CN105492384B - 制造装置、供给单元及碳纳米管的制造方法 - Google Patents

制造装置、供给单元及碳纳米管的制造方法 Download PDF

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Publication number
CN105492384B
CN105492384B CN201480046680.9A CN201480046680A CN105492384B CN 105492384 B CN105492384 B CN 105492384B CN 201480046680 A CN201480046680 A CN 201480046680A CN 105492384 B CN105492384 B CN 105492384B
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CN
China
Prior art keywords
gas
chamber
liquid
phase
carbon nanotubes
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Expired - Fee Related
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CN201480046680.9A
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English (en)
Chinese (zh)
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CN105492384A (zh
Inventor
井上翼
中野贵之
中西太宇人
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Shizuoka University NUC
JNC Corp
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Shizuoka University NUC
JNC Corp
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Publication of CN105492384A publication Critical patent/CN105492384A/zh
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Expired - Fee Related legal-status Critical Current
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Carbon And Carbon Compounds (AREA)
CN201480046680.9A 2013-08-28 2014-08-28 制造装置、供给单元及碳纳米管的制造方法 Expired - Fee Related CN105492384B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013177235A JP5899523B2 (ja) 2013-08-28 2013-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法
JP2013-177235 2013-08-28
PCT/JP2014/072652 WO2015030145A1 (ja) 2013-08-28 2014-08-28 カーボンナノチューブの製造装置および当該製造装置の一部となる供給ユニットならびにカーボンナノチューブの製造方法

Publications (2)

Publication Number Publication Date
CN105492384A CN105492384A (zh) 2016-04-13
CN105492384B true CN105492384B (zh) 2017-11-14

Family

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CN201480046680.9A Expired - Fee Related CN105492384B (zh) 2013-08-28 2014-08-28 制造装置、供给单元及碳纳米管的制造方法

Country Status (4)

Country Link
US (2) US20160207773A1 (enExample)
JP (1) JP5899523B2 (enExample)
CN (1) CN105492384B (enExample)
WO (1) WO2015030145A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016200112A1 (de) 2016-01-07 2017-07-13 Leybold Gmbh Vakuumpumpenantrieb mit Stern-Dreieck-Umschaltung
CN110983300B (zh) * 2019-12-04 2023-06-20 江苏菲沃泰纳米科技股份有限公司 镀膜设备及其应用
KR102432915B1 (ko) * 2020-05-22 2022-08-17 내일테크놀로지 주식회사 붕소 전구체의 열처리를 통한 질화붕소나노튜브의 제조방법 및 장치
WO2022202964A1 (ja) * 2021-03-26 2022-09-29 雄二 松川 カーボンナノチューブ製造方法及び製造装置
CN115180614A (zh) * 2022-08-02 2022-10-14 武汉市碳翁科技有限公司 一种连续碳纳米管聚集体合成装置及使用方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1165209A (zh) * 1996-11-05 1997-11-19 中国科学院物理研究所 一种有序排列的碳纳米管及其制备方法和专用装置
WO2009107603A1 (ja) * 2008-02-25 2009-09-03 国立大学法人静岡大学 カーボンナノチューブ及びカーボンナノチューブファイバー等の製造方法及び製造装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004103904A1 (en) * 2003-05-14 2004-12-02 Central Michigan University Board Of Trustees Low temperature synthesis of carbon nanotubes
AU2007319766A1 (en) * 2006-03-29 2008-05-22 Hyperion Catalysis International, Inc. Method for preparing uniform single walled carbon nanotubes
EP2077251A4 (en) * 2006-09-08 2015-07-08 Hitachi Chemical Co Ltd METHOD FOR PRODUCING CARBON NANOTUBES
US8724974B2 (en) * 2011-09-30 2014-05-13 Fujikin Incorporated Vaporizer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1165209A (zh) * 1996-11-05 1997-11-19 中国科学院物理研究所 一种有序排列的碳纳米管及其制备方法和专用装置
WO2009107603A1 (ja) * 2008-02-25 2009-09-03 国立大学法人静岡大学 カーボンナノチューブ及びカーボンナノチューブファイバー等の製造方法及び製造装置
US20110008240A1 (en) * 2008-02-25 2011-01-13 National University Corporation Shizuoka University Process and Apparatus for Producing Carbon Nanotube, Carbon Nanotube Fiber, and the Like

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Carbon Nanotubes and Spheres Produced by Modified Ferrocene Pyrolysis;Haoqing Hou et al.;《Chem. Mater.》;20020815;第14卷;第3990-3994页 *
growth of vertically aligned carbon nanotubes by CVD by evaporation of carbon precursors;S.Musso et al.;《Diamond & Related Materials》;20050130;第14卷;第784-789页 *
Large-Scale Synthesis of Aligned Carbon Nanotubes Using FeCl3 as Floating Catalyst Precursor;Haoqing Hou et al.;《Chem. Mater.》;20030104;第15卷;第580-585页 *

Also Published As

Publication number Publication date
US10343919B2 (en) 2019-07-09
US20180105423A1 (en) 2018-04-19
JP5899523B2 (ja) 2016-04-06
CN105492384A (zh) 2016-04-13
US20160207773A1 (en) 2016-07-21
WO2015030145A1 (ja) 2015-03-05
JP2015044715A (ja) 2015-03-12

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