JP2015059976A - 光偏向ミラー及びこれを用いた光偏向器 - Google Patents
光偏向ミラー及びこれを用いた光偏向器 Download PDFInfo
- Publication number
- JP2015059976A JP2015059976A JP2013191876A JP2013191876A JP2015059976A JP 2015059976 A JP2015059976 A JP 2015059976A JP 2013191876 A JP2013191876 A JP 2013191876A JP 2013191876 A JP2013191876 A JP 2013191876A JP 2015059976 A JP2015059976 A JP 2015059976A
- Authority
- JP
- Japan
- Prior art keywords
- deflection mirror
- mirror
- optical
- support frame
- light deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 144
- 230000010355 oscillation Effects 0.000 claims abstract description 5
- 230000001629 suppression Effects 0.000 abstract description 4
- 230000000052 comparative effect Effects 0.000 description 8
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 2
- 101100334009 Caenorhabditis elegans rib-2 gene Proteins 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/007—For controlling stiffness, e.g. ribs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
1a...円形ミラー
1b、1b’...“8”字形状リブ
1b”...凹部
1c...直線状リブ
2...支持枠
2’...内側支持枠
3−1、3−2...トーションバー
4−1、4−2;5−1、5−2...圧電アクチュエータ
6...外側支持枠
7a、7b...ミアンダ形状圧電アクチュエータ
101、201、301、301’...光偏向ミラー
3−1、3−2...トーションバー
301a...ミラー
301b...リング状リブ
301c...中央リブ
C、C’...結合部
Claims (5)
- 光ビームを偏向させるための光偏向ミラーにおいて、
反射表面を有する円形もしくは楕円形のミラーと、
該ミラーの裏面に設けられ、該ミラーの揺動軸に沿って対称に“8”字形状した“8”字形状リブと
を具備することを特徴とする光偏向ミラー。 - さらに、前記ミラーの裏面に設けられ、該ミラーの揺動軸に沿った直線状リブを具備する請求項1に記載の光偏向器。
- 前記“8”字形状リブの前記ミラーの揺動軸の端部側を凹ました請求項1に記載の光偏向ミラー。
- 請求項1〜3のいずれかに記載の光偏向ミラーと、
該光偏向ミラーを囲む第1の支持枠と、
該第1の支持枠と前記光偏向ミラーとの間に設けられ、該光偏向ミラーの揺動軸に沿った少なくとも1つの第1のトーションバーと
を具備する光偏向器。 - さらに、
前記第1の支持枠を囲む第2の支持枠と、
該第2の支持枠と前記第1の支持枠との間に設けられた少なくとも1つのミアンダ形状アクチュエータもしくは第2のトーションバーと
を具備する請求項4に記載の光偏向器。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013191876A JP6261923B2 (ja) | 2013-09-17 | 2013-09-17 | 光偏向ミラー及びこれを用いた光偏向器 |
US14/464,393 US20150077824A1 (en) | 2013-09-17 | 2014-08-20 | Optical deflecting mirror device having figure "8"-shaped rib and optical deflector |
EP14183759.1A EP2857347B1 (en) | 2013-09-17 | 2014-09-05 | Optical deflecting mirror device having figure "8"-shaped rib and optical deflector |
CN201410472156.XA CN104459996B (zh) | 2013-09-17 | 2014-09-16 | 具有“8”字形肋条的光偏转反射镜装置和光偏转器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013191876A JP6261923B2 (ja) | 2013-09-17 | 2013-09-17 | 光偏向ミラー及びこれを用いた光偏向器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015059976A true JP2015059976A (ja) | 2015-03-30 |
JP6261923B2 JP6261923B2 (ja) | 2018-01-17 |
Family
ID=51483352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013191876A Active JP6261923B2 (ja) | 2013-09-17 | 2013-09-17 | 光偏向ミラー及びこれを用いた光偏向器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20150077824A1 (ja) |
EP (1) | EP2857347B1 (ja) |
JP (1) | JP6261923B2 (ja) |
CN (1) | CN104459996B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016212221A (ja) * | 2015-05-07 | 2016-12-15 | 株式会社デンソー | 光走査装置 |
JPWO2021181618A1 (ja) * | 2020-03-12 | 2021-09-16 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6930396B2 (ja) * | 2017-11-28 | 2021-09-01 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、携帯型電子機器および移動体 |
CN112204449B (zh) * | 2018-06-14 | 2022-06-17 | 奥林巴斯株式会社 | 光偏转器及扫描型激光显微镜 |
US11360299B2 (en) * | 2019-04-02 | 2022-06-14 | Microsoft Technology Licensing, Llc | Display device with compact scanning mirror |
IT202000001411A1 (it) * | 2020-01-24 | 2021-07-24 | St Microelectronics Srl | Metodo di lavorazione di una fetta per la fabbricazione di una struttura oscillante quale un microspecchio |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070053044A1 (en) * | 2004-05-11 | 2007-03-08 | Yoshifumi Kawakami | Electrostatic drive type MEMS mirror scanner |
JP2007522528A (ja) * | 2004-02-09 | 2007-08-09 | マイクロビジョン,インク. | 高性能memスキャナ |
WO2008089786A1 (de) * | 2007-01-23 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches bauelement mit erhöhter steifigkeit und verfahren zum herstellen desselben |
JP2012133242A (ja) * | 2010-12-22 | 2012-07-12 | Mitsumi Electric Co Ltd | 光走査装置 |
JP2013080068A (ja) * | 2011-10-03 | 2013-05-02 | Mitsumi Electric Co Ltd | 光走査装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0792409A (ja) | 1993-09-27 | 1995-04-07 | Canon Inc | 光スキャナー |
JP2001249300A (ja) | 2000-03-06 | 2001-09-14 | Anritsu Corp | 光スキャナ |
US7050211B2 (en) * | 2002-11-08 | 2006-05-23 | Texas Instruments Incorporated | Torsional hinged mirror assembly with central spines and perimeter ridges to reduce flexing |
US7359107B2 (en) * | 2006-03-31 | 2008-04-15 | Texas Instruments Incorporated | Analog MEMS with non-linear support |
US8922864B2 (en) * | 2007-03-06 | 2014-12-30 | Stmicroelectronics International N.V. | MEMS device having reduced deformations |
KR101143585B1 (ko) * | 2007-09-21 | 2012-05-09 | 삼성전자주식회사 | 마이크로 액츄에이터 |
JP4980990B2 (ja) * | 2008-06-25 | 2012-07-18 | パナソニック株式会社 | 可動構造体及びそれを用いたマイクロミラー素子 |
JP5168659B2 (ja) | 2008-11-27 | 2013-03-21 | 株式会社リコー | 可動板構造体及び光走査装置 |
JP5775409B2 (ja) * | 2011-09-29 | 2015-09-09 | スタンレー電気株式会社 | 光スキャナの製造方法 |
JP5484619B2 (ja) | 2013-05-27 | 2014-05-07 | 株式会社メガオプト | 光ファイバレーザ |
-
2013
- 2013-09-17 JP JP2013191876A patent/JP6261923B2/ja active Active
-
2014
- 2014-08-20 US US14/464,393 patent/US20150077824A1/en not_active Abandoned
- 2014-09-05 EP EP14183759.1A patent/EP2857347B1/en active Active
- 2014-09-16 CN CN201410472156.XA patent/CN104459996B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007522528A (ja) * | 2004-02-09 | 2007-08-09 | マイクロビジョン,インク. | 高性能memスキャナ |
US20070053044A1 (en) * | 2004-05-11 | 2007-03-08 | Yoshifumi Kawakami | Electrostatic drive type MEMS mirror scanner |
WO2008089786A1 (de) * | 2007-01-23 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches bauelement mit erhöhter steifigkeit und verfahren zum herstellen desselben |
JP2012133242A (ja) * | 2010-12-22 | 2012-07-12 | Mitsumi Electric Co Ltd | 光走査装置 |
JP2013080068A (ja) * | 2011-10-03 | 2013-05-02 | Mitsumi Electric Co Ltd | 光走査装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016212221A (ja) * | 2015-05-07 | 2016-12-15 | 株式会社デンソー | 光走査装置 |
JPWO2021181618A1 (ja) * | 2020-03-12 | 2021-09-16 | ||
WO2021181618A1 (ja) * | 2020-03-12 | 2021-09-16 | 三菱電機株式会社 | 光走査装置、測距装置および光走査装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20150077824A1 (en) | 2015-03-19 |
JP6261923B2 (ja) | 2018-01-17 |
EP2857347A1 (en) | 2015-04-08 |
CN104459996B (zh) | 2018-07-10 |
EP2857347B1 (en) | 2018-03-07 |
CN104459996A (zh) | 2015-03-25 |
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