JP2015059569A - 真空ポンプを有する装置、及び、真空ポンプ内に配置された、干渉磁場を生成する少なくとも1つの部品の磁場を補正するための方法 - Google Patents
真空ポンプを有する装置、及び、真空ポンプ内に配置された、干渉磁場を生成する少なくとも1つの部品の磁場を補正するための方法 Download PDFInfo
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- JP2015059569A JP2015059569A JP2014180760A JP2014180760A JP2015059569A JP 2015059569 A JP2015059569 A JP 2015059569A JP 2014180760 A JP2014180760 A JP 2014180760A JP 2014180760 A JP2014180760 A JP 2014180760A JP 2015059569 A JP2015059569 A JP 2015059569A
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- 238000012937 correction Methods 0.000 claims abstract description 84
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- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/663—Sound attenuation
- F04D29/665—Sound attenuation by means of resonance chambers or interference
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0402—Bearings not otherwise provided for using magnetic or electric supporting means combined with other supporting means, e.g. hybrid bearings with both magnetic and fluid supporting means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/0408—Passive magnetic bearings
- F16C32/0423—Passive magnetic bearings with permanent magnets on both parts repelling each other
- F16C32/0425—Passive magnetic bearings with permanent magnets on both parts repelling each other for radial load mainly
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Control Of Ac Motors In General (AREA)
Abstract
Description
2 ケーシング
4 フランジ
6 吸気口
8 排気口
10 ロータ
12 シャフト
14 動翼
16 動翼
18 動翼
20 ステータ
24 静翼(固定翼)
26 静翼(固定翼)
28 静翼(固定翼)
30 スペーサリング
32 スペーサリング
34 スペーサリング
36 ケーシングチャック
40 永久磁石軸受
42 ころ軸受
44 駆動モータ
46 補正コイル
48 補正コイル
50 補正コイル
52 補正装置
54 磁場センサ
Claims (15)
- 3つの前記補正コイル(46,48,50)の磁場が、3つの空間方向に、特にそれぞれ互いに90°の角度を成して配置されていることを特徴とする請求項2に記載の真空ポンプを有する装置。
- 少なくとも1つの前記補正コイル(46,48,50)が、導電体の少なくとも1つの巻線から形成されていることを特徴とする請求項1〜3のいずれか1項に記載の真空ポンプを有する装置。
- 前記補正装置(52)は、前記補正コイル(46,48,50)を個別に制御するように構成されていることを特徴とする請求項1〜6のいずれか1項に記載の真空ポンプを有する装置。
- 干渉磁場を生成する少なくとも1つの前記部品は、特に永久磁石軸受として若しくは能動磁石軸受として構成されている磁石軸受(40)又は電気モータ(44)であることを特徴とする請求項1〜7のいずれか1項に記載の真空ポンプを有する装置。
- 少なくとも1つの前記補正コイルは、前記真空ポンプ内に配置されている、及び/又は前記真空ポンプに対して配置されていることを特徴とする請求項1〜8のいずれか1項に記載の真空ポンプを有する装置。
- 前記補正装置(52)は、前記真空ポンプ(1)の駆動電子装置から、回転同期する補正基本周波数と、n≧2の、第1次から第n次までの高調波とを導き出すことを特徴とする請求項10〜12のいずれか1項に記載の方法。
- 前記真空ポンプ(1)の位相基準が、センサによって検出されることを特徴とする請求項10〜13のいずれか1項に記載の方法。
- 少なくとも1つの磁石軸受又は少なくとも1つの電気モータの干渉磁場が、補正されることを特徴とする請求項10〜14のいずれか1項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013110251.4A DE102013110251A1 (de) | 2013-09-17 | 2013-09-17 | Anordnung mit einer Vakuumpumpe sowie Verfahren zur Kompensation eines Magnetfeldes wenigstens eines in einer Vakuumpumpe angeordneten, ein magnetisches Störfeld erzeugenden Bauteiles |
DE102013110251.4 | 2013-09-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015059569A true JP2015059569A (ja) | 2015-03-30 |
JP5972944B2 JP5972944B2 (ja) | 2016-08-17 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014180760A Active JP5972944B2 (ja) | 2013-09-17 | 2014-09-05 | 真空ポンプを有する装置、及び、真空ポンプ内に配置された、干渉磁場を生成する少なくとも1つの部品の磁場を補正するための方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9822799B2 (ja) |
EP (1) | EP2848816B1 (ja) |
JP (1) | JP5972944B2 (ja) |
CN (1) | CN104454570B (ja) |
DE (1) | DE102013110251A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015113681B3 (de) * | 2015-08-18 | 2016-11-24 | Pfeiffer Vacuum Gmbh | Verfahren zum Reduzieren eines magnetischen Streuvektorfelds einer Vakuumpumpe oder Rotationseinheit sowie Vakuumpumpe und Rotationseinheit |
EP3926174B1 (de) * | 2021-06-29 | 2023-06-14 | Pfeiffer Vacuum Technology AG | Vakuumpumpe |
GB2615740B (en) * | 2022-01-13 | 2024-04-17 | Edwards Ltd | A pump and a method of reducing a stray magnetic field of the pump |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11250844A (ja) * | 1998-03-03 | 1999-09-17 | Jeol Ltd | 外部磁場変動補正装置 |
JP2003003988A (ja) * | 2001-06-22 | 2003-01-08 | Boc Edwards Technologies Ltd | 真空ポンプ |
JP2004158612A (ja) * | 2002-11-06 | 2004-06-03 | Nikon Corp | 磁場キャンセラー及びそれを備える荷電粒子線露光装置 |
JP2004171846A (ja) * | 2002-11-19 | 2004-06-17 | Hitachi Instruments Service Co Ltd | 外部交流磁場キャンセル機構を有した走査形電子顕微鏡 |
JP3119272U (ja) * | 2005-12-08 | 2006-02-16 | 株式会社島津製作所 | 分子ポンプ |
JP2006209980A (ja) * | 2005-01-25 | 2006-08-10 | Tokyo Seimitsu Co Ltd | 電子線露光装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0769444B2 (ja) | 1987-04-08 | 1995-07-31 | 日本原子力研究所 | タ−ボ分子ポンプのシ−ルド装置 |
EP0646220B1 (de) * | 1992-06-19 | 1997-01-08 | Balzers und Leybold Deutschland Holding Aktiengesellschaft | Gasreibungsvakuumpumpe |
DE10043235A1 (de) * | 2000-09-02 | 2002-03-14 | Leybold Vakuum Gmbh | Vakuumpumpe |
JP2002170764A (ja) * | 2000-12-04 | 2002-06-14 | Nikon Corp | 荷電粒子線露光装置、荷電粒子線露光装置の調整方法及び半導体デバイスの製造方法 |
FR2829200B1 (fr) * | 2001-09-06 | 2004-12-31 | Mecanique Magnetique Sa | Dispositif et procede de compensation automatique de perturbations synchrones |
JP2003173755A (ja) * | 2001-12-06 | 2003-06-20 | Nikon Corp | アクティブ磁場キャンセラーを備える荷電粒子線装置 |
FR2896285B1 (fr) * | 2006-01-13 | 2008-04-18 | Mecanique Magnetique Sa Soc D | Dispositif de suspension magnetique d'un rotor |
DE102010052660A1 (de) | 2010-11-26 | 2012-05-31 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE102011106433B4 (de) | 2011-07-04 | 2016-10-13 | Integrated Dynamics Engineering Gmbh | Integrierbare Magnetfeldkompensation für den Einsatz an Raster- und Transmissionselektronenmikroskopen, Schwingungsisolationssystem sowie Verfahren zum Abbilden, Untersuchen und / oder Bearbeiten einer Probe |
-
2013
- 2013-09-17 DE DE102013110251.4A patent/DE102013110251A1/de not_active Withdrawn
-
2014
- 2014-09-02 EP EP14183255.0A patent/EP2848816B1/de active Active
- 2014-09-05 JP JP2014180760A patent/JP5972944B2/ja active Active
- 2014-09-10 US US14/481,989 patent/US9822799B2/en active Active
- 2014-09-12 CN CN201410465395.2A patent/CN104454570B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11250844A (ja) * | 1998-03-03 | 1999-09-17 | Jeol Ltd | 外部磁場変動補正装置 |
JP2003003988A (ja) * | 2001-06-22 | 2003-01-08 | Boc Edwards Technologies Ltd | 真空ポンプ |
JP2004158612A (ja) * | 2002-11-06 | 2004-06-03 | Nikon Corp | 磁場キャンセラー及びそれを備える荷電粒子線露光装置 |
JP2004171846A (ja) * | 2002-11-19 | 2004-06-17 | Hitachi Instruments Service Co Ltd | 外部交流磁場キャンセル機構を有した走査形電子顕微鏡 |
JP2006209980A (ja) * | 2005-01-25 | 2006-08-10 | Tokyo Seimitsu Co Ltd | 電子線露光装置 |
JP3119272U (ja) * | 2005-12-08 | 2006-02-16 | 株式会社島津製作所 | 分子ポンプ |
Also Published As
Publication number | Publication date |
---|---|
CN104454570A (zh) | 2015-03-25 |
US9822799B2 (en) | 2017-11-21 |
US20150078881A1 (en) | 2015-03-19 |
EP2848816B1 (de) | 2018-04-18 |
DE102013110251A1 (de) | 2015-03-19 |
EP2848816A1 (de) | 2015-03-18 |
JP5972944B2 (ja) | 2016-08-17 |
CN104454570B (zh) | 2017-12-19 |
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