JP2015204377A - Processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique capable of maintaining suction and mounting accuracy of a component even if a deviation occurs in the operation timing of a working unit in a processing apparatus.SOLUTION: A processing apparatus includes a working unit, a working section fixed to the working unit, a camera fixed to the working unit, and a control section for controlling the working section and the camera. The camera captures an image including the working section, and an object processed by the work in the working section. The control section corrects the operation timing of the working section, based on a first distance between the object in the image and the work position of the working section.

Description

  The present invention relates to a processing apparatus that corrects the timing of operation of a work unit using a camera.

  There is a device that performs mounting and inspection on an object by a working unit of a working unit arranged in the device. These devices are required to operate at high speed and with high accuracy. For example, a component mounting apparatus, which is one of such apparatuses, is an apparatus that mounts electronic components (hereinafter referred to as components) on a printed circuit board. High speed and high accuracy are required. As a conventional technique for realizing this, for example, a technique described in Patent Document 1 is disclosed.

  In the component mounting apparatus of Patent Document 1, the tip coordinate of one nozzle of a component mounting head that is a work unit is acquired by a component recognition camera. In Patent Document 1, the suction displacement of the sucked component with respect to the center of the nozzle is calculated, the suction shift is corrected, and the component is mounted at the command position on the substrate.

JP 2010-199630 A

  However, in Patent Document 1, no consideration is given to the opening / closing timing of the valve when the component is mounted on the nozzle. Therefore, the accuracy of component mounting may deteriorate due to a deviation in the opening / closing timing of the valve.

  An object of the present invention is to provide a technique capable of maintaining component suction and mounting accuracy even when a deviation occurs in the operation timing of the work unit of the apparatus.

  In order to solve the above problems, for example, the configuration described in the claims is adopted. The present application includes a plurality of means for solving the above problems. To give an example, a working unit, a working unit fixed to the working unit, a camera fixed to the working unit, and the working unit And a control unit that controls the camera, wherein the camera captures an image including the working unit and an object to be processed by the work of the working unit, and the control unit A processing device is provided that corrects the operation timing of the working unit based on a first distance between the object and a working position by the working unit.

  According to another example, a work unit, a work unit fixed to the work unit, a camera fixed to the work unit, a control unit for controlling the work unit and the camera, The camera captures an image including the working unit and an object processed by the work of the working unit, and the control unit determines whether the object exists in the image, and the object Is provided, the processing unit performs the work by the working unit, and the processing unit does not perform the work by the working unit when the object is not in the image.

  According to the present invention, even when a deviation occurs in the operation timing of the work unit of the apparatus, the component suction and mounting accuracy can be maintained.

  Further features related to the present invention will become apparent from the description of the present specification and the accompanying drawings. Further, problems, configurations and effects other than those described above will be clarified by the description of the following examples.

1 is an external view of a component mounting apparatus according to a first embodiment of the present invention. It is detail drawing of a head actuator. It is a figure which shows the structure of a control part. It is an imaging example of the image which the camera imaged. It is a figure explaining the opening and closing timing of the valve | bulb at the time of component adsorption | suction when a nozzle is clogged. It is a flowchart explaining the correction method of the opening / closing timing of the valve | bulb at the time of components adsorption | suction. It is explanatory drawing of the camera image for confirming whether the nozzle in components adsorption | suction operation | movement attracted | sucked components. It is a figure explaining the component adsorption | suction time after correct | amending the opening / closing timing of a valve | bulb. It is a figure explaining component mounting in case the board | substrate of mounting object has curved. It is an example of imaging of a component mounting image captured by a camera. It is a flowchart explaining the correction method of the opening / closing timing of the valve | bulb at the time of component mounting. It is an example of an image picked up by a camera when a component has been conveyed by a feeder. It is a flowchart explaining a process when components are conveyed by the feeder.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. The accompanying drawings show specific embodiments in accordance with the principle of the present invention, but these are for the understanding of the present invention, and are never used to interpret the present invention in a limited manner. is not.

[First embodiment]
The following embodiments relate to a component mounting apparatus that mounts and inspects a component in a working unit of a work unit. FIG. 1 is an external view of a component mounting apparatus.

  The component mounting apparatus includes an X beam 102 and a Y beam 101, a head actuator 105, a feeder 106, a component recognition camera 107, and a control unit 109 that controls each component of the apparatus. The head actuator 105 is mounted on the X beam 102, and the head actuator 105 moves in the X direction on the X beam 102 by a drive shaft provided therein. The X beam 102 is mounted on the Y beam 101, and the X beam 102 moves in the Y direction on the Y beam 101 by a drive shaft provided therein. The head actuator 105 sucks parts supplied from the feeder 106.

  The component recognition camera 107 is mounted on the main body 110 of the component mounting apparatus. The image sensor of the component recognition camera 107 is directed in the positive Z-axis direction from directly below the head actuator 105, and images the posture of the component adsorbed by the head actuator 105.

  In the component mounting apparatus, the head actuator 105 can move onto the substrate 108 by moving the head actuator 105 on the X beam 102 and moving the X beam 102 on the Y beam 101. The head actuator 105 performs a mounting operation of sucking a component supplied from the feeder 106 and mounting the component at a predetermined position on the substrate 108. The control unit 109 controls the X beam 102, the Y beam 101, the head actuator 105, and the like.

  FIG. 2A is a configuration diagram of the head actuator 105. The head actuator 105 controls the rotor 201, the plurality of nozzles 202 mounted on the rotor 201, the nozzle tip 203 that is the tip of the nozzle 202, and atmospheric pressure control when the nozzle 202 sucks and mounts components. Valve 204, a camera 205 that images the nozzle tip 203, and a camera fixing unit 209 that is arranged coaxially with the rotor rotation shaft 208 and to which the camera 205 is fixed. As shown in FIG. 2A, the component 206 is adsorbed by the nozzle tip 203.

  In the head actuator 105, the camera 205 is mounted so that the imaging direction of the camera 205 is an angle θ with respect to the rotor rotation shaft 208. The camera 205 images the feeder 106, the nozzle 202, the nozzle tip 203, and the component 206. As a feature of the present embodiment, a distance dk ′ in the image from the feeder 106 to the component 206 when the nozzle 202 lifts the component 206 is calculated based on the image captured by the camera 205. At this time, in the component mounting apparatus, it is desirable that the imaging performance of the camera 205 is a sampling period of 1 kHz or more and a resolution of 1 μm or less.

  The fixing unit 209 of the camera 205 rotates around the Z axis about the rotor rotation axis 208 so that all the nozzles 202 mounted on the rotor 201 can be imaged. The nozzle 202 is driven in the Z-axis direction, adjusts the atmospheric pressure inside the nozzle 202 by opening and closing a valve 204 fixed to the rotor 201, and vacuum-sucks the component 206 to the nozzle tip 203 of the nozzle 202. And mounting on the substrate 108. Further, the rotor 201 rotates around the Z axis around the rotor rotation axis 208.

  FIG. 2B is a diagram illustrating the configuration of the control unit, and illustrates only the components related to the correction of the operation timing of the nozzle 202 described in the present embodiment. The control unit 109 includes an image processing unit 111, a distance determination unit 112, a correction unit 113, and a storage unit 114. The image processing unit 111 acquires a distance dk ′ from the feeder 106 to the component 206 in the image captured by the camera 205 by a known image processing technique. The distance determination unit 112 calculates a distance dk from the feeder 106 to the component 206 based on the distance dk ′ acquired by the image processing unit 111, and determines whether the component 206 is attracted by the nozzle 202. The correction unit 113 corrects the opening / closing timing of the valve 204 based on the time when the component 206 is sucked by the nozzle 202 and the specified component suction time. The storage unit 114 stores various threshold values, time values, correction values, and the like described below.

  FIG. 3 is an example of a camera image 301 captured by the camera 205. In the camera image 301, the nozzle 202 immediately before and immediately after the suction, the nozzle tip 203, the component 206 sucked by the nozzle 202, and the feeder 106 are imaged. The image processing unit 111 of the control unit 109 acquires a distance dk ′ in the image from the feeder 106 to the component 206 when the nozzle 202 lifts the component 206 from the camera image 301 using image processing. That is, the distance dk ′ is a moving distance of the component 206 in the image when the component 206 is sucked by the nozzle 202. In FIG. 3, a dotted line 206 a indicates a state where the component has been sent to the working position of the nozzle 202 by the feeder 106 and the component has not been sucked by the nozzle 202 yet. For example, the image processing unit 111 sets the center position of the component at the time of the dotted line 206a as a reference. At the time of the dotted line 206a, the distance dk ′ = 0.

  A solid line 206b indicates a state in which the component is sucked by the nozzle 202. For example, the image processing unit 111 acquires the distance dk ′ in the image from the reference to the center position of the component 206b using image processing. Here, since the camera 205 is fixed at an angle θ with respect to the rotor rotation axis 208, the distance dk on the Z axis in the actual coordinate system can be obtained by calculating the mathematical formula shown in Equation 1.

  A method for correcting the opening / closing timing of the valve 204 during component suction will be described with reference to FIGS. 4, 5, 6, and 7. FIG. 4 is a diagram illustrating the opening / closing timing of the valve 204 at the time of component adsorption. FIG. 4 shows how the component 206 is picked up by the nozzle tip 203 that is separated from the feeder 106 by a certain distance.

A nozzle tip 203 is connected to the nozzle 202. The component 206 arranged on the feeder 106 is adsorbed to the nozzle tip 203. t1 _d indicates the alignment start time, t1 _o indicates the time when the valve 204 is opened, t1 _a indicates the specified component suction time, and t1 _{a ′} indicates the actual component suction time. In the example of FIG. 4, since the nozzle 202 is clogged, the pressure in the nozzle 202 drops to a value that can be adsorbed at _a time t1 _{a ′} after the specified component adsorption time t1 _a , and the component 206 is adsorbed to the nozzle tip 203. Is done.

FIG. 5 is a flowchart illustrating a method for correcting the opening / closing timing of the valve 204 at the time of component suction. The time code in FIG. 5 corresponds to the time code in FIG. First, to start the alignment from time t1 _d (601). Next, at time t1 _o , the control unit 109 controls the valve 204 to open the valve 204 (602). At this time, the camera 205 continues to image the component 206, the nozzle 202, and the nozzle tip 203 as needed.

  Next, the camera 205 images the component 206, the nozzle 202, and the nozzle tip 203, and the camera 205 outputs the captured image to the control unit 109. The image processing unit 111 of the control unit 109 acquires a distance dk ′ from the feeder 106 to the component 206 in the image with reference to the position of the component 206 when the component 206 is not picked up. Then, the distance determination unit 112 calculates the distance dk in the actual coordinate system from the feeder 106 to the component 206 according to the above equation (1) (603).

  The distance determination unit 112 compares the calculated distance dk with the threshold value Lk1 stored in the storage unit 114, and determines whether a predetermined condition (dk> Lk1) is satisfied (604). The threshold value Lk1 is a threshold value for determining whether the component 206 has been lifted up to the nozzle tip 203. FIG. 6 shows an image 301 of the camera 205 that images the nozzle 202 and the component 206 during the component suction operation. By comparing the calculated distance dk and the threshold value Lk1, it can be determined whether or not the component 206 is sucked by the nozzle 202. In FIG. 6, the distance dk and the threshold value Lk1 are described on the image 301. As described above, the distance dk is a distance in the actual coordinate system, and the threshold value Lk1 is a distance with respect to the distance in the actual coordinate system. It is a threshold value.

  If the predetermined condition is not satisfied in step 604, an image is captured again using the camera 205, and the distance dk from the feeder 106 to the component 206 is calculated. That is, steps 603 to 604 are repeated until a predetermined condition is satisfied.

When the predetermined condition is satisfied, it means that the component 206 has been sucked. Therefore, the distance determination unit 112 acquires the suction time t1 _{a ′} when the suction is actually completed, and records it in the storage unit 114 (605). . Next, the correction unit 113 calculates the difference between the actual suction time t1 _{a ′} when the component 206 is sucked by the nozzle 202 and the specified component suction time (design value) t1 _a, and the calculated difference is the threshold value k. Is greater than 606 (606). If the difference between the adsorption time t1 _{a ′} and the design value t1 _a is smaller than the threshold value k, it is determined that the adsorption time t1 _{a ′} is equivalent to the design value t1 _a and no correction is performed.

If the difference between the adsorption time t1 _{a ′} and the design value t1 _a is larger than the threshold value k, the process proceeds to step 607. At this time, the correction unit 113 records the difference tr between the adsorption time t1 _{a ′} and the design value t1 _a in the storage unit 114 as a correction value (607). The correction unit 113 corrects the opening / closing timing of the valve 204 using the correction value at the next suction of the component 206.

FIG. 7 is a diagram for explaining the component suction time after the opening / closing timing of the valve 204 is corrected. Correcting unit 113 corrects to open the valve 204 at the time of applying the correction value tr for the time t1 _o an open last valve 204 _(t1 o -tr). Thus, the timing at which the pressure in the nozzle 202 becomes adsorbable value is a design value t1 _a. Thus, it is possible to correct the design values t1 _a real adsorption time.

  As described above, the first embodiment can achieve the following effects. In the component adsorption / mounting operation of the nozzle at the time of component adsorption / mounting, the time until the atmospheric pressure in the nozzle 202 after the valve 204 is opened until the component can be adsorbed / mounted is observed by the camera 205, thereby The opening / closing timing of the valve 204 for mounting can be corrected. Even when a deviation occurs in the opening / closing timing of the valve, the suction accuracy of the components can be maintained, and high-precision mounting becomes possible.

When it is detected that the change time of the atmospheric pressure in the nozzle 202 has become longer than a certain time (that is, the difference between the adsorption time t1 _{a ′} and the design value t1 _a is greater than a predetermined threshold), the nozzle It may be notified that dust has accumulated in 202 (notification of nozzle abnormality). For example, the control unit 109 may display a notification notifying the necessity of nozzle cleaning on a display device such as a display.

[Second Embodiment]
In this embodiment, when the board 108 is warped when the component sucked by the nozzle 202 is mounted on the board 108, the timing for opening and closing the valve 204 using the image captured by the camera 205 is corrected. Will be described.

FIG. 8 is a diagram for explaining how the component 206 is mounted when the board 108 to be mounted is warped. The same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted. The substrate 108 is warped, and the substrate surface is bent in the positive direction of the Z axis as indicated by the substrate 108 '. As a result, the surface of the substrate 108 ', until the contact of the component 206 and the nozzle tip 203, the distance r _p on the Z axis and parallel lines, the surface of the substrate 108 when the warpage does not occur, parts 206 And r _p <dk1 with respect to the distance dk1 to the contact point of the nozzle tip 203.

  FIG. 9 is an example of a camera image 1301 at the time of component mounting captured by the camera 205. In the camera image 1301, the nozzle 202 immediately before and after the mounting of the component 206, the nozzle tip 203, the component 206 mounted on the substrate 108, and the work position (target component mounting position 703) on the substrate 108 are imaged. Is done. Here, a contact point between the component 206 and the nozzle tip 203 is set as a mounting component position 1303. The target component mounting position 703 is the center position of the two solders 302. The target component mounting position 703 is not limited to this example, and may be determined based on other criteria.

The image processing unit 111 calculates a target component mounting position 703 that is the center position of the solder 302 in the image captured by the camera 205 by image processing. Further, the image processing unit 111 calculates a mounting component position 1303 that is a position of the component 206 before mounting (for example, a contact point between the component 206 and the nozzle tip 203) in an image captured by the camera 205 by image processing. . Thereby, the image processing unit 111 calculates a distance r _p ′ in the image from the mounting component position 1303 to the target component mounting position 703. That is, the distance r _p ′ is a distance in the image from the component 206 to the target component mounting position 703 when the component 206 is mounted on the target component mounting position 703 by the nozzle 202. Here, since the camera 205 is fixed at an angle θ with respect to the rotor rotation axis 208, the distance rp on the Z axis in the actual coordinate system can be obtained by calculating the mathematical formula shown in Equation 2.

FIG. 10 is a flowchart of the component mounting method when the camera image 1301 is used, and the component mounting method will be described along this flowchart. First, the nozzle 202 to which the component 206 is attracted starts to descend for mounting the component on the substrate 108 (1401). Next, the image processing unit 111 calculates a distance r _p ′ in the image from the component 206 to the target component mounting position 703 in the image captured by the camera 205. Then, the distance determination unit 112 calculates the distance rp from the component 206 to the target component mounting position 703 according to the above equation (2) (1402).

  The distance determination unit 112 compares the calculated distance rp with a predetermined threshold stored in the storage unit 114, and determines whether the distance rp is equal to or less than the threshold (1403). The threshold value here is a threshold value for determining whether the component 206 has been lowered to the target component mounting position 703.

  When the distance rp is equal to or smaller than the threshold value, it means that the component 206 has been lowered to the target component mounting position 703, and the correction unit 113 closes the valve 204 (1404). If the distance rp is not less than or equal to the threshold, an image is captured again using the camera 205, and the distance rp from the component 206 to the target component mounting position 703 is calculated. That is, steps 1402 to 1403 are repeated until the above condition is satisfied.

  With the above method, the positional relationship between the component 206 sucked by the nozzle 202 and the mounting position is acquired as needed using the camera 205, and the timing for closing the valve 204 is determined according to the distance between the two. According to the second embodiment, the mounting accuracy of the component 206 can be maintained even when a deviation occurs in the opening / closing timing of the valve 204 due to increase / decrease of the descent time of the nozzle 202 caused by the warping of the substrate.

  In particular, when the height of the substrate 108 is different, such as when the substrate 108 is warped, the effect of mounting with higher accuracy can be expected by flexibly correcting the opening / closing timing of the valve 204 in real time. Further, by combining the second embodiment with the first embodiment, it is possible to mount with higher accuracy by correcting the opening / closing timing of the valve 204 in both component adsorption and component mounting.

[Third embodiment]
In the present embodiment, an operation when the component 206 is not in a predetermined position in the camera image when the component 206 is conveyed by the feeder 106 will be described. The components 206 are arranged on the feeder 106 at a predetermined interval, and the components 206 are sequentially arranged immediately below the nozzle 202 by feeding the feeder 106 at the above intervals. However, there is a case where the component 206 is not present when the feeder 106 is sent. FIG. 11 is an image pickup example of the camera image 501 when the feeder 206 has no component 206.

  In the camera image 501 at the time of component suction, the nozzle 202, the nozzle tip 203, the component delivery location 1501 where the component 206 to be suctioned by the nozzle 202 is arranged, and the feeder 106 are imaged. The camera image 501 shows a case where there is no component 206 in the component distribution location 1501 when the feeder 106 is sequentially sent. The image processing unit 111 determines whether or not there is a component 206 at a component distribution location 1501 at a predetermined distance from the tip 203 of the nozzle 202 by image processing. For example, the image processing unit 111 can determine whether there is a component 206 by searching a range in the image corresponding to the component distribution location 1501.

  FIG. 12 is a flowchart for explaining processing when the component 206 is conveyed by the feeder 106. First, the nozzle 202 moves to a predetermined position on the feeder 106 in order to suck the supplied component 206 (1601). Next, by feeding the feeder 106, a component distribution location 1501 is disposed immediately below the nozzle 202 (1602). Next, the image processing unit 111 determines by image processing whether there is a component 206 at the component distribution location 1501 at a predetermined distance from the tip 203 of the nozzle 202 (1603). When the component 206 is in the component distribution location 1501, the nozzle 202 sucks the component 206 under the control of the control unit 109 (1604).

  If the component 206 is not in the component delivery location 1501, the nozzle 202 does not perform the suction operation of the component 206, and returns to step 1602. Thereafter, the feeder 106 is sent to place the next component 206 immediately below the nozzle 202 (1602).

  According to the third embodiment, when the component 206 is not present, the useless suction operation of the nozzle 202 is not performed. The effect of improving the throughput can be expected by reducing the component adsorption error.

  The present invention is not limited to the above-described embodiments, and includes various modifications. The above embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Also, a part of the configuration of one embodiment can be replaced with the configuration of another embodiment. Moreover, the structure of another Example can also be added to the structure of a certain Example. Further, with respect to a part of the configuration of each embodiment, another configuration can be added, deleted, or replaced.

  In the above-described embodiment, the operation timing of the nozzle 202 (working unit) of the head actuator 105 (working unit) has been described as an example, but the present invention can also be applied to working units of other working units. For example, the present invention can be applied to mounting of parts with a robot arm in a production line of an automobile or the like. Further, the present invention is not limited to the component mounting apparatus, and can be applied to other apparatuses. For example, the present invention can also be applied to the case of correcting the timing of the suction / dispensing operation of a nozzle in an automatic analyzer that aspirates a sample and dispenses it into a predetermined reaction container for analysis.

  The processing means of the control unit 109 may be realized by software by the processor interpreting and executing a program that realizes each function. Information such as programs, tables, and files that realize each function can be stored in a storage device such as a memory, a hard disk, or an SSD (Solid State Drive), or a storage medium such as an IC card, an SD card, or a DVD. The processing means of the control unit 109 described above may be realized by hardware by designing a part or all of them, for example, with an integrated circuit.

  Further, the control lines and information lines in the drawings are those that are considered necessary for the explanation, and not all the control lines and information lines on the product are necessarily shown. All the components may be connected to each other.

101 Y beam 102 X beam 105 Head actuator 106 Feeder 107 Component recognition camera 108 Substrate 109 Control unit 110 Main body 111 Image processing unit 112 Distance determination unit 113 Correction unit 114 Storage unit 201 Rotor 202 Nozzle 203 Nozzle tip 204 Valve 205 Camera 206 Component 208 Rotor rotating shaft 209 Camera fixing unit 301 Camera image 302 Solder 501 Camera image 703 Target component mounting position 1301 Camera image 1303 Mounted component position 1501 Component distribution location

Claims (12)

A work unit; a work unit fixed to the work unit; a camera fixed to the work unit; and a control unit for controlling the work unit and the camera.
The camera captures an image including the working unit and an object to be processed by the work of the working unit;
The processing unit corrects the operation timing of the working unit based on a first distance between the object in the image and a work position by the working unit. The processing apparatus of claim 1, wherein
The controller is
The difference between the time when the work on the object by the working unit is completed and a predetermined time is calculated as a correction value,
A processing apparatus that corrects the operation timing of the work unit by the correction value when the work unit is working on a next object. The processing apparatus of claim 2,
The controller is
Based on the first distance and the imaging angle of the camera, a second distance between the object in the actual coordinate system and the work position by the working unit is calculated,
The processing apparatus characterized in that the time when the work on the object by the working unit is completed is determined by comparing the second distance with a predetermined threshold value. The processing apparatus of claim 3,
The working unit is a head actuator, the working unit is a nozzle, and the first distance is a moving distance of the object in the image when the object is sucked by the nozzle. The processing apparatus is characterized in that the second distance is a moving distance of the object in an actual coordinate system when the object is attracted by the nozzle. The processing apparatus of claim 2,
A display unit;
The said control part notifies the abnormality of the said working part via the said display part, when the said difference becomes larger than a predetermined threshold value. The processing apparatus of claim 1, wherein
The said control part determines whether the operation | work to the said target object by the said working part was completed based on the said 1st distance, and stops the operation | movement of the said working part, The processing apparatus characterized by the above-mentioned. The processing apparatus according to claim 6.
The controller is
Based on the first distance and the imaging angle of the camera, a second distance between the object in the actual coordinate system and the work position by the working unit is calculated,
A processing apparatus comprising: comparing the second distance with a predetermined threshold value to determine whether the work on the object by the working unit is completed. The processing apparatus of claim 7,
The working unit is a head actuator, the working unit is a nozzle, and the first distance is a distance from the object in the image when the object is mounted at a target position by the nozzle. A distance to a target position, and the second distance is a distance from the object to the target position in an actual coordinate system when the object is mounted on the target position by the nozzle. Characteristic processing device. The processing apparatus of claim 1, wherein
The controller is
Determining whether the object is present in the image;
If the object is in the image, perform work by the working unit,
The processing apparatus, wherein when the object is not in the image, the work by the working unit is not executed. The processing apparatus of claim 9,
The processing apparatus, wherein the working unit is a head actuator, the working unit is a nozzle, and the work is an adsorption operation to the object by the nozzle. A work unit; a work unit fixed to the work unit; a camera fixed to the work unit; and a control unit for controlling the work unit and the camera.
The camera captures an image including the working unit and an object to be processed by the work of the working unit;
The controller is
Determining whether the object is present in the image;
If the object is in the image, perform work by the working unit,
The processing apparatus, wherein when the object is not in the image, the work by the working unit is not executed. The processing apparatus of claim 11, wherein
The processing apparatus, wherein the working unit is a head actuator, the working unit is a nozzle, and the work is an adsorption operation to the object by the nozzle.

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