CN112820625B - Manufacturing method of 222nm excimer lamp tube - Google Patents
Manufacturing method of 222nm excimer lamp tube Download PDFInfo
- Publication number
- CN112820625B CN112820625B CN202011632934.9A CN202011632934A CN112820625B CN 112820625 B CN112820625 B CN 112820625B CN 202011632934 A CN202011632934 A CN 202011632934A CN 112820625 B CN112820625 B CN 112820625B
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- tube
- sealed
- wall
- lamp
- lamp tube
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 39
- 239000010453 quartz Substances 0.000 claims description 37
- 238000007599 discharging Methods 0.000 claims description 25
- 230000000712 assembly Effects 0.000 claims description 15
- 238000000429 assembly Methods 0.000 claims description 15
- 238000001125 extrusion Methods 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 11
- 230000004927 fusion Effects 0.000 claims description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000005906 dihydroxylation reaction Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 29
- 239000007789 gas Substances 0.000 description 22
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000002087 whitening effect Effects 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
- H01J9/265—Sealing together parts of vessels specially adapted for gas-discharge tubes or lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
The invention provides a manufacturing method of a 222nm excimer lamp, belonging to the technical field of excimer lamps; the 222nm excimer lamp comprises: the lamp tube shell is of a single-tube structure, and a closed accommodating cavity is formed in the lamp tube shell; the lamp tube shell is provided with a first tube wall and a second tube wall which are parallel to each other, and the first tube wall and the second tube wall are both in a plane structure; the electrodes are respectively arranged on the outer walls of the first pipe wall and the second pipe wall. Compared with the traditional double-tube process, the lamp tube shell is of a single-tube structure, has simple process and low cost, and is convenient for mass production; the first pipe wall and the second pipe wall are of plane structures, so that the electrodes can be conveniently paved.
Description
Technical Field
The invention relates to the technical field of excimer lamp tubes, in particular to a manufacturing method of a 222nm excimer lamp tube.
Background
Far ultraviolet radiation with a wavelength of 222nm is harmless to human skin and eyes, and has a sterilizing effect as excellent as 254nm ultraviolet.
The conventional 222nm excimer lamp has a double-tube structure, and a sealed discharge space is formed by double-tube welding; the double-pipe welding process has higher technical level requirements on operators, the operators are required to weld one by one, and large-batch automatic production is difficult to realize.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defects that the 222nm excimer lamp in the prior art is difficult to realize mass production and has lower automation degree, thereby providing a manufacturing method of the 222nm excimer lamp tube.
In order to solve the above technical problems, the 222nm excimer lamp provided by the present invention comprises:
the lamp tube shell is of a single-tube structure, and a closed accommodating cavity is formed in the lamp tube shell; the lamp tube shell is provided with a first tube wall and a second tube wall which are parallel to each other, and the first tube wall and the second tube wall are both in a plane structure;
the electrodes are respectively arranged on the outer walls of the first pipe wall and the second pipe wall.
Preferably, the lamp tube housing further comprises:
the third pipe walls are integrally formed between the first pipe wall and the second pipe wall, and are arc-shaped outwards arched away from the accommodating cavity;
and the air charging and discharging port is arranged on the third pipe wall and is communicated with the outside and the accommodating cavity.
Preferably, the lamp tube shell is formed by extruding a quartz round tube.
A manufacturing method of a 222nm excimer lamp tube comprises the following steps:
after the quartz round tube is heated and softened, the quartz round tube is extruded by the roller component to form a first tube wall and a second tube wall which are parallel up and down;
cutting off the extruded quartz round tube to form a lamp tube to be sealed by pressing, and carrying out dehydroxylation treatment on the lamp tube to be sealed by pressing;
after the hydroxy removal is completed, the two ends of the lamp tube to be sealed are sealed by pressing, so that a closed accommodating cavity is formed inside the lamp tube;
the side wall of the pressed sealed lamp tube is communicated with an air charging and discharging tube, so that the air charging and discharging tube is communicated with the accommodating cavity;
charging and discharging gas into the accommodating cavity of the pressed and sealed lamp tube through the charging and discharging pipe; when the charged discharge gas reaches a design pressure value, sealing one end of the charging and discharging pipe, which is close to the pressed and sealed lamp tube;
and after the discharge gas is filled, paving electrodes on the outer walls of the first pipe wall and the second pipe wall.
As a preferable scheme, the roller assemblies comprise three groups which are arranged at intervals, and each group of roller assemblies is provided with two rollers which are opposite up and down; the quartz round tube is extruded through the three groups of roller assemblies in sequence, and protective gas is continuously introduced into the quartz round tube in the extrusion process.
Preferably, the pressure of the protective gas in the quartz circular tube is higher than a standard atmospheric pressure.
Preferably, a second heating device is arranged between two adjacent groups of roller assemblies, and the quartz round tube is continuously heated through the second heating device.
As a preferable scheme, the two ends of the lamp tube to be pressed and sealed are pressed and sealed successively; and when the press-sealing end is pressed and sealed, introducing protective gas through the rear press-sealing end.
Preferably, the air charging and discharging pipe is in fusion connection with the side wall of the pressed and sealed lamp tube in a spot fusion mode.
Preferably, before the discharge gas is filled, the vacuum pumping treatment is performed on the accommodating cavity of the sealed lamp tube through the filling and exhausting pipe.
The technical scheme of the invention has the following advantages:
1. the 222nm excimer lamp provided by the invention has a single tube structure, and compared with the traditional double tube process, the lamp tube has the advantages of simple process, low cost and convenience for mass production; the first pipe wall and the second pipe wall are of plane structures, so that the electrodes can be conveniently paved.
2. According to the manufacturing method of the 222nm excimer lamp tube, the quartz round tube after heating and softening is extruded by the roller component to form a plane structure which is parallel up and down and opposite to each other, so that the electrodes are conveniently paved; according to the extrusion process, automatic production can be realized through the roller assemblies, the technical requirements on workers are low, and the degree of standardization of products is higher; in addition, the third tube wall connected with the first tube wall and the second tube wall is an arc surface, so that the two ends of the lamp tube to be pressed and sealed later are convenient to press and seal; the hydroxyl of the lamp tube to be sealed is removed, so that the influence of residual moisture in the lamp tube to be sealed on the subsequent discharge process is avoided.
3. According to the manufacturing method of the 222nm excimer lamp tube, the quartz round tube is extruded through the three groups of roller assemblies in sequence, so that the quartz round tube is prevented from being damaged due to excessive extrusion at one time; and protective gas is introduced during extrusion, so that the phenomenon of whitening of the quartz round tube in the high-temperature extrusion process is prevented, and the condition that the quartz round tube is inwards sunken in the extrusion process can be avoided.
4. According to the manufacturing method of the 222nm excimer lamp tube, the second heating device is arranged between two adjacent groups of roller assemblies, and the quartz round tube is continuously heated and softened through the second heating device, so that the quartz soft tube is always in a softened state in the extrusion process.
5. According to the manufacturing method of the 222nm excimer lamp tube, the protective gas is introduced in the press sealing process, so that more water vapor is prevented from being produced in the press sealing process, and meanwhile, the lamp tube is prevented from being whitened.
6. According to the manufacturing method of the 222nm excimer lamp provided by the invention, the air charging and discharging pipe is in fusion connection with the side wall of the pressed lamp in a spot fusion manner, so that the operation is simple, and the closed environment inside the lamp is not damaged.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic perspective view of a 222nm excimer lamp according to the present invention.
Fig. 2 is a front cross-sectional view of fig. 1.
Fig. 3 is a schematic cross-sectional view of a lamp tube.
FIG. 4 is a schematic diagram of the relationship between the roller assembly and the quartz tube.
Reference numerals illustrate:
1. a lamp tube housing; 2. an electrode; 3. a first tube wall; 4. a second tube wall; 5. a third tube wall; 6. a receiving chamber; 7. a roller assembly; 8. a first heating device; 9. a second heating device; 10. quartz round tube; 11. and an air charging and discharging port.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
The 222nm excimer lamp provided in this embodiment includes: a lamp vessel 1, electrodes 2 and a discharge gas inside said lamp vessel 1.
As shown in fig. 1, 2 and 3, the lamp tube housing 1 has a single tube structure, and two ends thereof are sealed by pressing, so that a sealed accommodating cavity 6 is formed therein, and discharge gas is stored in the accommodating cavity 6. The lamp tube shell 1 comprises a first tube wall 3, a second tube wall 4 and a third tube wall 5, and the first tube wall 3, the second tube wall 4 and the third tube wall 5 are enclosed to form the accommodating cavity 6; the first pipe wall 3 and the second pipe wall 4 are both planar structures, are vertically spaced and are parallel to each other; the third pipe wall 5 is provided with two opposite pipe walls and is integrally formed between the first pipe wall 3 and the second pipe wall 4; the two third pipe walls 5 are arranged in mirror symmetry and are arc-shaped outwards arched away from the accommodating cavity 6. An air charging and discharging port 11 is arranged on the third pipe wall 5, and the discharge gas is charged into the accommodating cavity 6 through the air charging and discharging port 11. The electrodes 2 are paved on the outer walls of the first pipe wall 3 and the second pipe wall 4, and the two electrodes 2 are arranged vertically and oppositely, so that a discharge area is formed between the first pipe wall 3 and the second pipe wall 4.
Example 2
The manufacturing method of the 222nm excimer lamp provided by the embodiment comprises the following steps:
step one: after the quartz round tube 10 is heated and softened, the quartz round tube is extruded by the roller component 7 to form a first tube wall 3 and a second tube wall 4 which are parallel up and down;
the roller assemblies 7 are provided with three groups which are arranged at intervals, each group of roller assemblies 7 is provided with two rollers which are opposite to each other up and down, and a space suitable for the quartz round tube 10 to pass through is arranged between the rollers which are opposite to each other up and down; a first heating device 8 is arranged in the length direction of the three groups of roller assemblies 7, and a second heating device 9 is arranged between two adjacent groups of roller assemblies 7; the quartz round tube 10 is firstly heated and softened by the first heating device 8 and then sequentially passes through the extrusion space; in the extrusion process, the second heating device 9 continuously heats and softens the quartz round tube 10, so that the quartz round tube 10 is always in a softened state; in the extrusion process, continuously filling protective gas into the quartz round tube 10, wherein the protective gas is nitrogen, and the pressure of the protective gas in the quartz round tube 10 is higher than a standard atmospheric pressure; the occurrence of the whitening phenomenon of the quartz round tube 10 in the high-temperature extrusion process is prevented, and the occurrence of the inward recession of the quartz round tube 10 in the extrusion process can be avoided. The step realizes automatic production through the roller assembly 7, has low technical requirements on workers, and ensures the standardization of products.
Step two: cutting off the extruded quartz round tube 10 to form a lamp tube to be sealed by pressing, and carrying out dehydroxylation treatment on the lamp tube to be sealed by pressing;
step three: after the hydroxy removal is completed, the two ends of the lamp tube to be sealed are sealed by pressing, so that a closed accommodating cavity 6 is formed inside the lamp tube to be sealed;
the two ends of the lamp tube to be sealed are sealed in a pressing mode; and when the press-sealing end is pressed and sealed, introducing protective gas through the rear press-sealing end.
Step four: the side wall of the pressed and sealed lamp tube is communicated with an air charging and discharging tube, so that the air charging and discharging tube is communicated with the accommodating cavity 6; the air charging and discharging pipe is in fusion connection with the side wall of the pressed and sealed lamp tube in a spot fusion mode.
Step five: charging and discharging gas into the accommodating cavity 6 of the pressed and sealed lamp tube through the charging and discharging pipe; when the charged discharge gas reaches a design pressure value, sealing one end of the charging and discharging pipe, which is close to the pressed and sealed lamp tube; before the discharge gas is filled, vacuumizing the accommodating cavity 6 of the pressed and sealed lamp tube through the charging and discharging pipe;
wherein the charged discharge gas is a mixed gas of krypton and chlorine, the pressure value is 5-50 KPa, and the volume ratio (100-250) between the krypton and the chlorine is 1.
Step six: after the discharge gas is filled, paving electrodes 2 on the outer walls of the first pipe wall 3 and the second pipe wall 4;
the electrode 2 has a mesh structure formed on the outer walls of the first tube wall 3 and the second tube wall 4 by screen printing, and has an aperture ratio of 50%, and is made of aluminum paste containing aluminum as a main component and silver, silicon dioxide, and palladium as main components.
As an alternative, the thickness of the mirror surface stainless steel sheet or the high-reflection ultraviolet aluminum sheet of the electrode 2 ranges from 0.1 mm to 0.5mm, and the electrode 2 is fixedly connected to the outer walls of the first pipe wall 3 and the second pipe wall 4.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (7)
1. The manufacturing method of the 222nm excimer lamp tube is characterized by comprising the following steps:
the lamp tube shell (1) is of a single-tube structure, and a closed accommodating cavity (6) is formed in the lamp tube shell; the lamp tube shell (1) is provided with a first tube wall (3) and a second tube wall (4) which are parallel to each other, and the first tube wall (3) and the second tube wall (4) are both in a plane structure;
the two electrodes (2) are respectively arranged on the outer walls of the first pipe wall (3) and the second pipe wall (4);
after the quartz round tube (10) is heated and softened, the quartz round tube is extruded by the roller component (7) to form a first tube wall (3) and a second tube wall (4) which are parallel up and down;
cutting off the extruded quartz round tube (10) to form a lamp tube to be sealed by pressing, and carrying out dehydroxylation treatment on the lamp tube to be sealed by pressing;
after the hydroxy removal is completed, the two ends of the lamp tube to be sealed are sealed by pressing, so that a closed accommodating cavity (6) is formed inside the lamp tube to be sealed;
the side wall of the pressed and sealed lamp tube is communicated with an air charging and discharging tube, so that the air charging and discharging tube is communicated with the accommodating cavity (6);
charging and discharging gas into the accommodating cavity (6) of the pressed and sealed lamp tube through the charging and discharging pipe; when the charged discharge gas reaches a design pressure value, sealing one end of the charging and discharging pipe, which is close to the pressed and sealed lamp tube;
paving electrodes (2) on the outer walls of the first pipe wall (3) and the second pipe wall (4) after the discharge gas is filled;
the roller assemblies (7) comprise three groups which are arranged at intervals, each group of roller assemblies (7) is provided with two rollers which are opposite up and down, and an extrusion space which is suitable for a quartz circular tube (10) to pass through is arranged between the rollers which are opposite up and down; the quartz round tube (10) is extruded by three groups of roller assemblies (7) in sequence, and protective gas is continuously introduced into the quartz round tube (10) in the extrusion process;
a second heating device (9) is arranged between two adjacent groups of roller assemblies (7), and the quartz round tube (10) is continuously heated through the second heating device (9).
2. The method of manufacturing a 222nm excimer lamp according to claim 1, wherein the lamp housing (1) further comprises:
the two third pipe walls (5) are integrally formed between the first pipe wall (3) and the second pipe wall (4), and the third pipe walls (5) are arc-shaped outwards arched away from the accommodating cavity (6);
and the air charging and discharging port (11) is arranged on the third pipe wall (5) and is communicated with the outside and the accommodating cavity (6).
3. The method of manufacturing a 222nm excimer lamp according to claim 2, wherein the lamp housing (1) is extruded from a quartz tube (10).
4. The method of manufacturing a 222nm excimer lamp according to claim 1, wherein the pressure of the shielding gas in the quartz tube (10) is higher than a standard atmospheric pressure.
5. The method of claim 1, wherein the two ends of the tube to be sealed are sealed successively; and when the press-sealing end is pressed and sealed, introducing protective gas through the rear press-sealing end.
6. The method of claim 1, wherein the gas filling and discharging tube is in fusion connection with the sidewall of the sealed lamp tube by spot fusion.
7. The method according to claim 1, wherein the vacuum-pumping treatment is performed on the accommodating cavity (6) of the sealed lamp tube through the gas-filling pipe before the discharge gas is filled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011632934.9A CN112820625B (en) | 2020-12-31 | 2020-12-31 | Manufacturing method of 222nm excimer lamp tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011632934.9A CN112820625B (en) | 2020-12-31 | 2020-12-31 | Manufacturing method of 222nm excimer lamp tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112820625A CN112820625A (en) | 2021-05-18 |
| CN112820625B true CN112820625B (en) | 2024-04-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011632934.9A Active CN112820625B (en) | 2020-12-31 | 2020-12-31 | Manufacturing method of 222nm excimer lamp tube |
Country Status (1)
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| CN (1) | CN112820625B (en) |
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| JPH0969335A (en) * | 1995-08-31 | 1997-03-11 | Fujitsu Ltd | Manufacture of glass board fitted with bulkhead |
| CN1364304A (en) * | 2000-03-06 | 2002-08-14 | 工程吸气公司 | Method for manufacturing of mercury dispenser devices to be used in fluorescent lamps |
| JP2014049280A (en) * | 2012-08-31 | 2014-03-17 | Ushio Inc | Excimer lamp |
| CN104081496A (en) * | 2012-02-02 | 2014-10-01 | 优志旺电机株式会社 | Excimer lamp, and method for production of arc tube for excimer lamp |
| CN106660851A (en) * | 2014-07-18 | 2017-05-10 | 旭硝子株式会社 | Method for molding glass substrate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3475969B1 (en) * | 2016-06-27 | 2024-02-07 | Eden Park Illumination | Uv/vuv-emitting plasma lamp, its use and method of forming it |
-
2020
- 2020-12-31 CN CN202011632934.9A patent/CN112820625B/en active Active
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|---|---|---|---|---|
| JPH0969335A (en) * | 1995-08-31 | 1997-03-11 | Fujitsu Ltd | Manufacture of glass board fitted with bulkhead |
| CN1364304A (en) * | 2000-03-06 | 2002-08-14 | 工程吸气公司 | Method for manufacturing of mercury dispenser devices to be used in fluorescent lamps |
| CN104081496A (en) * | 2012-02-02 | 2014-10-01 | 优志旺电机株式会社 | Excimer lamp, and method for production of arc tube for excimer lamp |
| JP2014049280A (en) * | 2012-08-31 | 2014-03-17 | Ushio Inc | Excimer lamp |
| CN106660851A (en) * | 2014-07-18 | 2017-05-10 | 旭硝子株式会社 | Method for molding glass substrate |
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| Title |
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| CN112820625A (en) | 2021-05-18 |
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Effective date of registration: 20240611 Address after: 411100 West side of the first floor, Building 9, Innovation and Entrepreneurship Center, No. 31 Dongfeng Road, Economic Development Zone, Heping Street, Xiangtan City, Hunan Province Patentee after: Hunan Weike Medical Technology Co.,Ltd. Country or region after: China Address before: 225300 west side of 4th floor, no.g65, phase IV plant, China medicine city, Hailing District, Taizhou City, Jiangsu Province Patentee before: JIANGSU WEIKESI MEDICAL SCIENCE & TECHNOLOGY CO.,LTD. Country or region before: China |
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