JP2015031786A5 - - Google Patents

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Publication number
JP2015031786A5
JP2015031786A5 JP2013160425A JP2013160425A JP2015031786A5 JP 2015031786 A5 JP2015031786 A5 JP 2015031786A5 JP 2013160425 A JP2013160425 A JP 2013160425A JP 2013160425 A JP2013160425 A JP 2013160425A JP 2015031786 A5 JP2015031786 A5 JP 2015031786A5
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JP
Japan
Prior art keywords
wiring
actuator device
torsion bar
disposed
metal material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013160425A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015031786A (ja
JP6253915B2 (ja
Filing date
Publication date
Priority claimed from JP2013160425A external-priority patent/JP6253915B2/ja
Priority to JP2013160425A priority Critical patent/JP6253915B2/ja
Application filed filed Critical
Priority to US14/908,173 priority patent/US9729038B2/en
Priority to PCT/JP2013/083362 priority patent/WO2015015666A1/ja
Priority to EP13890693.8A priority patent/EP3029818B1/en
Publication of JP2015031786A publication Critical patent/JP2015031786A/ja
Publication of JP2015031786A5 publication Critical patent/JP2015031786A5/ja
Priority to US15/634,296 priority patent/US10394017B2/en
Publication of JP6253915B2 publication Critical patent/JP6253915B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013160425A 2013-08-01 2013-08-01 アクチュエータ装置及びミラー駆動装置 Active JP6253915B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013160425A JP6253915B2 (ja) 2013-08-01 2013-08-01 アクチュエータ装置及びミラー駆動装置
US14/908,173 US9729038B2 (en) 2013-08-01 2013-12-12 Actuator device and mirror drive device
PCT/JP2013/083362 WO2015015666A1 (ja) 2013-08-01 2013-12-12 アクチュエータ装置及びミラー駆動装置
EP13890693.8A EP3029818B1 (en) 2013-08-01 2013-12-12 Actuator device and mirror drive device
US15/634,296 US10394017B2 (en) 2013-08-01 2017-06-27 Actuator device and mirror drive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013160425A JP6253915B2 (ja) 2013-08-01 2013-08-01 アクチュエータ装置及びミラー駆動装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017229050A Division JP6426818B2 (ja) 2017-11-29 2017-11-29 アクチュエータ装置

Publications (3)

Publication Number Publication Date
JP2015031786A JP2015031786A (ja) 2015-02-16
JP2015031786A5 true JP2015031786A5 (https=) 2016-09-08
JP6253915B2 JP6253915B2 (ja) 2017-12-27

Family

ID=52431233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013160425A Active JP6253915B2 (ja) 2013-08-01 2013-08-01 アクチュエータ装置及びミラー駆動装置

Country Status (4)

Country Link
US (2) US9729038B2 (https=)
EP (1) EP3029818B1 (https=)
JP (1) JP6253915B2 (https=)
WO (1) WO2015015666A1 (https=)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6460406B2 (ja) * 2015-06-09 2019-01-30 第一精工株式会社 可動反射素子及び二次元走査装置
US10196259B2 (en) * 2015-12-30 2019-02-05 Mems Drive, Inc. MEMS actuator structures resistant to shock
JP6691784B2 (ja) * 2016-01-21 2020-05-13 浜松ホトニクス株式会社 アクチュエータ装置
JP6696777B2 (ja) * 2016-01-21 2020-05-20 浜松ホトニクス株式会社 アクチュエータ装置
ITUA20162170A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo
IT201600079604A1 (it) * 2016-07-28 2018-01-28 St Microelectronics Srl Struttura oscillante con attuazione piezoelettrica, sistema e metodo di fabbricazione
CN110337604B (zh) * 2017-02-28 2022-05-03 浜松光子学株式会社 光模块及测距装置
US11555892B2 (en) 2017-03-13 2023-01-17 Pioneer Corporation Drive device and distance measurement apparatus
JP6924090B2 (ja) 2017-07-21 2021-08-25 浜松ホトニクス株式会社 アクチュエータ装置
EP3667394B1 (en) 2017-08-10 2025-08-13 Hamamatsu Photonics K.K. Mirror device
JP6585147B2 (ja) * 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
KR20200095458A (ko) * 2017-12-01 2020-08-10 하마마츠 포토닉스 가부시키가이샤 액추에이터 장치
JP1680385S (https=) * 2018-05-01 2021-03-01
JP1625135S (https=) * 2018-05-01 2019-03-18
USD903614S1 (en) 2018-05-01 2020-12-01 Hamamatsu Photonics K.K. Laser beam reflector
USD907085S1 (en) * 2018-05-01 2021-01-05 Hamamatsu Photonics K.K. Laser beam reflector
JP1680387S (https=) * 2018-05-01 2021-03-01
JP1680388S (https=) * 2018-05-01 2021-03-01
JP1625495S (https=) 2018-05-01 2019-03-18
JP1680386S (https=) * 2018-05-01 2021-03-01
JP1680507S (https=) 2018-05-01 2021-03-08
JP1639597S (https=) * 2018-05-01 2019-08-19
JP1680755S (https=) 2018-05-01 2021-03-08
US12105277B2 (en) * 2018-10-04 2024-10-01 Innoviz Technologies Ltd. Electrooptical systems having heating elements
EP3666727B1 (en) * 2018-12-14 2024-10-02 STMicroelectronics S.r.l. Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics
US10730744B2 (en) * 2018-12-28 2020-08-04 Industrial Technology Research Institute MEMS device with movable stage
CH715874A1 (fr) * 2019-02-26 2020-08-31 Sercalo Microtechnology Ltd Dispositif micromécanique à bobine.
JP7065146B2 (ja) * 2020-04-23 2022-05-11 浜松ホトニクス株式会社 アクチュエータ装置
US11733510B2 (en) * 2020-06-10 2023-08-22 Nokia Technologies Oy Electromagnetic microactuator apparatus and method
US12164103B2 (en) 2020-12-16 2024-12-10 STMicroelectronics (Research &Develoment) Limited Compact line scan MEMS time of flight system with actuated lens
US11747611B2 (en) 2020-12-16 2023-09-05 Stmicroelectronics (Research & Development) Limited Compact line scan mems time of flight system with actuated lens
US12541091B2 (en) * 2021-01-28 2026-02-03 Mitsubishi Electric Corporation MEMS mirror device and distance measuring apparatus

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
JP2001051224A (ja) 1999-08-06 2001-02-23 Olympus Optical Co Ltd アクチュエータ
JP2003100753A (ja) * 2001-09-27 2003-04-04 Dainippon Screen Mfg Co Ltd 薄膜整形装置および薄膜整形方法
US6935759B1 (en) * 2002-02-19 2005-08-30 Glimmerglass Networks, Inc. Folded longitudinal torsional hinge for gimbaled MEMS mirror
JP2005245135A (ja) 2004-02-26 2005-09-08 Miyota Kk プレーナ型電磁アクチュエータ及びその製造方法
JP5634670B2 (ja) * 2008-10-20 2014-12-03 日本信号株式会社 プレーナ型アクチュエータ
JP5191939B2 (ja) * 2009-03-31 2013-05-08 スタンレー電気株式会社 光偏向器用アクチュエータ装置
JP2012088487A (ja) * 2010-10-19 2012-05-10 Jvc Kenwood Corp 光偏向器
JP5842467B2 (ja) * 2010-11-16 2016-01-13 株式会社リコー アクチュエータ装置、このアクチュエータ装置用の保護カバー、このアクチュエータの製造方法、このアクチュエータ装置を用いた光偏向装置、二次元光走査装置及びこれを用いた画像投影装置
JP5775765B2 (ja) * 2011-01-21 2015-09-09 オリンパス株式会社 光偏向器
EP2689283A1 (en) 2011-03-25 2014-01-29 Lemoptix SA A reflective device
JP2013200337A (ja) * 2012-03-23 2013-10-03 Stanley Electric Co Ltd 光偏向器
US9341840B2 (en) * 2012-06-13 2016-05-17 Intel Corporation MEMS device

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