JP2015035446A5 - - Google Patents

Download PDF

Info

Publication number
JP2015035446A5
JP2015035446A5 JP2013164284A JP2013164284A JP2015035446A5 JP 2015035446 A5 JP2015035446 A5 JP 2015035446A5 JP 2013164284 A JP2013164284 A JP 2013164284A JP 2013164284 A JP2013164284 A JP 2013164284A JP 2015035446 A5 JP2015035446 A5 JP 2015035446A5
Authority
JP
Japan
Prior art keywords
metal base
adsorbing
disposed
cooling
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013164284A
Other languages
English (en)
Japanese (ja)
Other versions
JP6158634B2 (ja
JP2015035446A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013164284A priority Critical patent/JP6158634B2/ja
Priority claimed from JP2013164284A external-priority patent/JP6158634B2/ja
Publication of JP2015035446A publication Critical patent/JP2015035446A/ja
Publication of JP2015035446A5 publication Critical patent/JP2015035446A5/ja
Application granted granted Critical
Publication of JP6158634B2 publication Critical patent/JP6158634B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013164284A 2013-08-07 2013-08-07 静電チャック Active JP6158634B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013164284A JP6158634B2 (ja) 2013-08-07 2013-08-07 静電チャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013164284A JP6158634B2 (ja) 2013-08-07 2013-08-07 静電チャック

Publications (3)

Publication Number Publication Date
JP2015035446A JP2015035446A (ja) 2015-02-19
JP2015035446A5 true JP2015035446A5 (cg-RX-API-DMAC7.html) 2016-05-19
JP6158634B2 JP6158634B2 (ja) 2017-07-05

Family

ID=52543797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013164284A Active JP6158634B2 (ja) 2013-08-07 2013-08-07 静電チャック

Country Status (1)

Country Link
JP (1) JP6158634B2 (cg-RX-API-DMAC7.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6653535B2 (ja) * 2015-08-07 2020-02-26 日本発條株式会社 ヒータユニット
JP2019075477A (ja) * 2017-10-17 2019-05-16 株式会社ディスコ チャックテーブル機構
CN111161995B (zh) * 2020-03-07 2025-07-01 江苏先锋精密科技股份有限公司 一种等离子刻蚀机用全封闭式云母加热基座
KR102677038B1 (ko) * 2020-05-22 2024-06-19 세메스 주식회사 정전 척과 그 제조 방법 및 기판 처리 장치
CN111863693B (zh) * 2020-07-06 2025-10-24 北京华卓精科科技股份有限公司 一种静电卡盘及其制备方法
US12125734B2 (en) * 2022-08-10 2024-10-22 Applied Materials, Inc. Vacuum seal for electrostatic chuck
JP7583933B2 (ja) * 2022-11-11 2024-11-14 日本碍子株式会社 ウエハ載置台
JP2024143492A (ja) * 2023-03-30 2024-10-11 日本発條株式会社 ステージ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010045170A (ja) * 2008-08-12 2010-02-25 Hitachi High-Technologies Corp 試料載置電極
JP5482282B2 (ja) * 2009-03-03 2014-05-07 東京エレクトロン株式会社 載置台構造及び成膜装置

Similar Documents

Publication Publication Date Title
JP2015035446A5 (cg-RX-API-DMAC7.html)
JP2014131022A5 (cg-RX-API-DMAC7.html)
JP2013208054A5 (cg-RX-API-DMAC7.html)
JP2013243267A5 (cg-RX-API-DMAC7.html)
JP2016528044A5 (cg-RX-API-DMAC7.html)
JP2012009414A5 (ja) 電極
JP2014063141A5 (ja) 半導体装置の作製方法
JP2011228689A5 (cg-RX-API-DMAC7.html)
JP2015506787A5 (cg-RX-API-DMAC7.html)
JP2015084417A5 (cg-RX-API-DMAC7.html)
JP2014027263A5 (ja) 半導体装置
JP2013016862A5 (cg-RX-API-DMAC7.html)
MX2021013935A (es) Calentador electronico de tabaco de tipo calentamiento de aire, elemento calentador ceramico y su metodo de preparacion.
JP2011228692A5 (cg-RX-API-DMAC7.html)
JP2014233757A5 (cg-RX-API-DMAC7.html)
JP2012522385A5 (cg-RX-API-DMAC7.html)
JP2012199341A5 (cg-RX-API-DMAC7.html)
EP2814106A3 (en) Thermal conductivity control devices
JP2008202099A5 (cg-RX-API-DMAC7.html)
JP2017106422A5 (cg-RX-API-DMAC7.html)
DK3339793T3 (da) Varmeveksler med opsamler svejset til kernen
JP2015130288A5 (cg-RX-API-DMAC7.html)
JP2011091386A5 (ja) 熱処理装置
JP2015105778A5 (cg-RX-API-DMAC7.html)
JP2015070207A5 (ja) 光学半導体デバイス