JP2015069683A5 - - Google Patents
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- Publication number
- JP2015069683A5 JP2015069683A5 JP2013204451A JP2013204451A JP2015069683A5 JP 2015069683 A5 JP2015069683 A5 JP 2015069683A5 JP 2013204451 A JP2013204451 A JP 2013204451A JP 2013204451 A JP2013204451 A JP 2013204451A JP 2015069683 A5 JP2015069683 A5 JP 2015069683A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- magnetic disk
- abrasive grains
- dresser
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims 22
- 238000004519 manufacturing process Methods 0.000 claims 8
- 239000006061 abrasive grain Substances 0.000 claims 7
- 238000000034 method Methods 0.000 claims 7
- 239000002245 particle Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000010410 layer Substances 0.000 claims 3
- 238000007517 polishing process Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
- 239000002344 surface layer Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013204451A JP6227357B2 (ja) | 2013-09-30 | 2013-09-30 | 磁気ディスク用基板の製造方法および磁気ディスクの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013204451A JP6227357B2 (ja) | 2013-09-30 | 2013-09-30 | 磁気ディスク用基板の製造方法および磁気ディスクの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015069683A JP2015069683A (ja) | 2015-04-13 |
| JP2015069683A5 true JP2015069683A5 (OSRAM) | 2016-10-13 |
| JP6227357B2 JP6227357B2 (ja) | 2017-11-08 |
Family
ID=52836192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013204451A Active JP6227357B2 (ja) | 2013-09-30 | 2013-09-30 | 磁気ディスク用基板の製造方法および磁気ディスクの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6227357B2 (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118891132A (zh) * | 2022-03-29 | 2024-11-01 | 富士纺控股股份有限公司 | 研磨垫、研磨垫的制造方法和对光学材料或半导体材料的表面进行研磨的方法 |
| CN114800055A (zh) | 2022-04-28 | 2022-07-29 | 浙江美迪凯光学半导体有限公司 | 一种方形片的抛光工艺 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010107891A (ja) * | 2008-10-31 | 2010-05-13 | Konica Minolta Opto Inc | ウエハレンズ集合体及びその製造方法、レンズユニット、撮像装置 |
| JP5233621B2 (ja) * | 2008-12-02 | 2013-07-10 | 旭硝子株式会社 | 磁気ディスク用ガラス基板及びその製造方法。 |
| JP5428793B2 (ja) * | 2009-11-17 | 2014-02-26 | 旭硝子株式会社 | ガラス基板研磨方法および磁気記録媒体用ガラス基板の製造方法 |
| WO2012160897A1 (ja) * | 2011-05-20 | 2012-11-29 | 株式会社オハラ | 研磨品の製造方法 |
-
2013
- 2013-09-30 JP JP2013204451A patent/JP6227357B2/ja active Active
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