JP2015010871A - 物理量センサ - Google Patents

物理量センサ Download PDF

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Publication number
JP2015010871A
JP2015010871A JP2013134840A JP2013134840A JP2015010871A JP 2015010871 A JP2015010871 A JP 2015010871A JP 2013134840 A JP2013134840 A JP 2013134840A JP 2013134840 A JP2013134840 A JP 2013134840A JP 2015010871 A JP2015010871 A JP 2015010871A
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JP
Japan
Prior art keywords
substrate
physical quantity
resistivity
semiconductor layer
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013134840A
Other languages
English (en)
Japanese (ja)
Inventor
圭正 杉本
Yoshimasa Sugimoto
圭正 杉本
酒井　峰一
Mineichi Sakai
峰一 酒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2013134840A priority Critical patent/JP2015010871A/ja
Priority to PCT/JP2014/003219 priority patent/WO2014208043A1/fr
Publication of JP2015010871A publication Critical patent/JP2015010871A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP2013134840A 2013-06-27 2013-06-27 物理量センサ Pending JP2015010871A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013134840A JP2015010871A (ja) 2013-06-27 2013-06-27 物理量センサ
PCT/JP2014/003219 WO2014208043A1 (fr) 2013-06-27 2014-06-17 Détecteur de grandeur physique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013134840A JP2015010871A (ja) 2013-06-27 2013-06-27 物理量センサ

Publications (1)

Publication Number Publication Date
JP2015010871A true JP2015010871A (ja) 2015-01-19

Family

ID=52141411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013134840A Pending JP2015010871A (ja) 2013-06-27 2013-06-27 物理量センサ

Country Status (2)

Country Link
JP (1) JP2015010871A (fr)
WO (1) WO2014208043A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9643125B2 (en) 2012-03-26 2017-05-09 Fluor Technologies Corporation Emissions reduction for CO2 capture

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006344934A (ja) * 2005-05-09 2006-12-21 Denso Corp 半導体装置およびその製造方法
JP2009283900A (ja) * 2008-04-22 2009-12-03 Denso Corp 力学量センサの製造方法および力学量センサ
JP2010171368A (ja) * 2008-12-25 2010-08-05 Denso Corp 半導体装置およびその製造方法
JP2011017693A (ja) * 2009-06-09 2011-01-27 Denso Corp 半導体力学量センサの製造方法及び半導体力学量センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006344934A (ja) * 2005-05-09 2006-12-21 Denso Corp 半導体装置およびその製造方法
JP2009283900A (ja) * 2008-04-22 2009-12-03 Denso Corp 力学量センサの製造方法および力学量センサ
JP2010171368A (ja) * 2008-12-25 2010-08-05 Denso Corp 半導体装置およびその製造方法
JP2011017693A (ja) * 2009-06-09 2011-01-27 Denso Corp 半導体力学量センサの製造方法及び半導体力学量センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9643125B2 (en) 2012-03-26 2017-05-09 Fluor Technologies Corporation Emissions reduction for CO2 capture
US10052585B2 (en) 2012-03-26 2018-08-21 Fluor Technologies Corporation Emissions reduction for CO2 capture
US10486104B2 (en) 2012-03-26 2019-11-26 Fluor Technologies Corporation Emissions reduction for CO2 capture

Also Published As

Publication number Publication date
WO2014208043A1 (fr) 2014-12-31

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