JP2015035446A5 - - Google Patents

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Publication number
JP2015035446A5
JP2015035446A5 JP2013164284A JP2013164284A JP2015035446A5 JP 2015035446 A5 JP2015035446 A5 JP 2015035446A5 JP 2013164284 A JP2013164284 A JP 2013164284A JP 2013164284 A JP2013164284 A JP 2013164284A JP 2015035446 A5 JP2015035446 A5 JP 2015035446A5
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JP
Japan
Prior art keywords
metal base
adsorbing
disposed
cooling
ceramic
Prior art date
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Granted
Application number
JP2013164284A
Other languages
English (en)
Japanese (ja)
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JP6158634B2 (ja
JP2015035446A (ja
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Priority to JP2013164284A priority Critical patent/JP6158634B2/ja
Priority claimed from JP2013164284A external-priority patent/JP6158634B2/ja
Publication of JP2015035446A publication Critical patent/JP2015035446A/ja
Publication of JP2015035446A5 publication Critical patent/JP2015035446A5/ja
Application granted granted Critical
Publication of JP6158634B2 publication Critical patent/JP6158634B2/ja
Active legal-status Critical Current
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JP2013164284A 2013-08-07 2013-08-07 静電チャック Active JP6158634B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013164284A JP6158634B2 (ja) 2013-08-07 2013-08-07 静電チャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013164284A JP6158634B2 (ja) 2013-08-07 2013-08-07 静電チャック

Publications (3)

Publication Number Publication Date
JP2015035446A JP2015035446A (ja) 2015-02-19
JP2015035446A5 true JP2015035446A5 (cg-RX-API-DMAC7.html) 2016-05-19
JP6158634B2 JP6158634B2 (ja) 2017-07-05

Family

ID=52543797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013164284A Active JP6158634B2 (ja) 2013-08-07 2013-08-07 静電チャック

Country Status (1)

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JP (1) JP6158634B2 (cg-RX-API-DMAC7.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6653535B2 (ja) * 2015-08-07 2020-02-26 日本発條株式会社 ヒータユニット
JP2019075477A (ja) * 2017-10-17 2019-05-16 株式会社ディスコ チャックテーブル機構
CN111161995B (zh) * 2020-03-07 2025-07-01 江苏先锋精密科技股份有限公司 一种等离子刻蚀机用全封闭式云母加热基座
KR102677038B1 (ko) * 2020-05-22 2024-06-19 세메스 주식회사 정전 척과 그 제조 방법 및 기판 처리 장치
CN111863693B (zh) * 2020-07-06 2025-10-24 北京华卓精科科技股份有限公司 一种静电卡盘及其制备方法
KR102808059B1 (ko) * 2022-11-11 2025-05-16 엔지케이 인슐레이터 엘티디 웨이퍼 적재대
JP2024143492A (ja) * 2023-03-30 2024-10-11 日本発條株式会社 ステージ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010045170A (ja) * 2008-08-12 2010-02-25 Hitachi High-Technologies Corp 試料載置電極
JP5482282B2 (ja) * 2009-03-03 2014-05-07 東京エレクトロン株式会社 載置台構造及び成膜装置

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