JP2015073083A5 - - Google Patents

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Publication number
JP2015073083A5
JP2015073083A5 JP2014156173A JP2014156173A JP2015073083A5 JP 2015073083 A5 JP2015073083 A5 JP 2015073083A5 JP 2014156173 A JP2014156173 A JP 2014156173A JP 2014156173 A JP2014156173 A JP 2014156173A JP 2015073083 A5 JP2015073083 A5 JP 2015073083A5
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JP
Japan
Prior art keywords
stage
electromagnet
thrust
driving means
driving
Prior art date
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Application number
JP2014156173A
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English (en)
Japanese (ja)
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JP2015073083A (ja
JP6452338B2 (ja
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Priority to JP2014156173A priority Critical patent/JP6452338B2/ja
Priority claimed from JP2014156173A external-priority patent/JP6452338B2/ja
Priority to US14/474,411 priority patent/US20150062552A1/en
Priority to KR1020140116973A priority patent/KR101823726B1/ko
Publication of JP2015073083A publication Critical patent/JP2015073083A/ja
Publication of JP2015073083A5 publication Critical patent/JP2015073083A5/ja
Priority to KR1020180008567A priority patent/KR20180043759A/ko
Application granted granted Critical
Publication of JP6452338B2 publication Critical patent/JP6452338B2/ja
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JP2014156173A 2013-09-04 2014-07-31 ステージ装置、およびその駆動方法 Active JP6452338B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014156173A JP6452338B2 (ja) 2013-09-04 2014-07-31 ステージ装置、およびその駆動方法
US14/474,411 US20150062552A1 (en) 2013-09-04 2014-09-02 Stage apparatus and its driving method
KR1020140116973A KR101823726B1 (ko) 2013-09-04 2014-09-03 스테이지 장치 및 그 구동 방법
KR1020180008567A KR20180043759A (ko) 2013-09-04 2018-01-24 스테이지 장치 및 그 구동 방법

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013182874 2013-09-04
JP2013182874 2013-09-04
JP2014156173A JP6452338B2 (ja) 2013-09-04 2014-07-31 ステージ装置、およびその駆動方法

Publications (3)

Publication Number Publication Date
JP2015073083A JP2015073083A (ja) 2015-04-16
JP2015073083A5 true JP2015073083A5 (enExample) 2017-09-07
JP6452338B2 JP6452338B2 (ja) 2019-01-16

Family

ID=52582793

Family Applications (1)

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JP2014156173A Active JP6452338B2 (ja) 2013-09-04 2014-07-31 ステージ装置、およびその駆動方法

Country Status (3)

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US (1) US20150062552A1 (enExample)
JP (1) JP6452338B2 (enExample)
KR (2) KR101823726B1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7022527B2 (ja) * 2017-07-07 2022-02-18 キヤノン株式会社 ステージ装置、リソグラフィ装置、および物品製造方法
JP7005344B2 (ja) * 2017-12-28 2022-01-21 キヤノン株式会社 制御方法、制御装置、リソグラフィ装置、および物品の製造方法
WO2019177337A1 (ko) * 2018-03-12 2019-09-19 (주)큐엠씨 발광다이오드 칩을 전사하는 전사 장치 및 방법
KR102042100B1 (ko) * 2018-03-12 2019-11-07 ㈜큐엠씨 발광다이오드 칩을 전사하는 전사 장치
KR102238999B1 (ko) * 2019-07-18 2021-04-12 세메스 주식회사 기판 지지 모듈 및 이를 구비하는 프로브 스테이션
KR102731545B1 (ko) * 2022-04-01 2024-11-18 (주)마이크로모션텍 6자유도 모션 장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6130517A (en) * 1998-02-12 2000-10-10 Nikon Corporation Magnetic actuator producing large acceleration on fine stage and low RMS power gain
JP2003022960A (ja) * 2001-07-09 2003-01-24 Canon Inc ステージ装置及びその駆動方法
JP2003045785A (ja) * 2001-08-01 2003-02-14 Nikon Corp ステージ装置及び露光装置、並びにデバイス製造方法
US7253576B2 (en) * 2004-04-05 2007-08-07 Nikon Corporation E/I core actuator commutation formula and control method
JP5878676B2 (ja) * 2012-10-09 2016-03-08 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 位置決めの装置、制御装置及び制御方法

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