JP2015204703A5 - - Google Patents

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Publication number
JP2015204703A5
JP2015204703A5 JP2014083454A JP2014083454A JP2015204703A5 JP 2015204703 A5 JP2015204703 A5 JP 2015204703A5 JP 2014083454 A JP2014083454 A JP 2014083454A JP 2014083454 A JP2014083454 A JP 2014083454A JP 2015204703 A5 JP2015204703 A5 JP 2015204703A5
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JP
Japan
Prior art keywords
actuator
thrust
control unit
actuators
unit
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JP2014083454A
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English (en)
Japanese (ja)
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JP6308852B2 (ja
JP2015204703A (ja
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Priority to JP2014083454A priority Critical patent/JP6308852B2/ja
Priority claimed from JP2014083454A external-priority patent/JP6308852B2/ja
Priority to KR1020150048898A priority patent/KR101894127B1/ko
Priority to US14/685,684 priority patent/US9802341B2/en
Publication of JP2015204703A publication Critical patent/JP2015204703A/ja
Publication of JP2015204703A5 publication Critical patent/JP2015204703A5/ja
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Publication of JP6308852B2 publication Critical patent/JP6308852B2/ja
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JP2014083454A 2014-04-15 2014-04-15 駆動装置、リソグラフィ装置、および物品の製造方法 Active JP6308852B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014083454A JP6308852B2 (ja) 2014-04-15 2014-04-15 駆動装置、リソグラフィ装置、および物品の製造方法
KR1020150048898A KR101894127B1 (ko) 2014-04-15 2015-04-07 구동 장치, 리소그래피 장치 및 물품 제조 방법
US14/685,684 US9802341B2 (en) 2014-04-15 2015-04-14 Driving apparatus, lithography apparatus, and method of manufacturing an article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014083454A JP6308852B2 (ja) 2014-04-15 2014-04-15 駆動装置、リソグラフィ装置、および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2015204703A JP2015204703A (ja) 2015-11-16
JP2015204703A5 true JP2015204703A5 (enExample) 2017-06-08
JP6308852B2 JP6308852B2 (ja) 2018-04-11

Family

ID=54264998

Family Applications (1)

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JP2014083454A Active JP6308852B2 (ja) 2014-04-15 2014-04-15 駆動装置、リソグラフィ装置、および物品の製造方法

Country Status (3)

Country Link
US (1) US9802341B2 (enExample)
JP (1) JP6308852B2 (enExample)
KR (1) KR101894127B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112003501B (zh) * 2020-07-21 2021-11-19 清华大学 干扰磁场下电机正弦误差的出力补偿方法及装置
DE102023205571A1 (de) * 2023-06-14 2024-12-19 Carl Zeiss Smt Gmbh Optisches system, lithographieanlage und verfahren zum vermindern von schwingungsbasierten störungen

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3184044B2 (ja) * 1994-05-24 2001-07-09 キヤノン株式会社 微動位置決め制御装置
KR100459694B1 (ko) * 1998-04-08 2005-04-06 삼성전자주식회사 모터 토크 상수 측정방법
JP4272750B2 (ja) 1998-06-23 2009-06-03 キヤノン株式会社 露光装置及び除振装置、システム同定装置及びその方法
JP3413485B2 (ja) * 2000-01-31 2003-06-03 住友重機械工業株式会社 リニアモータにおける推力リップル測定方法
US6668202B2 (en) * 2001-11-21 2003-12-23 Sumitomo Heavy Industries, Ltd. Position control system and velocity control system for stage driving mechanism
JP2003284388A (ja) 2002-03-19 2003-10-03 Nikon Corp モータ駆動装置、ステージ装置、およびそれを備えた露光装置
JP2004274997A (ja) * 2003-02-21 2004-09-30 Matsushita Electric Ind Co Ltd モータ駆動装置
JP4487168B2 (ja) * 2003-05-09 2010-06-23 株式会社ニコン ステージ装置及びその駆動方法、並びに露光装置
JP4391883B2 (ja) * 2004-05-19 2009-12-24 住友重機械工業株式会社 移動体位置制御装置及びこの制御装置を用いたステージ装置
US7289858B2 (en) * 2004-05-25 2007-10-30 Asml Netherlands B.V. Lithographic motion control system and method
JP2009077591A (ja) * 2007-09-21 2009-04-09 Juki Corp Ｘｙ位置決め装置の駆動制御装置
US8735774B2 (en) * 2009-03-27 2014-05-27 Electro Scientific Industries, Inc. Force reaction compensation system
JP5569195B2 (ja) * 2010-07-02 2014-08-13 シンフォニアテクノロジー株式会社 リニアアクチュエータ駆動装置

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