JP2014522810A - 金属シリサイドの存在下でポリシラン及びポリカルボシランを形成する方法 - Google Patents
金属シリサイドの存在下でポリシラン及びポリカルボシランを形成する方法 Download PDFInfo
- Publication number
- JP2014522810A JP2014522810A JP2014515994A JP2014515994A JP2014522810A JP 2014522810 A JP2014522810 A JP 2014522810A JP 2014515994 A JP2014515994 A JP 2014515994A JP 2014515994 A JP2014515994 A JP 2014515994A JP 2014522810 A JP2014522810 A JP 2014522810A
- Authority
- JP
- Japan
- Prior art keywords
- mixture
- sir
- polysilane
- polycarbosilane
- sicl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920003257 polycarbosilane Polymers 0.000 title claims abstract description 77
- 229920000548 poly(silane) polymer Polymers 0.000 title claims abstract description 75
- 238000000034 method Methods 0.000 title claims abstract description 67
- 229910021332 silicide Inorganic materials 0.000 title claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 23
- 239000002184 metal Substances 0.000 title claims abstract description 23
- 239000000203 mixture Substances 0.000 claims abstract description 91
- 150000001350 alkyl halides Chemical class 0.000 claims abstract description 42
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 22
- 230000008569 process Effects 0.000 claims abstract description 14
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 6
- 125000004122 cyclic group Chemical group 0.000 claims description 18
- 229910019018 Mg 2 Si Inorganic materials 0.000 claims description 17
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 claims description 12
- 125000005843 halogen group Chemical group 0.000 claims description 11
- 239000000178 monomer Substances 0.000 claims description 10
- 229910003902 SiCl 4 Inorganic materials 0.000 claims description 9
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 claims description 7
- 229910052801 chlorine Inorganic materials 0.000 claims description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 6
- JKDNLUGVHCNUTB-UHFFFAOYSA-N 1,1,3,3-tetramethyl-1,3-disiletane Chemical group C[Si]1(C)C[Si](C)(C)C1 JKDNLUGVHCNUTB-UHFFFAOYSA-N 0.000 claims description 5
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 3
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 2
- 229940050176 methyl chloride Drugs 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims 2
- 238000010397 one-hybrid screening Methods 0.000 claims 1
- 125000001475 halogen functional group Chemical group 0.000 abstract 1
- 239000000460 chlorine Substances 0.000 description 30
- 230000000052 comparative effect Effects 0.000 description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 238000006243 chemical reaction Methods 0.000 description 16
- 150000001875 compounds Chemical class 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910008045 Si-Si Inorganic materials 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 229910006411 Si—Si Inorganic materials 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 3
- OCKGFTQIICXDQW-ZEQRLZLVSA-N 5-[(1r)-1-hydroxy-2-[4-[(2r)-2-hydroxy-2-(4-methyl-1-oxo-3h-2-benzofuran-5-yl)ethyl]piperazin-1-yl]ethyl]-4-methyl-3h-2-benzofuran-1-one Chemical compound C1=C2C(=O)OCC2=C(C)C([C@@H](O)CN2CCN(CC2)C[C@H](O)C2=CC=C3C(=O)OCC3=C2C)=C1 OCKGFTQIICXDQW-ZEQRLZLVSA-N 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- NHBMXLXMVPLQAX-UHFFFAOYSA-N 1,3-disiletane Chemical class C1[SiH2]C[SiH2]1 NHBMXLXMVPLQAX-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PMPVIKIVABFJJI-UHFFFAOYSA-N Cyclobutane Chemical compound C1CCC1 PMPVIKIVABFJJI-UHFFFAOYSA-N 0.000 description 1
- 238000003747 Grignard reaction Methods 0.000 description 1
- FYTPGBJPTDQJCG-UHFFFAOYSA-N Trichloro(chloromethyl)silane Chemical compound ClC[Si](Cl)(Cl)Cl FYTPGBJPTDQJCG-UHFFFAOYSA-N 0.000 description 1
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical group [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 125000002877 alkyl aryl group Chemical group 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 238000006459 hydrosilylation reaction Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 125000002346 iodo group Chemical group I* 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- SNMVRZFUUCLYTO-UHFFFAOYSA-N n-propyl chloride Chemical compound CCCCl SNMVRZFUUCLYTO-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910021350 transition metal silicide Inorganic materials 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical compound [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/16—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Silicon Polymers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161497577P | 2011-06-16 | 2011-06-16 | |
| US61/497,577 | 2011-06-16 | ||
| PCT/US2012/042475 WO2012174250A1 (en) | 2011-06-16 | 2012-06-14 | Method of forming polysilanes and polycarbosilanes in the presence of a metal silicide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2014522810A true JP2014522810A (ja) | 2014-09-08 |
Family
ID=46395727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014515994A Pending JP2014522810A (ja) | 2011-06-16 | 2012-06-14 | 金属シリサイドの存在下でポリシラン及びポリカルボシランを形成する方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20140138577A1 (enExample) |
| EP (1) | EP2721094A1 (enExample) |
| JP (1) | JP2014522810A (enExample) |
| KR (1) | KR20140040797A (enExample) |
| CN (1) | CN103649177A (enExample) |
| IN (1) | IN2014DN00072A (enExample) |
| WO (1) | WO2012174250A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022522034A (ja) * | 2019-04-08 | 2022-04-13 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング | ブロックコポリマーを含んでなる組成物、およびそれを用いたシリカ質膜の製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8865850B2 (en) * | 2012-06-14 | 2014-10-21 | Dow Corning Corporation | Method of selectively forming a reaction product in the presence of a metal silicide |
| US11365290B2 (en) * | 2019-11-22 | 2022-06-21 | Raytheon Technologies Corporation | Modified preceramic polymers, method of making and ceramic matrix composite formed therefrom |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004042531A1 (de) * | 2004-05-03 | 2005-12-15 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Polysilan-Polycarbosilan-Copolymer-Lösungen und daraus hergestellte sauerstoffarme keramische Formkörper mit Zusammensetzungen nahe SiC |
| CN101240070B (zh) * | 2007-02-09 | 2012-05-30 | 中国人民解放军国防科学技术大学 | 陶瓷先驱体聚碳硅烷的超临界流体合成方法 |
| DE102009056371A1 (de) * | 2009-11-30 | 2011-07-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 | Polysilan-Polycarbonsilane mit reduziertem Kohlenstoffgehalt auf Basis von Methylchlorpolysilanen sowie daraus hergestellte Keramiken |
-
2012
- 2012-06-14 JP JP2014515994A patent/JP2014522810A/ja active Pending
- 2012-06-14 KR KR1020147000494A patent/KR20140040797A/ko not_active Withdrawn
- 2012-06-14 US US14/126,251 patent/US20140138577A1/en not_active Abandoned
- 2012-06-14 IN IN72DEN2014 patent/IN2014DN00072A/en unknown
- 2012-06-14 EP EP12730330.3A patent/EP2721094A1/en not_active Withdrawn
- 2012-06-14 CN CN201280034128.9A patent/CN103649177A/zh active Pending
- 2012-06-14 WO PCT/US2012/042475 patent/WO2012174250A1/en not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022522034A (ja) * | 2019-04-08 | 2022-04-13 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング | ブロックコポリマーを含んでなる組成物、およびそれを用いたシリカ質膜の製造方法 |
| JP7110499B2 (ja) | 2019-04-08 | 2022-08-01 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング | ブロックコポリマーを含んでなる組成物、およびそれを用いたシリカ質膜の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2721094A1 (en) | 2014-04-23 |
| IN2014DN00072A (enExample) | 2015-05-22 |
| CN103649177A (zh) | 2014-03-19 |
| KR20140040797A (ko) | 2014-04-03 |
| US20140138577A1 (en) | 2014-05-22 |
| WO2012174250A1 (en) | 2012-12-20 |
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