JP2015031786A5 - - Google Patents
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- Publication number
- JP2015031786A5 JP2015031786A5 JP2013160425A JP2013160425A JP2015031786A5 JP 2015031786 A5 JP2015031786 A5 JP 2015031786A5 JP 2013160425 A JP2013160425 A JP 2013160425A JP 2013160425 A JP2013160425 A JP 2013160425A JP 2015031786 A5 JP2015031786 A5 JP 2015031786A5
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- actuator device
- torsion bar
- disposed
- metal material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007769 metal material Substances 0.000 claims 6
- 239000004020 conductor Substances 0.000 claims 3
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013160425A JP6253915B2 (ja) | 2013-08-01 | 2013-08-01 | アクチュエータ装置及びミラー駆動装置 |
| EP13890693.8A EP3029818B1 (en) | 2013-08-01 | 2013-12-12 | Actuator device and mirror drive device |
| US14/908,173 US9729038B2 (en) | 2013-08-01 | 2013-12-12 | Actuator device and mirror drive device |
| PCT/JP2013/083362 WO2015015666A1 (ja) | 2013-08-01 | 2013-12-12 | アクチュエータ装置及びミラー駆動装置 |
| US15/634,296 US10394017B2 (en) | 2013-08-01 | 2017-06-27 | Actuator device and mirror drive device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013160425A JP6253915B2 (ja) | 2013-08-01 | 2013-08-01 | アクチュエータ装置及びミラー駆動装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017229050A Division JP6426818B2 (ja) | 2017-11-29 | 2017-11-29 | アクチュエータ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015031786A JP2015031786A (ja) | 2015-02-16 |
| JP2015031786A5 true JP2015031786A5 (cg-RX-API-DMAC7.html) | 2016-09-08 |
| JP6253915B2 JP6253915B2 (ja) | 2017-12-27 |
Family
ID=52431233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013160425A Active JP6253915B2 (ja) | 2013-08-01 | 2013-08-01 | アクチュエータ装置及びミラー駆動装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US9729038B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP3029818B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6253915B2 (cg-RX-API-DMAC7.html) |
| WO (1) | WO2015015666A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6460406B2 (ja) * | 2015-06-09 | 2019-01-30 | 第一精工株式会社 | 可動反射素子及び二次元走査装置 |
| US10196259B2 (en) * | 2015-12-30 | 2019-02-05 | Mems Drive, Inc. | MEMS actuator structures resistant to shock |
| JP6696777B2 (ja) | 2016-01-21 | 2020-05-20 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
| JP6691784B2 (ja) * | 2016-01-21 | 2020-05-13 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
| ITUA20162170A1 (it) * | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo |
| IT201600079604A1 (it) * | 2016-07-28 | 2018-01-28 | St Microelectronics Srl | Struttura oscillante con attuazione piezoelettrica, sistema e metodo di fabbricazione |
| EP3591454B1 (en) | 2017-02-28 | 2023-03-22 | Hamamatsu Photonics K.K. | Optical module and distance measurement device |
| JP6726356B2 (ja) * | 2017-03-13 | 2020-07-22 | パイオニア株式会社 | 駆動装置および距離測定装置 |
| JP6924090B2 (ja) | 2017-07-21 | 2021-08-25 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
| WO2019031420A1 (ja) * | 2017-08-10 | 2019-02-14 | 浜松ホトニクス株式会社 | ミラー装置 |
| KR20200095458A (ko) | 2017-12-01 | 2020-08-10 | 하마마츠 포토닉스 가부시키가이샤 | 액추에이터 장치 |
| JP6585147B2 (ja) | 2017-12-01 | 2019-10-02 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
| JP1680385S (cg-RX-API-DMAC7.html) * | 2018-05-01 | 2021-03-01 | ||
| JP1680755S (cg-RX-API-DMAC7.html) | 2018-05-01 | 2021-03-08 | ||
| JP1680387S (cg-RX-API-DMAC7.html) * | 2018-05-01 | 2021-03-01 | ||
| JP1680507S (cg-RX-API-DMAC7.html) * | 2018-05-01 | 2021-03-08 | ||
| USD907085S1 (en) * | 2018-05-01 | 2021-01-05 | Hamamatsu Photonics K.K. | Laser beam reflector |
| JP1639597S (cg-RX-API-DMAC7.html) * | 2018-05-01 | 2019-08-19 | ||
| USD903614S1 (en) | 2018-05-01 | 2020-12-01 | Hamamatsu Photonics K.K. | Laser beam reflector |
| JP1680386S (cg-RX-API-DMAC7.html) * | 2018-05-01 | 2021-03-01 | ||
| JP1680388S (cg-RX-API-DMAC7.html) * | 2018-05-01 | 2021-03-01 | ||
| JP1625495S (cg-RX-API-DMAC7.html) * | 2018-05-01 | 2019-03-18 | ||
| JP1625135S (cg-RX-API-DMAC7.html) * | 2018-05-01 | 2019-03-18 | ||
| KR102793661B1 (ko) * | 2018-10-04 | 2025-04-08 | 이노비즈 테크놀로지스 엘티디 | 가열 요소를 갖는 전기 광학 시스템 |
| EP3666727B1 (en) * | 2018-12-14 | 2024-10-02 | STMicroelectronics S.r.l. | Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics |
| US10730744B2 (en) * | 2018-12-28 | 2020-08-04 | Industrial Technology Research Institute | MEMS device with movable stage |
| CH715874A1 (fr) * | 2019-02-26 | 2020-08-31 | Sercalo Microtechnology Ltd | Dispositif micromécanique à bobine. |
| JP7065146B2 (ja) * | 2020-04-23 | 2022-05-11 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
| JP7292469B2 (ja) * | 2020-04-23 | 2023-06-16 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
| US11733510B2 (en) * | 2020-06-10 | 2023-08-22 | Nokia Technologies Oy | Electromagnetic microactuator apparatus and method |
| US12164103B2 (en) | 2020-12-16 | 2024-12-10 | STMicroelectronics (Research &Develoment) Limited | Compact line scan MEMS time of flight system with actuated lens |
| US11747611B2 (en) | 2020-12-16 | 2023-09-05 | Stmicroelectronics (Research & Development) Limited | Compact line scan mems time of flight system with actuated lens |
| JP7499889B2 (ja) * | 2021-01-28 | 2024-06-14 | 三菱電機株式会社 | Ｍｅｍｓミラー装置及び測距装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001051224A (ja) | 1999-08-06 | 2001-02-23 | Olympus Optical Co Ltd | アクチュエータ |
| JP2003100753A (ja) * | 2001-09-27 | 2003-04-04 | Dainippon Screen Mfg Co Ltd | 薄膜整形装置および薄膜整形方法 |
| US6935759B1 (en) * | 2002-02-19 | 2005-08-30 | Glimmerglass Networks, Inc. | Folded longitudinal torsional hinge for gimbaled MEMS mirror |
| JP2005245135A (ja) | 2004-02-26 | 2005-09-08 | Miyota Kk | プレーナ型電磁アクチュエータ及びその製造方法 |
| JP5634670B2 (ja) * | 2008-10-20 | 2014-12-03 | 日本信号株式会社 | プレーナ型アクチュエータ |
| JP5191939B2 (ja) * | 2009-03-31 | 2013-05-08 | スタンレー電気株式会社 | 光偏向器用アクチュエータ装置 |
| JP2012088487A (ja) * | 2010-10-19 | 2012-05-10 | Jvc Kenwood Corp | 光偏向器 |
| JP5842467B2 (ja) * | 2010-11-16 | 2016-01-13 | 株式会社リコー | アクチュエータ装置、このアクチュエータ装置用の保護カバー、このアクチュエータの製造方法、このアクチュエータ装置を用いた光偏向装置、二次元光走査装置及びこれを用いた画像投影装置 |
| JP5775765B2 (ja) * | 2011-01-21 | 2015-09-09 | オリンパス株式会社 | 光偏向器 |
| WO2012130612A1 (en) * | 2011-03-25 | 2012-10-04 | Lemoptix Sa | A reflective device |
| JP2013200337A (ja) * | 2012-03-23 | 2013-10-03 | Stanley Electric Co Ltd | 光偏向器 |
| US9341840B2 (en) * | 2012-06-13 | 2016-05-17 | Intel Corporation | MEMS device |
-
2013
- 2013-08-01 JP JP2013160425A patent/JP6253915B2/ja active Active
- 2013-12-12 US US14/908,173 patent/US9729038B2/en active Active
- 2013-12-12 WO PCT/JP2013/083362 patent/WO2015015666A1/ja not_active Ceased
- 2013-12-12 EP EP13890693.8A patent/EP3029818B1/en active Active
-
2017
- 2017-06-27 US US15/634,296 patent/US10394017B2/en active Active