JP2015053279A - Excimer lamp - Google Patents

Excimer lamp Download PDF

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JP2015053279A
JP2015053279A JP2014228555A JP2014228555A JP2015053279A JP 2015053279 A JP2015053279 A JP 2015053279A JP 2014228555 A JP2014228555 A JP 2014228555A JP 2014228555 A JP2014228555 A JP 2014228555A JP 2015053279 A JP2015053279 A JP 2015053279A
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flat wall
excimer lamp
wall portions
wall portion
flat
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JP5888391B2 (en
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隆之 平石
Takayuki Hiraishi
隆之 平石
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Ushio Denki KK
Ushio Inc
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Ushio Denki KK
Ushio Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
    • H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/33—Special shape of cross-section, e.g. for producing cool spot
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
    • H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
    • H01J9/248—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps the vessel being flat

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a structure for an excimer lamp, by which, even when a plurality of discharge columns generated between electrodes directly collide on internal faces of facing flat wall portions of an arc tube, cracks that could lead to failure in the flat wall portions do not occur, in an excimer lamp having an arc tube of a transverse cross section that is a flattened, generally square shape and comprising a pair of flat wall portions and side wall portions formed integrally with the flat wall portions, a pair of electrodes being disposed on the outside surfaces of the flat wall portions.SOLUTION: The thickness of flat wall portions of an arc tube is greater than the thickness of side wall portions, and 1.2-2.0 times the thickness of side wall portions.

Description

この発明はエキシマランプに関し、特に、横断面形状が偏平四角形な発光管を有するエキシマランプに係わるものである。   The present invention relates to an excimer lamp, and more particularly to an excimer lamp having an arc tube whose cross-sectional shape is a flat square.

従来から、金属、ガラス、その他の材料よりなる被処理体に真空紫外光を照射し、当該真空紫外光及びこれにより生成されるオゾンの作用によって被処理体の表面に付着した有機汚染物質を除去するドライ洗浄処理技術が開発されている。
特に、エキシマランプから放射される波長２００ｎｍ以下の真空紫外線を用いたオゾン等の活性酸素による洗浄方法が多用されている。
また、他の分野として、水処理や排ガス、排油等の処理用途としての活用も実施されており、例えば特開平７−１６９４４３号公報（特許文献１）に開示されているような、エキシマランプに保護外管を備えたエキシマランプユニットも開発されている。 Conventionally, to-be-processed objects made of metal, glass and other materials are irradiated with vacuum ultraviolet light, and organic contaminants adhering to the surface of the object to be processed are removed by the action of the vacuum ultraviolet light and ozone generated thereby. Dry cleaning technology has been developed.
In particular, a cleaning method using active oxygen such as ozone using vacuum ultraviolet rays having a wavelength of 200 nm or less emitted from an excimer lamp is frequently used.
Further, as other fields, utilization for water treatment, exhaust gas, waste oil and the like is also being implemented. For example, an excimer lamp as disclosed in Japanese Patent Laid-Open No. 7-169443 (Patent Document 1). An excimer lamp unit with a protective outer tube has also been developed.

このように被処理体に真空紫外光を照射するランプとして、被照射面での照度均一性を求める観点から、横断面形状が偏平四角形な発光管を有するエキシマランプが用いられている。このエキシマランプにおいては、前記偏平四角形な発光管の上下外面上に外部電極を設けたものであり、電極は少なくとも光取出し側は、網状などの光透過性電極とされている。
ところで、エキシマランプにおいては発光管材料としては石英ガラスが用いられ、この偏平四角形な発光管は円筒状の石英ガラス管から製造される。
特開２００９−１８１８１８号公報（特許文献２）にはこのような偏平四角形な発光管の製造方法が開示されている。 As such a lamp for irradiating the object to be processed with vacuum ultraviolet light, an excimer lamp having an arc tube whose cross-sectional shape is a flat quadrangle is used from the viewpoint of obtaining illuminance uniformity on the irradiated surface. In this excimer lamp, external electrodes are provided on the upper and lower outer surfaces of the flat rectangular arc tube, and at least the light extraction side of the electrode is a light-transmitting electrode such as a mesh.
By the way, in the excimer lamp, quartz glass is used as the arc tube material, and the flat square arc tube is manufactured from a cylindrical quartz glass tube.
Japanese Patent Laying-Open No. 2009-181818 (Patent Document 2) discloses a method for manufacturing such a flat rectangular arc tube.

図６にその製造方法が示されており、円筒状の石英ガラス管１０をバーナー１１により加熱して軟化させ、石英ガラス管１０内に偏平矩形状の成形型１２を通すことによって、円筒状管から偏平四角形状の発光管１３に成形していくものである。
図７に示すように、こうして成形された横断面形状が偏平四角形の発光管１３は、その全周に亘って均一な肉厚がもたらされ、その上下外面に電極１４、１５が設けられ、内部にキセノン等の放電用光ガスが充填されてエキシマランプとなる。 The manufacturing method is shown in FIG. 6. A cylindrical quartz glass tube 10 is heated and softened by a burner 11, and a flat rectangular mold 12 is passed through the quartz glass tube 10, thereby forming the cylindrical tube. Are formed into a flat rectangular arc tube 13.
As shown in FIG. 7, the arc tube 13 having a flat quadrangular cross-sectional shape formed in this way has a uniform thickness over its entire circumference, and electrodes 14 and 15 are provided on its upper and lower outer surfaces, An excimer lamp is formed by filling a discharge light gas such as xenon.

ところで、上記特許文献２に基づく発光管の製造方法は、円筒状ガラス管１０をバーナー１１で加熱しつつ成形型によって徐々に偏平四角形に変形させていくものであるために、製造プロセスが多く、ことに、成形型１２をガラス管内に通す作業に多大な時間と労力、熟練を要し、そのため製造コストが高くなってしまうという問題があった。
また、図７に示されるように、こうして成形された発光管１３を有するエキシマランプにおいては、上下外部電極１４、１４間でのバリア放電によってエキシマ発光させるが、電極間には多数の放電柱Ｈが生成され、これが対向する発光管の内面に直接衝突するので、この放電柱が直接当たる壁面には微小なクラックが多数発生しやすく、やがて発光管の破損に至ることがある。
この現象は、特に、近時その用途が増大してきた、波長２００〜４００ｎｍの領域の光を出射するエキシマランプにおいて顕著であり、これは、その波長を出射するために、発光管内に希ガスとハロゲンが封入されるので、ガラスを構成する元素とハロゲンが化学反応してガラスを破損させるためである。 By the way, since the manufacturing method of the arc tube based on the said patent document 2 is what transforms the cylindrical glass tube 10 gradually into a flat rectangle with a shaping | molding die, heating with the burner 11, there are many manufacturing processes, In particular, the operation of passing the mold 12 through the glass tube requires a great amount of time, labor, and skill, and therefore there is a problem that the manufacturing cost increases.
Further, as shown in FIG. 7, in the excimer lamp having the arc tube 13 formed in this way, excimer light is emitted by barrier discharge between the upper and lower external electrodes 14, 14. Is generated, and directly collides with the inner surface of the opposed arc tube, so that many minute cracks are likely to be generated on the wall surface directly hit by the discharge column, and the arc tube may eventually be damaged.
This phenomenon is particularly noticeable in an excimer lamp that emits light in the wavelength range of 200 to 400 nm, which has recently been used for a long time. This is because the halogen is encapsulated, so that the elements constituting the glass and the halogen react chemically to break the glass.

特開平７−１６９４４３号公報JP-A-7-169443 特開２００９−１８１８１８号公報JP 2009-181818 A

本発明は、以上のような従来技術の問題点に鑑みてなされたものであり、横断面形状が偏平な略四角形状であって、一対の平坦壁部と、該平坦壁部と一体の側壁部とからなる発光管を有し、前記平坦壁部の外表面には一対の電極が配置されるとともに、前記発光管内には放電用ガスが封入されてなるエキシマランプにおいて、発光管の平坦壁部の外表面に設けられ電極間で生成される多数の放電柱が対向する発光管の平坦壁部の内面に直接衝突しても、破損に至ることのない構造を提供せんとするものである。   The present invention has been made in view of the above-described problems of the prior art, and has a substantially square shape with a flat cross-sectional shape, a pair of flat wall portions, and a side wall integral with the flat wall portion. In an excimer lamp, a pair of electrodes are arranged on the outer surface of the flat wall portion, and a discharge gas is sealed in the arc tube. It is intended to provide a structure that does not cause damage even if a large number of discharge columns that are provided on the outer surface of the section collide directly with the inner surface of the flat wall portion of the arc tube facing each other. .

上記課題を解決するために、この発明に係るエキシマランプは、前記発光管の前記平坦壁部の肉厚が前記側壁部の肉厚よりも厚く、該側壁部の肉厚の１．２〜２．０倍であることを特徴とする。
また、前記側壁部の断面形状が円弧状であることを特徴とする。 In order to solve the above-described problems, in the excimer lamp according to the present invention, the thickness of the flat wall portion of the arc tube is thicker than the thickness of the side wall portion, and the thickness of the side wall portion is 1.2 to 2. .0 times.
Moreover, the cross-sectional shape of the said side wall part is circular arc shape, It is characterized by the above-mentioned.

この発明によれば、横断面形状が偏平な略四角形状の発光管の、側壁部より肉厚の平坦壁部の外表面に一対の電極が配置されたことにより、外部電極間での放電によって生成される放電柱が対向する平坦壁部の内面に直接当たっても、その肉厚が十分に確保され機械的強度が大きくなっているので、クラックに対する耐性が大きく破損に至ることが防止できる。
また、前記側壁部が円弧状であるために、該エキシマランプを用いたランプユニットにおいて、これを円筒状の保護外管に組み込む時、該外管との整合性が極めてよい。
そして、前記発光管の製造に当たっては、円筒状ガラス管に第１の方向と、これと対向する第２の方向からバーナーにより加熱して、前記平坦壁部を成形するので、成形作業が極めて簡単で、製造コストの低い発光管の成形が可能となる。
また、この方法により、成形される発光管の平坦壁部は自然に側壁部よりも肉厚が厚くなり、上記平坦壁部の肉厚が厚い発光管が簡単に得られる。 According to the present invention, a pair of electrodes are disposed on the outer surface of the flat wall portion having a flat cross-sectional shape that is flatter than the side wall portion of the arc tube. Even if the generated discharge column directly hits the inner surface of the opposing flat wall portion, the thickness is sufficiently secured and the mechanical strength is increased, so that the resistance to cracks can be prevented and damage can be prevented.
Further, since the side wall portion has an arc shape, in a lamp unit using the excimer lamp, when this is incorporated into a cylindrical protective outer tube, the alignment with the outer tube is very good.
In manufacturing the arc tube, the cylindrical wall is heated by a burner from the first direction and the second direction opposite to the cylindrical glass tube, and the flat wall portion is formed. Thus, it is possible to form an arc tube with a low manufacturing cost.
In addition, by this method, the flat wall portion of the arc tube to be molded is naturally thicker than the side wall portion, and an arc tube having a thicker flat wall portion can be easily obtained.

本発明に係るエキシマランプの説明図。Explanatory drawing of the excimer lamp which concerns on this invention. 図１の発光管の製造方法の原理説明図。FIG. 2 is a diagram illustrating the principle of a method for manufacturing the arc tube of FIG. 1. 図１の発光管の製造方法の説明図。Explanatory drawing of the manufacturing method of the arc tube of FIG. 他の製造方法の説明図。Explanatory drawing of another manufacturing method. 図１のエキシマランプを使用したエキシマランプユニットの斜視図。The perspective view of the excimer lamp unit using the excimer lamp of FIG. 従来のエキシマランプの製造方法の説明図。Explanatory drawing of the manufacturing method of the conventional excimer lamp. 従来のエキシマランプの断面図。Sectional drawing of the conventional excimer lamp.

図１は、この発明のエキシマランプ１を示し、図１（Ａ）は斜視図、図１（Ｂ）はそのＸ−Ｘ横断面図である。エキシマランプ１の発光管２は、一対の平坦壁部３、３とこれらと一体の側壁部４、４とからなる横断面形状が偏平な略四角形状をなし、長手方向に長尺形状であって、前記平坦壁部３、３の外面には外部電極５、５が設けられている。
そして、電極５が設けられた平坦壁部３の肉厚Ｄ１は、側壁部４の肉厚Ｄ２よりも肉厚に形成されている。
また、一方の平坦壁部３の内面には紫外線反射膜６が形成されていて、発光管２内で生成された紫外光は、図１（Ｂ）の下方、即ち、反射膜６が設けられていない方の平坦壁部３から出射される。この場合、少なくとも紫外光出射側の電極５は光透過性である。
なお、紫外線反射膜６は必要に応じて設けられているものであって、必須のものではない。 FIG. 1 shows an excimer lamp 1 according to the present invention, FIG. 1 (A) is a perspective view, and FIG. 1 (B) is an XX cross-sectional view thereof. The arc tube 2 of the excimer lamp 1 has a substantially rectangular shape with a flat cross-sectional shape composed of a pair of flat wall portions 3 and 3 and side wall portions 4 and 4 integral therewith, and has a long shape in the longitudinal direction. External electrodes 5 and 5 are provided on the outer surfaces of the flat wall portions 3 and 3.
And the thickness D1 of the flat wall part 3 provided with the electrode 5 is formed thicker than the thickness D2 of the side wall part 4.
Further, an ultraviolet reflection film 6 is formed on the inner surface of one flat wall portion 3, and ultraviolet light generated in the arc tube 2 is provided below the FIG. 1B, that is, the reflection film 6. The light is emitted from the flat wall portion 3 that is not. In this case, at least the electrode 5 on the ultraviolet light emission side is light transmissive.
The ultraviolet reflecting film 6 is provided as necessary and is not essential.

上記構成において、外部電極５間で放電が起こると、放電柱Ｈは平坦壁部３に直接当たるが、当該平坦壁部３は側壁部４よりも肉厚が厚く形成されていて大きな強度が確保されているので、クラックの発生による破損が防止できる。また、側壁部４は肉厚を薄く形成されているが、放電注が直接当たることがないので、クラックが発生することはない。   In the above configuration, when a discharge occurs between the external electrodes 5, the discharge column H directly hits the flat wall portion 3. Therefore, damage due to the occurrence of cracks can be prevented. Moreover, although the side wall part 4 is formed thinly, since a discharge injection does not directly hit, a crack does not generate | occur | produce.

このような構造の発光管を形成する製造方法の原理的な説明が図２に示されている。
円筒状ガラス管８に対して一方の側方から酸水素バーナーなどのバーナー１１からの熱風を当てて加熱する。ガラス管８の加熱された円弧状部位９は軟化し、熱風による押圧力を受けて変形する。このとき、バーナー１１の中央部での炎１１ａは周囲の炎１１ｂの影響もあって最も火力が大きく、かつ、円筒状ガラス管８の円弧状部位９の中央部９ａに最も近いので、当該中央部９ａがもっとも高温となり、バーナーの熱風による変形量が最も大きく、徐々に平坦形状となっていき平坦壁部３が成形される。
このとき、円弧状部位９が直線状の平坦壁部３に変形するので、該平坦壁部３の肉厚はガラス管８（円弧状部位９）のもともとの肉厚よりも厚くなる。 The principle description of the manufacturing method for forming the arc tube having such a structure is shown in FIG.
The cylindrical glass tube 8 is heated by applying hot air from a burner 11 such as an oxyhydrogen burner from one side. The heated arcuate portion 9 of the glass tube 8 is softened and deformed by the pressing force of hot air. At this time, the flame 11a at the central portion of the burner 11 has the largest heating power due to the influence of the surrounding flame 11b and is closest to the central portion 9a of the arcuate portion 9 of the cylindrical glass tube 8, so that the center The portion 9a has the highest temperature, the amount of deformation of the burner due to hot air is the largest, and gradually becomes a flat shape, whereby the flat wall portion 3 is formed.
At this time, since the arcuate portion 9 is deformed into the linear flat wall portion 3, the thickness of the flat wall portion 3 is thicker than the original thickness of the glass tube 8 (the arcuate portion 9).

以下、円筒状ガラス管８から発光管３を成形する製造方法を図３に基づいて説明する。
図３は、その製造方法を示す側面図と、そのＸ−Ｘ断面図である。図３（Ａ）において、ガラス管８の一側面からバーナー１１を当てて加熱する。これにより、円弧状部分９が平坦壁部３に変形する。
そして、バーナー１１をガラス管８の軸方向に沿って走査してガラス管８の軸方向の全体において平坦壁部３を成形する。
次いで、図３（Ｂ）に示すように、バーナー１１を止めて、ガラス管８を１８０度反転するとともに、バーナー１１を元位置に戻す。
そして、図３（Ｃ）に示すように、再度バーナー１１を点火して、ガラス管８の反対側を加熱する。これにより、ガラス管８の反対側の円弧状部位９が変形して平坦壁部３が成形される。このバーナー１１を管軸方向に走査してガラス管８の全長に渡り平坦壁部３を成形する。
図３（Ｄ）は、こうして両側面に平坦壁部３、３が成形された発光管２が示されている。
このように成形された発光管２は、平坦壁部３、３とこれを繋ぐ側壁部４、４とからなり、前記平坦壁部３の肉厚は素材である円筒状ガラス管８の肉厚より厚くなり、側壁部４の肉厚はガラス管８の肉厚と同一であり、結果として、平坦壁部３の肉厚Ｄ１は、側壁部４の肉厚Ｄ２よりも肉厚となる。 Hereinafter, the manufacturing method which shape | molds the arc_tube | light_emitting_tube 3 from the cylindrical glass tube 8 is demonstrated based on FIG.
FIG. 3 is a side view showing the manufacturing method and a sectional view taken along line XX. In FIG. 3A, a burner 11 is applied from one side of the glass tube 8 and heated. Thereby, the arc-shaped portion 9 is deformed into the flat wall portion 3.
Then, the burner 11 is scanned along the axial direction of the glass tube 8 to form the flat wall portion 3 in the entire axial direction of the glass tube 8.
Next, as shown in FIG. 3B, the burner 11 is stopped, the glass tube 8 is inverted 180 degrees, and the burner 11 is returned to its original position.
And as shown in FIG.3 (C), the burner 11 is ignited again and the other side of the glass tube 8 is heated. As a result, the arcuate portion 9 on the opposite side of the glass tube 8 is deformed to form the flat wall portion 3. The burner 11 is scanned in the tube axis direction to form the flat wall portion 3 over the entire length of the glass tube 8.
FIG. 3D shows the arc tube 2 in which the flat wall portions 3 and 3 are formed on both side surfaces in this way.
The arc tube 2 thus formed is composed of flat wall portions 3 and 3 and side wall portions 4 and 4 connecting the flat wall portions 3 and 3, and the thickness of the flat wall portion 3 is the thickness of the cylindrical glass tube 8 which is a material. The thickness of the side wall 4 is the same as the thickness of the glass tube 8, and as a result, the thickness D 1 of the flat wall 3 is greater than the thickness D 2 of the side wall 4.

上記において、平坦壁部３を成形するためにバーナー１１が走査する軸方向の長さ領域は、当然、ランプを構成するうえで必要とされる発光管３の管軸方向長さによって決定される。
また、ガラス管８とバーナー１１とは相対的に走査すればよいので、ガラス管側を走査するようにしてもよいが、装置構成上で、バーナー側が走査する構成であるほうが好適である。
更には、図３（Ｂ）に示すように、一側面側の成形が終了した後に、ガラス管８を反転して、バーナー１１を元位置に戻すとしたが、バーナー１１をガラス管８の反対側面に回転位置させてもよく、また、バーナー１１は元位置に戻さずに、一側面を成形終了した位置から反対方向に走査するようにしてもよい。 In the above description, the axial length region that the burner 11 scans to form the flat wall portion 3 is naturally determined by the tube axial length of the arc tube 3 that is required to configure the lamp. .
Further, since the glass tube 8 and the burner 11 only need to be scanned relatively, the glass tube side may be scanned, but the configuration in which the burner side scans is preferable in terms of the device configuration.
Further, as shown in FIG. 3B, after the molding on one side surface is finished, the glass tube 8 is inverted and the burner 11 is returned to the original position. However, the burner 11 is opposite to the glass tube 8. The side surface may be rotated, and the burner 11 may be scanned in the opposite direction from the position at which molding is completed without returning to the original position.

また、図３においては、バーナー１１による平坦壁部３の成形を２段階で成形する方法を説明したが、ガラス管８の両側面からバーナー１１により加熱して、両側の平坦壁部３、３を同時に成形してもよい。
つまり、図４（Ａ）（Ｂ）に示すように、ガラス管８の両側面に一対のバーナー１１、１１を対向配置して、ガラス管８の両側面を同時に加熱し、該バーナー１１、１１を同時にガラス管８の管軸方向に走査するものである。こうすることで、ガラス管８の両側面に同時に平坦壁部３、３を成形することができ、製造工程の簡略化と作業時間の短縮化が図られる。 In FIG. 3, the method of forming the flat wall portion 3 by the burner 11 in two stages has been described. However, the flat wall portions 3, 3 on both sides are heated by the burner 11 from both side surfaces of the glass tube 8. May be formed simultaneously.
That is, as shown in FIGS. 4 (A) and 4 (B), a pair of burners 11 and 11 are disposed opposite to both side surfaces of the glass tube 8, and both side surfaces of the glass tube 8 are heated at the same time. Are simultaneously scanned in the tube axis direction of the glass tube 8. By doing so, the flat wall portions 3 and 3 can be simultaneously formed on both side surfaces of the glass tube 8, and the manufacturing process can be simplified and the working time can be shortened.

こうして成形された発光管２には、図１に示すように、平坦壁部３、３の外面に外部電極５、５が設けられてエキシマランプ１として完成する。
図５にこのエキシマランプ１を用いたエキシマランプユニット２０が示されていて、エキシマランプ１は保護外管２１内に収容されている。
このとき、エキシマランプ１の発光管２の両側壁部４、４は円弧状をなしているので、円筒状の保護外管２１内への収納は整合性が良く極めて良好に行われる。
また、側壁部４が保護外管２１に密着するので、ランプの熱を効果的に放熱することができる。 The arc tube 2 thus molded is provided with external electrodes 5 and 5 on the outer surfaces of the flat wall portions 3 and 3 as shown in FIG.
FIG. 5 shows an excimer lamp unit 20 using the excimer lamp 1, and the excimer lamp 1 is accommodated in a protective outer tube 21.
At this time, since the side wall portions 4 and 4 of the arc tube 2 of the excimer lamp 1 have an arc shape, the storage in the cylindrical protective outer tube 21 is performed with good consistency and extremely well.
Moreover, since the side wall part 4 is closely_contact | adhered to the protection outer tube | pipe 21, the heat | fever of a lamp | ramp can be thermally radiated effectively.

本発明における発光管２の一数値例を示すと以下の通りである。
外径φ１８．５ｍｍ、内径φ１６．６ｍｍ、肉厚１．０ｍｍのガラス管を本発明の製造方法によって製造した発光管として、平坦壁部の肉厚１．４ｍｍ、側壁部の肉厚１．０ｍｍの発光管が得られた。
なお、平坦壁部の肉厚は、側壁部の肉厚の１．２〜１．５倍が好ましい。肉厚が１．１倍以下では扁平量が小さくて、形成される平坦壁部間の距離が大きく、放電ギャップが大きすぎる。一方、１．５倍より大きいと扁平量が大きすぎて、平坦壁部間の距離が小さく、放電ギャップが小さくなりすぎる。 A numerical example of the arc tube 2 in the present invention is as follows.
As a light emitting tube manufactured by the manufacturing method of the present invention, a glass tube having an outer diameter of φ18.5 mm, an inner diameter of φ16.6 mm, and a thickness of 1.0 mm, a flat wall portion having a thickness of 1.4 mm and a side wall portion having a thickness of 1.0 mm. The arc tube was obtained.
The wall thickness of the flat wall portion is preferably 1.2 to 1.5 times the wall thickness of the side wall portion. If the wall thickness is 1.1 times or less, the amount of flatness is small, the distance between the formed flat wall portions is large, and the discharge gap is too large. On the other hand, if it is larger than 1.5 times, the flat amount is too large, the distance between the flat wall portions is small, and the discharge gap becomes too small.

以上のように、本発明によれば、横断面形状が偏平な略四角形状な発光管を有するエキシマランプにおいて、発光管の平坦壁部の肉厚を、側壁部の肉厚より肉厚としたことにより、平坦壁部の外面に設けた電極間での放電による放電柱に曝される平坦壁部に十分な機械的強度が与えられ、クラックによる破損を防止できる。
また、側壁部を円弧状としたことにより、前記エキシマランプを用いたエキシマランプユニットにおいて、エキシマランプを円筒状の保護外管に組み込むとき、きわめて整合性が良く、かつ良好な放熱性も得られる。
そして、発光管を製造する際に、円筒状ガラス管の側面からバーナーにより加熱することで平坦壁部を成形するので、従来のように成形型を用いた煩雑な作業を必要とすることなく、発光管の製造が簡略化され、格別の熟練性も不要となり、製造時間の短縮化が図られて、製造コストの安い発光管が得られる。
また、この製造方法により、自然に平坦壁部の肉厚が側壁部の肉厚より肉厚となった発光管が得られ、放電によりダメージを受ける平坦壁部に十分な機械的強度を与えられる。 As described above, according to the present invention, in the excimer lamp having a substantially square arc tube with a flat cross-sectional shape, the thickness of the flat wall portion of the arc tube is made thicker than the thickness of the side wall portion. Thereby, sufficient mechanical strength is given to the flat wall part exposed to the discharge column by the discharge between the electrodes provided on the outer surface of the flat wall part, and damage due to cracks can be prevented.
Further, since the side wall portion has an arc shape, in the excimer lamp unit using the excimer lamp, when the excimer lamp is incorporated into the cylindrical protective outer tube, the alignment is very good and good heat dissipation is also obtained. .
And when manufacturing the arc tube, since the flat wall portion is formed by heating with a burner from the side surface of the cylindrical glass tube, without requiring a complicated operation using a forming die as in the past, The production of the arc tube is simplified, no special skill is required, the production time is shortened, and an arc tube with a low production cost is obtained.
In addition, this manufacturing method provides an arc tube in which the thickness of the flat wall portion is naturally greater than the thickness of the side wall portion, and gives sufficient mechanical strength to the flat wall portion that is damaged by discharge. .

１ エキシマランプ
２ 発光管
３ 平坦壁部
４ 側壁部
５ 外部電極
６ 紫外線反射膜
８ 円筒状ガラス管
９ 円弧状部位
１１ バーナー
Ｄ１ 平坦壁部の肉厚
Ｄ２ 側壁部の肉厚
Ｈ 放電柱
２０ エキシマランプユニット
２１ 保護外管


DESCRIPTION OF SYMBOLS 1 Excimer lamp 2 Light emission tube 3 Flat wall part 4 Side wall part 5 External electrode 6 Ultraviolet reflective film 8 Cylindrical glass tube 9 Arc-shaped part 11 Burner D1 Thickness of flat wall part D2 Thickness of side wall part H Discharge pillar 20 Excimer lamp Unit 21 Protective outer tube


Claims (3)

横断面形状が偏平な略四角形状であって、一対の平坦壁部と、該平坦壁部と一体の側壁部とからなる発光管を有し、前記平坦壁部の外表面には一対の電極が配置されるとともに、前記発光管内には放電用ガスが封入されてなるエキシマランプにおいて、
前記平坦壁部の肉厚が前記側壁部の肉厚よりも厚く、該側壁部の肉厚の１．２〜２．０倍であることを特徴とするエキシマランプ。 It has a substantially square shape with a flat cross-sectional shape, and has an arc tube comprising a pair of flat wall portions and a side wall portion integral with the flat wall portions, and a pair of electrodes on the outer surface of the flat wall portions. In an excimer lamp in which a discharge gas is sealed in the arc tube,
The excimer lamp is characterized in that the thickness of the flat wall portion is larger than the thickness of the side wall portion and is 1.2 to 2.0 times the thickness of the side wall portion . 前記側壁部の断面形状が円弧状であることを特徴とする請求項１に記載のエキシマランプ。   The excimer lamp according to claim 1, wherein a cross-sectional shape of the side wall portion is an arc shape. 前記請求項２のエキシマランプを備え、前記発光管の側壁部の外表面に適合する内表面を有する保護外管が嵌合されていることを特徴とするエキシマランプユニット。


An excimer lamp unit comprising the excimer lamp according to claim 2, wherein a protective outer tube having an inner surface adapted to an outer surface of a side wall portion of the arc tube is fitted.


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