JP2014527300A5 - - Google Patents

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Publication number
JP2014527300A5
JP2014527300A5 JP2014525018A JP2014525018A JP2014527300A5 JP 2014527300 A5 JP2014527300 A5 JP 2014527300A5 JP 2014525018 A JP2014525018 A JP 2014525018A JP 2014525018 A JP2014525018 A JP 2014525018A JP 2014527300 A5 JP2014527300 A5 JP 2014527300A5
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JP
Japan
Prior art keywords
passage
process chamber
inches
inlet
region
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JP2014525018A
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English (en)
Japanese (ja)
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JP2014527300A (ja
JP6049720B2 (ja
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Priority claimed from US13/536,443 external-priority patent/US10049881B2/en
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Publication of JP2014527300A5 publication Critical patent/JP2014527300A5/ja
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JP2014525018A 2011-08-10 2012-06-29 選択的窒化プロセスのための方法および装置 Active JP6049720B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161522129P 2011-08-10 2011-08-10
US61/522,129 2011-08-10
US13/536,443 2012-06-28
US13/536,443 US10049881B2 (en) 2011-08-10 2012-06-28 Method and apparatus for selective nitridation process
PCT/US2012/045046 WO2013022530A1 (en) 2011-08-10 2012-06-29 Method and apparatus for selective nitridation process

Publications (3)

Publication Number Publication Date
JP2014527300A JP2014527300A (ja) 2014-10-09
JP2014527300A5 true JP2014527300A5 (cg-RX-API-DMAC7.html) 2015-08-13
JP6049720B2 JP6049720B2 (ja) 2016-12-21

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JP2014525018A Active JP6049720B2 (ja) 2011-08-10 2012-06-29 選択的窒化プロセスのための方法および装置

Country Status (6)

Country Link
US (3) US10049881B2 (cg-RX-API-DMAC7.html)
JP (1) JP6049720B2 (cg-RX-API-DMAC7.html)
KR (2) KR102001245B1 (cg-RX-API-DMAC7.html)
CN (3) CN103718278B (cg-RX-API-DMAC7.html)
TW (4) TWI585865B (cg-RX-API-DMAC7.html)
WO (1) WO2013022530A1 (cg-RX-API-DMAC7.html)

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