社神戸製鋼所 | 成形用金型 |
| EP2208560B2 (en) * | 2007-10-12 | 2017-09-20 | Hitachi Tool Engineering, Ltd. | Process for the production of the member covered with hard coating |
| KR101647515B1 (ko) * | 2008-04-03 | 2016-08-10 | 에바텍 어드벤스드 테크놀로지스 아크티엔게젤샤프트 | 반도체 칩용 금속 배선 구조의 제조 방법, 그리고 반도체 칩용 금속 배선 구조 제조를 위한 금속 배선 구조 제조 장치의 제어 방법 |
| DE102008019202A1 (de) * | 2008-04-17 | 2009-10-22 | Kennametal Inc. | Beschichtungsverfahren , Werkstück oder Werkzeug und dessen Verwendung |
| DE202009018428U1 (de) * | 2008-04-28 | 2011-09-28 | Cemecon Ag | Vorrichtung zum Vorbehandeln und Beschichten von Körpern |
| JP5424103B2 (ja) * | 2008-09-24 | 2014-02-26 | 日立金属株式会社 | 塑性加工用被覆金型 |
| WO2010040494A1 (en) | 2008-10-10 | 2010-04-15 | Oerlikon Trading Ag, Trübbach | Non gamma - phase cubic alcro |
| JP5395454B2 (ja) * | 2009-02-17 | 2014-01-22 | 住友電気工業株式会社 | 表面被覆切削工具 |
| KR101614979B1 (ko) * | 2009-04-03 | 2016-04-22 | 산드빅 인터렉츄얼 프로퍼티 에이비 | 높은 온도를 발생시키는 금속 절삭 분야를 위한 코팅된 절삭 공구 |
-
2012
- 2012-09-25 EP EP12770444.3A patent/EP2761050B1/en active Active
- 2012-09-25 US US14/348,829 patent/US9416440B2/en active Active
- 2012-09-25 JP JP2014532353A patent/JP6093363B2/ja active Active
- 2012-09-25 WO PCT/EP2012/068887 patent/WO2013045454A2/en not_active Ceased
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