JP2015073207A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2015073207A5 JP2015073207A5 JP2013208005A JP2013208005A JP2015073207A5 JP 2015073207 A5 JP2015073207 A5 JP 2015073207A5 JP 2013208005 A JP2013208005 A JP 2013208005A JP 2013208005 A JP2013208005 A JP 2013208005A JP 2015073207 A5 JP2015073207 A5 JP 2015073207A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- electrode
- pitch
- electrode finger
- constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 6
- 239000010408 film Substances 0.000 claims 4
- 230000007423 decrease Effects 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 3
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013208005A JP2015073207A (ja) | 2013-10-03 | 2013-10-03 | 弾性波共振器 |
| US14/496,207 US9413330B2 (en) | 2013-10-03 | 2014-09-25 | Elastic wave resonator including a constant pitch region with a tapering width |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013208005A JP2015073207A (ja) | 2013-10-03 | 2013-10-03 | 弾性波共振器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016182500A Division JP6276354B2 (ja) | 2016-09-20 | 2016-09-20 | インタデジタルトランスデューサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015073207A JP2015073207A (ja) | 2015-04-16 |
| JP2015073207A5 true JP2015073207A5 (enExample) | 2016-11-04 |
Family
ID=53015291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013208005A Pending JP2015073207A (ja) | 2013-10-03 | 2013-10-03 | 弾性波共振器 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9413330B2 (enExample) |
| JP (1) | JP2015073207A (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9978927B2 (en) * | 2013-11-26 | 2018-05-22 | Kyocera Corporation | Acoustic wave element, duplexer and communication device |
| US9837258B2 (en) * | 2015-05-22 | 2017-12-05 | Honeywell International Inc. | Ion trap with variable pitch electrodes |
| US10389391B2 (en) | 2016-01-29 | 2019-08-20 | Kyocera Corporation | Acoustic wave resonator, acoustic wave filter, multiplexer, and communication apparatus |
| US10308522B2 (en) | 2016-05-31 | 2019-06-04 | Skyworks Solutions, Inc. | High Q modified barium magnesium tantalate for high frequency applications |
| SG11201903365SA (en) | 2016-10-20 | 2019-05-30 | Skyworks Solutions Inc | Elastic wave device with sub-wavelength thick piezoelectric layer |
| JP6798621B2 (ja) * | 2017-09-07 | 2020-12-09 | 株式会社村田製作所 | 弾性波装置 |
| US10461720B2 (en) | 2017-09-21 | 2019-10-29 | Snaptrack, Inc. | Acoustic filter |
| CN111448759B (zh) | 2017-12-12 | 2023-10-03 | 株式会社村田制作所 | 多工器、高频前端电路及通信装置 |
| WO2019198594A1 (ja) * | 2018-04-11 | 2019-10-17 | 京セラ株式会社 | 弾性波素子、弾性波フィルタ、分波器および通信装置 |
| SG10201911416RA (en) | 2018-12-03 | 2020-07-29 | Skyworks Solutions Inc | Acoustic Wave Device With Transverse Spurious Mode Suppression |
| US11606078B2 (en) | 2019-07-18 | 2023-03-14 | Skyworks Solutions, Inc. | Acoustic wave resonator with rotated and tilted interdigital transducer electrode |
| US11431319B2 (en) * | 2019-08-22 | 2022-08-30 | Skyworks Solutions, Inc. | Acoustic wave device with varying electrode pitch |
| WO2023282330A1 (ja) | 2021-07-08 | 2023-01-12 | 株式会社村田製作所 | 弾性波素子、弾性波フィルタ装置およびマルチプレクサ |
| US12483221B2 (en) * | 2021-07-15 | 2025-11-25 | Skyworks Solutions, Inc. | Multilayer piezoelectric substrate device with partially recessed passivation layer |
| JP2023044392A (ja) * | 2021-09-17 | 2023-03-30 | 株式会社村田製作所 | 弾性波素子、弾性波フィルタ装置およびマルチプレクサ |
| US12525951B2 (en) | 2021-10-01 | 2026-01-13 | Skyworks Solutions, Inc. | Surface acoustic wave device having a trapezoidal electrode |
| US12506464B2 (en) | 2021-12-06 | 2025-12-23 | Skyworks Solutions, Inc. | Multi-band surface acoustic wave filters |
| US12658879B2 (en) | 2021-12-28 | 2026-06-16 | Skyworks Solutions, Inc. | Acoustic wave device with tilted interdigital transducer electrode |
| US20230208399A1 (en) | 2021-12-29 | 2023-06-29 | Skyworks Solutions, Inc. | Multilayer piezoelectric substrate surface acoustic wave device with tilted multilayer interdigital transducer electrode |
| US20230223910A1 (en) | 2022-01-13 | 2023-07-13 | Skyworks Solutions, Inc. | Method of making acoustic wave device with vertically mass loaded multi-layer interdigital transducer electrode for transverse mode suppression |
| US12587171B2 (en) | 2022-03-18 | 2026-03-24 | Skyworks Solutions, Inc. | Passband filter combining two sets of components |
| US12648470B2 (en) | 2022-03-30 | 2026-06-02 | Skyworks Solutions, Inc. | Package with integrated device die at least disposed within carrier |
| US12542524B2 (en) | 2022-04-08 | 2026-02-03 | Skyworks Solutions, Inc. | Acoustic wave device with trench portions and narrow interdigital transducer tip portions for transverse mode suppression |
| US20230344415A1 (en) | 2022-04-15 | 2023-10-26 | Skyworks Solutions, Inc. | Multiplexers with different filter types on different dies |
| US12695438B2 (en) | 2023-04-06 | 2026-07-28 | Skyworks Solutions, Inc. | Acoustic wave device with interdigital transducer electrodes having two bus bars |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3614234B2 (ja) * | 1996-03-14 | 2005-01-26 | 沖電気工業株式会社 | 共振器型弾性表面波フィルタ |
| JP3449352B2 (ja) * | 2000-02-07 | 2003-09-22 | 株式会社村田製作所 | 弾性表面波フィルタ |
| JP3863712B2 (ja) * | 2000-09-06 | 2006-12-27 | 株式会社日立製作所 | 弾性表面波共振器 |
| KR100817849B1 (ko) * | 2004-01-09 | 2008-03-31 | 마쯔시다덴기산교 가부시키가이샤 | 일단자쌍 탄성 표면파 공진자 및 이를 이용한 탄성 표면파 필터 |
| JP2005204042A (ja) * | 2004-01-15 | 2005-07-28 | Seiko Epson Corp | 弾性表面波共振子および弾性表面波フィルタ |
| JP4631972B2 (ja) * | 2006-09-28 | 2011-02-16 | 株式会社村田製作所 | 弾性波フィルタ装置 |
| JP2008252678A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 縦結合共振子型弾性表面波フィルタ |
| JP2009219045A (ja) * | 2008-03-12 | 2009-09-24 | Nippon Dempa Kogyo Co Ltd | 弾性波共振子及び弾性波デバイス |
| JP4900420B2 (ja) * | 2009-05-27 | 2012-03-21 | 株式会社村田製作所 | 弾性波装置 |
| US8294331B2 (en) | 2009-09-22 | 2012-10-23 | Triquint Semiconductor, Inc. | Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities |
| US7939989B2 (en) | 2009-09-22 | 2011-05-10 | Triquint Semiconductor, Inc. | Piston mode acoustic wave device and method providing a high coupling factor |
| JP5356194B2 (ja) * | 2009-11-30 | 2013-12-04 | 太陽誘電株式会社 | フィルタ、分波器、通信モジュール |
| WO2011161987A1 (ja) * | 2010-06-22 | 2011-12-29 | 株式会社村田製作所 | ラダー型弾性波フィルタ装置及び分波器 |
| CN102684639B (zh) * | 2011-03-07 | 2016-08-17 | 特里奎恩特半导体公司 | 使微调影响和活塞波型不稳定性最小化的声波导器件和方法 |
| JP5697751B2 (ja) * | 2011-03-25 | 2015-04-08 | スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 | 高次横モード波を抑制した弾性波デバイス |
-
2013
- 2013-10-03 JP JP2013208005A patent/JP2015073207A/ja active Pending
-
2014
- 2014-09-25 US US14/496,207 patent/US9413330B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6188869B2 (ja) | 高次横モード波を抑制した弾性波デバイス | |
| US10009009B2 (en) | Elastic wave device including electrode fingers with elongated sections | |
| JP5861809B1 (ja) | 弾性波装置 | |
| CN106464230B (zh) | 弹性波装置 | |
| JP2022126852A5 (enExample) | ||
| JP6777221B2 (ja) | 弾性波装置 | |
| JP6447624B2 (ja) | 弾性波装置 | |
| CN101405938B (zh) | 弹性波谐振器 | |
| JP6680358B2 (ja) | 弾性波装置 | |
| FR2922696B1 (fr) | Resonateur a ondes de lamb | |
| JP2019080093A (ja) | 弾性波装置 | |
| WO2015182521A1 (ja) | 弾性波装置及びラダー型フィルタ | |
| JP2015073207A (ja) | 弾性波共振器 | |
| CN111034040A (zh) | 弹性波装置 | |
| WO2022202916A1 (ja) | 弾性波装置 | |
| WO2017077892A1 (ja) | 弾性波装置 | |
| WO2018079574A1 (ja) | 弾性波素子 | |
| JP2014187455A5 (enExample) | ||
| JP6276354B2 (ja) | インタデジタルトランスデューサ | |
| JP2011041082A (ja) | 一ポート型弾性波共振子及び弾性波フィルタ装置 | |
| JP2013106171A5 (enExample) | ||
| JPWO2021006056A5 (enExample) | ||
| JPWO2021006055A5 (enExample) | ||
| JP2013090023A5 (enExample) | ||
| JP2013106171A (ja) | 弾性波装置 |