JP2015501371A5 - - Google Patents

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Publication number
JP2015501371A5
JP2015501371A5 JP2014532353A JP2014532353A JP2015501371A5 JP 2015501371 A5 JP2015501371 A5 JP 2015501371A5 JP 2014532353 A JP2014532353 A JP 2014532353A JP 2014532353 A JP2014532353 A JP 2014532353A JP 2015501371 A5 JP2015501371 A5 JP 2015501371A5
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Japan
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cathode
pulse
metal
substrate
power
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JP2014532353A
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Japanese (ja)
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JP2015501371A (ja
JP6093363B2 (ja
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Priority claimed from PCT/EP2012/068887 external-priority patent/WO2013045454A2/en
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Publication of JP2015501371A5 publication Critical patent/JP2015501371A5/ja
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JP2014532353A 2011-09-30 2012-09-25 Hipimsを用いた基材のコーティング Active JP6093363B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP11183582 2011-09-30
EP11183582.3 2011-09-30
EP12157769 2012-03-01
EP12157769.6 2012-03-01
PCT/EP2012/068887 WO2013045454A2 (en) 2011-09-30 2012-09-25 Coating of substrates using hipims

Publications (3)

Publication Number Publication Date
JP2015501371A JP2015501371A (ja) 2015-01-15
JP2015501371A5 true JP2015501371A5 (cg-RX-API-DMAC7.html) 2015-11-05
JP6093363B2 JP6093363B2 (ja) 2017-03-08

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JP2014532353A Active JP6093363B2 (ja) 2011-09-30 2012-09-25 Hipimsを用いた基材のコーティング

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US (1) US9416440B2 (cg-RX-API-DMAC7.html)
EP (1) EP2761050B1 (cg-RX-API-DMAC7.html)
JP (1) JP6093363B2 (cg-RX-API-DMAC7.html)
WO (1) WO2013045454A2 (cg-RX-API-DMAC7.html)

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