JP2015044715A5 - - Google Patents

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Publication number
JP2015044715A5
JP2015044715A5 JP2013177235A JP2013177235A JP2015044715A5 JP 2015044715 A5 JP2015044715 A5 JP 2015044715A5 JP 2013177235 A JP2013177235 A JP 2013177235A JP 2013177235 A JP2013177235 A JP 2013177235A JP 2015044715 A5 JP2015044715 A5 JP 2015044715A5
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JP
Japan
Prior art keywords
chamber
liquid
manufacturing
gas phase
carbon nanotubes
Prior art date
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Granted
Application number
JP2013177235A
Other languages
English (en)
Japanese (ja)
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JP2015044715A (ja
JP5899523B2 (ja
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Publication date
Priority claimed from JP2013177235A external-priority patent/JP5899523B2/ja
Priority to JP2013177235A priority Critical patent/JP5899523B2/ja
Application filed filed Critical
Priority to CN201480046680.9A priority patent/CN105492384B/zh
Priority to PCT/JP2014/072652 priority patent/WO2015030145A1/ja
Priority to US14/914,628 priority patent/US20160207773A1/en
Publication of JP2015044715A publication Critical patent/JP2015044715A/ja
Publication of JP2015044715A5 publication Critical patent/JP2015044715A5/ja
Publication of JP5899523B2 publication Critical patent/JP5899523B2/ja
Application granted granted Critical
Priority to US15/841,306 priority patent/US10343919B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013177235A 2013-08-28 2013-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法 Expired - Fee Related JP5899523B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013177235A JP5899523B2 (ja) 2013-08-28 2013-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法
CN201480046680.9A CN105492384B (zh) 2013-08-28 2014-08-28 制造装置、供给单元及碳纳米管的制造方法
PCT/JP2014/072652 WO2015030145A1 (ja) 2013-08-28 2014-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法
US14/914,628 US20160207773A1 (en) 2013-08-28 2014-08-28 Production apparatus for carbon nanotubes, feed unit for being part of production apparatus, and production method for carbon nanotubes
US15/841,306 US10343919B2 (en) 2013-08-28 2017-12-14 Production method for carbon nanotubes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013177235A JP5899523B2 (ja) 2013-08-28 2013-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法

Publications (3)

Publication Number Publication Date
JP2015044715A JP2015044715A (ja) 2015-03-12
JP2015044715A5 true JP2015044715A5 (enExample) 2015-09-24
JP5899523B2 JP5899523B2 (ja) 2016-04-06

Family

ID=52586693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013177235A Expired - Fee Related JP5899523B2 (ja) 2013-08-28 2013-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法

Country Status (4)

Country Link
US (2) US20160207773A1 (enExample)
JP (1) JP5899523B2 (enExample)
CN (1) CN105492384B (enExample)
WO (1) WO2015030145A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016200112A1 (de) * 2016-01-07 2017-07-13 Leybold Gmbh Vakuumpumpenantrieb mit Stern-Dreieck-Umschaltung
CN110983300B (zh) * 2019-12-04 2023-06-20 江苏菲沃泰纳米科技股份有限公司 镀膜设备及其应用
KR102432915B1 (ko) * 2020-05-22 2022-08-17 내일테크놀로지 주식회사 붕소 전구체의 열처리를 통한 질화붕소나노튜브의 제조방법 및 장치
JPWO2022202964A1 (enExample) * 2021-03-26 2022-09-29
CN115180614A (zh) * 2022-08-02 2022-10-14 武汉市碳翁科技有限公司 一种连续碳纳米管聚集体合成装置及使用方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1043256C (zh) * 1996-11-05 1999-05-05 中国科学院物理研究所 一种有序排列的碳纳米管及其制备方法和专用装置
US7556789B2 (en) * 2003-05-14 2009-07-07 Central Michigan University Board Of Trustees Low temperature synthesis of carbon nanotubes
JP2009538262A (ja) * 2006-03-29 2009-11-05 ハイピリオン カタリシス インターナショナル インコーポレイテッド 均一な単層ナノチューブの製造方法
EP2077251A4 (en) * 2006-09-08 2015-07-08 Hitachi Chemical Co Ltd METHOD FOR PRODUCING CARBON NANOTUBES
JP5335254B2 (ja) * 2008-02-25 2013-11-06 国立大学法人静岡大学 カーボンナノチューブの製造方法及び製造装置
US8724974B2 (en) * 2011-09-30 2014-05-13 Fujikin Incorporated Vaporizer

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