JP2015111611A5 - - Google Patents

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Publication number
JP2015111611A5
JP2015111611A5 JP2013252844A JP2013252844A JP2015111611A5 JP 2015111611 A5 JP2015111611 A5 JP 2015111611A5 JP 2013252844 A JP2013252844 A JP 2013252844A JP 2013252844 A JP2013252844 A JP 2013252844A JP 2015111611 A5 JP2015111611 A5 JP 2015111611A5
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JP
Japan
Prior art keywords
gap
processing gas
processed
transmission window
light transmission
Prior art date
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Application number
JP2013252844A
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English (en)
Japanese (ja)
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JP2015111611A (ja
JP5987815B2 (ja
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Priority to JP2013252844A priority Critical patent/JP5987815B2/ja
Priority claimed from JP2013252844A external-priority patent/JP5987815B2/ja
Priority to PCT/JP2014/076881 priority patent/WO2015083435A1/ja
Publication of JP2015111611A publication Critical patent/JP2015111611A/ja
Publication of JP2015111611A5 publication Critical patent/JP2015111611A5/ja
Application granted granted Critical
Publication of JP5987815B2 publication Critical patent/JP5987815B2/ja
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Anticipated expiration legal-status Critical

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JP2013252844A 2013-12-06 2013-12-06 アッシング方法およびアッシング装置 Active JP5987815B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013252844A JP5987815B2 (ja) 2013-12-06 2013-12-06 アッシング方法およびアッシング装置
PCT/JP2014/076881 WO2015083435A1 (ja) 2013-12-06 2014-10-08 アッシング方法およびアッシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013252844A JP5987815B2 (ja) 2013-12-06 2013-12-06 アッシング方法およびアッシング装置

Publications (3)

Publication Number Publication Date
JP2015111611A JP2015111611A (ja) 2015-06-18
JP2015111611A5 true JP2015111611A5 (cg-RX-API-DMAC7.html) 2016-02-25
JP5987815B2 JP5987815B2 (ja) 2016-09-07

Family

ID=53273212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013252844A Active JP5987815B2 (ja) 2013-12-06 2013-12-06 アッシング方法およびアッシング装置

Country Status (2)

Country Link
JP (1) JP5987815B2 (cg-RX-API-DMAC7.html)
WO (1) WO2015083435A1 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6550964B2 (ja) * 2015-06-26 2019-07-31 ウシオ電機株式会社 光処理装置およびその製造方法
JP6763243B2 (ja) * 2016-09-07 2020-09-30 ウシオ電機株式会社 光照射器
JP6828493B2 (ja) * 2017-02-15 2021-02-10 ウシオ電機株式会社 光照射装置および光照射方法
JP6780531B2 (ja) * 2017-02-15 2020-11-04 ウシオ電機株式会社 光照射装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3624384A1 (de) * 1985-07-19 1987-01-29 Fusion Systems Corp Vorrichtung zum entfernen einer photoresistschicht von einem substrat
JPH0864542A (ja) * 1994-08-25 1996-03-08 Plasma Syst:Kk 半導体処理装置用真空チャンバーおよびその製造方法
JP2000323455A (ja) * 1999-05-07 2000-11-24 Hitachi Ltd アッシング装置
US6897162B2 (en) * 2003-10-20 2005-05-24 Wafermasters, Inc. Integrated ashing and implant annealing method
JP2011014696A (ja) * 2009-07-01 2011-01-20 Mitsubishi Chemicals Corp 有機質物除去方法

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