JP2015011207A - 光デバイス - Google Patents
光デバイス Download PDFInfo
- Publication number
- JP2015011207A JP2015011207A JP2013136917A JP2013136917A JP2015011207A JP 2015011207 A JP2015011207 A JP 2015011207A JP 2013136917 A JP2013136917 A JP 2013136917A JP 2013136917 A JP2013136917 A JP 2013136917A JP 2015011207 A JP2015011207 A JP 2015011207A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- optical device
- diffraction grating
- optical
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
21 第1の層
22、41 第2の層
23 第3の層
31、51 反射膜
Claims (7)
- 光導波路の一端を成す第1の層と、
前記第1の層の上に前記第1の層よりも屈折率の低い第2の層を備え、前記第1の層から前記第2の層に入る光を回折させて前記第2の層から前記第1の層に出す光回折手段と、
を含む、光デバイス。 - 前記第1の層がシリコンから成り、前記第2の層が窒化シリコン、酸化シリコン又は酸化窒化シリコンから成る、請求項1に記載の光デバイス。
- 前記光回折手段が、前記第2の層の上に回折格子構造を成す第3の層を備える、請求項1又は2に記載の光デバイス。
- 前記第3の層の回折格子構造の上に反射膜を備える、請求項3に記載の光デバイス。
- 前記第2の層が回折格子構造を成す、請求項1又は2に記載の光デバイス。
- 前記第2の層の回折格子構造の上に反射膜を備える、請求項5に記載の光デバイス。
- 前記反射膜が金属から成る、請求項4又は6に記載の光デバイス。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013136917A JP2015011207A (ja) | 2013-06-28 | 2013-06-28 | 光デバイス |
US14/299,354 US9638864B2 (en) | 2013-06-28 | 2014-06-09 | Optical device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013136917A JP2015011207A (ja) | 2013-06-28 | 2013-06-28 | 光デバイス |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2015011207A true JP2015011207A (ja) | 2015-01-19 |
Family
ID=52115678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013136917A Pending JP2015011207A (ja) | 2013-06-28 | 2013-06-28 | 光デバイス |
Country Status (2)
Country | Link |
---|---|
US (1) | US9638864B2 (ja) |
JP (1) | JP2015011207A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI831075B (zh) * | 2020-11-09 | 2024-02-01 | 宏達國際電子股份有限公司 | 波導裝置及光學引擎 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5303316A (en) * | 1989-12-22 | 1994-04-12 | David Sarnoff Research Center, Inc. | Optical beam scanner |
US20040156589A1 (en) * | 2003-02-11 | 2004-08-12 | Luxtera, Inc | Optical waveguide grating coupler incorporating reflective optical elements and anti-reflection elements |
JP2010044290A (ja) * | 2008-08-18 | 2010-02-25 | Oki Electric Ind Co Ltd | 光導波路径拡大回路、その製造方法、及び光導波路型装置 |
US20120045172A1 (en) * | 2010-08-23 | 2012-02-23 | Hon Hai Precision Industry Co., Ltd. | Grating coupler and package structure incorporating the same |
JP2012098513A (ja) * | 2010-11-02 | 2012-05-24 | Kyoto Institute Of Technology | 波長選択フィルタ及びそれを備えたフィルタ装置及びレーザ装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011107384A (ja) | 2009-11-17 | 2011-06-02 | Nec Corp | 光結合デバイスの製造方法 |
US9239432B2 (en) * | 2013-03-14 | 2016-01-19 | Micron Technology, Inc. | Photonics grating coupler and method of manufacture |
-
2013
- 2013-06-28 JP JP2013136917A patent/JP2015011207A/ja active Pending
-
2014
- 2014-06-09 US US14/299,354 patent/US9638864B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5303316A (en) * | 1989-12-22 | 1994-04-12 | David Sarnoff Research Center, Inc. | Optical beam scanner |
US20040156589A1 (en) * | 2003-02-11 | 2004-08-12 | Luxtera, Inc | Optical waveguide grating coupler incorporating reflective optical elements and anti-reflection elements |
JP2010044290A (ja) * | 2008-08-18 | 2010-02-25 | Oki Electric Ind Co Ltd | 光導波路径拡大回路、その製造方法、及び光導波路型装置 |
US20120045172A1 (en) * | 2010-08-23 | 2012-02-23 | Hon Hai Precision Industry Co., Ltd. | Grating coupler and package structure incorporating the same |
JP2012098513A (ja) * | 2010-11-02 | 2012-05-24 | Kyoto Institute Of Technology | 波長選択フィルタ及びそれを備えたフィルタ装置及びレーザ装置 |
Also Published As
Publication number | Publication date |
---|---|
US9638864B2 (en) | 2017-05-02 |
US20150003781A1 (en) | 2015-01-01 |
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