JP5899523B2 - カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法 - Google Patents

カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法 Download PDF

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Publication number
JP5899523B2
JP5899523B2 JP2013177235A JP2013177235A JP5899523B2 JP 5899523 B2 JP5899523 B2 JP 5899523B2 JP 2013177235 A JP2013177235 A JP 2013177235A JP 2013177235 A JP2013177235 A JP 2013177235A JP 5899523 B2 JP5899523 B2 JP 5899523B2
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Japan
Prior art keywords
chamber
gas phase
liquid
manufacturing
cnt
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JP2013177235A
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English (en)
Japanese (ja)
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JP2015044715A (ja
JP2015044715A5 (enExample
Inventor
翼 井上
翼 井上
中野　貴之
貴之 中野
太宇人 中西
太宇人 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shizuoka University
JNC Corp
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Shizuoka University
JNC Corp
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Publication date
Application filed by Shizuoka University, JNC Corp filed Critical Shizuoka University
Priority to JP2013177235A priority Critical patent/JP5899523B2/ja
Priority to US14/914,628 priority patent/US20160207773A1/en
Priority to PCT/JP2014/072652 priority patent/WO2015030145A1/ja
Priority to CN201480046680.9A priority patent/CN105492384B/zh
Publication of JP2015044715A publication Critical patent/JP2015044715A/ja
Publication of JP2015044715A5 publication Critical patent/JP2015044715A5/ja
Application granted granted Critical
Publication of JP5899523B2 publication Critical patent/JP5899523B2/ja
Priority to US15/841,306 priority patent/US10343919B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Carbon And Carbon Compounds (AREA)
JP2013177235A 2013-08-28 2013-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法 Expired - Fee Related JP5899523B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013177235A JP5899523B2 (ja) 2013-08-28 2013-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法
US14/914,628 US20160207773A1 (en) 2013-08-28 2014-08-28 Production apparatus for carbon nanotubes, feed unit for being part of production apparatus, and production method for carbon nanotubes
PCT/JP2014/072652 WO2015030145A1 (ja) 2013-08-28 2014-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法
CN201480046680.9A CN105492384B (zh) 2013-08-28 2014-08-28 制造装置、供给单元及碳纳米管的制造方法
US15/841,306 US10343919B2 (en) 2013-08-28 2017-12-14 Production method for carbon nanotubes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013177235A JP5899523B2 (ja) 2013-08-28 2013-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法

Publications (3)

Publication Number Publication Date
JP2015044715A JP2015044715A (ja) 2015-03-12
JP2015044715A5 JP2015044715A5 (enExample) 2015-09-24
JP5899523B2 true JP5899523B2 (ja) 2016-04-06

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JP2013177235A Expired - Fee Related JP5899523B2 (ja) 2013-08-28 2013-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法

Country Status (4)

Country Link
US (2) US20160207773A1 (enExample)
JP (1) JP5899523B2 (enExample)
CN (1) CN105492384B (enExample)
WO (1) WO2015030145A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016200112A1 (de) * 2016-01-07 2017-07-13 Leybold Gmbh Vakuumpumpenantrieb mit Stern-Dreieck-Umschaltung
CN110983300B (zh) * 2019-12-04 2023-06-20 江苏菲沃泰纳米科技股份有限公司 镀膜设备及其应用
KR102432915B1 (ko) * 2020-05-22 2022-08-17 내일테크놀로지 주식회사 붕소 전구체의 열처리를 통한 질화붕소나노튜브의 제조방법 및 장치
JP7872775B2 (ja) * 2021-03-26 2026-06-10 雄二 松川 カーボンナノチューブ製造方法及び製造装置
CN115180614A (zh) * 2022-08-02 2022-10-14 武汉市碳翁科技有限公司 一种连续碳纳米管聚集体合成装置及使用方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1043256C (zh) * 1996-11-05 1999-05-05 中国科学院物理研究所 一种有序排列的碳纳米管及其制备方法和专用装置
US7556789B2 (en) * 2003-05-14 2009-07-07 Central Michigan University Board Of Trustees Low temperature synthesis of carbon nanotubes
US7951351B2 (en) * 2006-03-29 2011-05-31 Hyperion Catalysis International, Inc. Method for preparing uniform single walled carbon nanotubes
JP5509595B2 (ja) * 2006-09-08 2014-06-04 日立化成株式会社 カーボンナノチューブの製造方法
JP5335254B2 (ja) * 2008-02-25 2013-11-06 国立大学法人静岡大学 カーボンナノチューブの製造方法及び製造装置
JP5913888B2 (ja) * 2011-09-30 2016-04-27 国立大学法人東北大学 気化器

Also Published As

Publication number Publication date
WO2015030145A1 (ja) 2015-03-05
CN105492384A (zh) 2016-04-13
JP2015044715A (ja) 2015-03-12
US10343919B2 (en) 2019-07-09
US20160207773A1 (en) 2016-07-21
CN105492384B (zh) 2017-11-14
US20180105423A1 (en) 2018-04-19

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