JP2014522302A5 - - Google Patents

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Publication number
JP2014522302A5
JP2014522302A5 JP2014512834A JP2014512834A JP2014522302A5 JP 2014522302 A5 JP2014522302 A5 JP 2014522302A5 JP 2014512834 A JP2014512834 A JP 2014512834A JP 2014512834 A JP2014512834 A JP 2014512834A JP 2014522302 A5 JP2014522302 A5 JP 2014522302A5
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JP
Japan
Prior art keywords
target
filter
holes
mixture
reservoir
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JP2014512834A
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English (en)
Japanese (ja)
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JP6117188B2 (ja
JP2014522302A (ja
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Priority claimed from US13/112,784 external-priority patent/US9029813B2/en
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Publication of JP2014522302A5 publication Critical patent/JP2014522302A5/ja
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Publication of JP6117188B2 publication Critical patent/JP6117188B2/ja
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JP2014512834A 2011-05-20 2012-03-20 材料供給装置のためのフィルタ Active JP6117188B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/112,784 2011-05-20
US13/112,784 US9029813B2 (en) 2011-05-20 2011-05-20 Filter for material supply apparatus of an extreme ultraviolet light source
PCT/US2012/029838 WO2012161860A1 (en) 2011-05-20 2012-03-20 Filter for material supply apparatus

Publications (3)

Publication Number Publication Date
JP2014522302A JP2014522302A (ja) 2014-09-04
JP2014522302A5 true JP2014522302A5 (OSRAM) 2015-05-07
JP6117188B2 JP6117188B2 (ja) 2017-04-19

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ID=47174252

Family Applications (1)

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JP2014512834A Active JP6117188B2 (ja) 2011-05-20 2012-03-20 材料供給装置のためのフィルタ

Country Status (7)

Country Link
US (2) US9029813B2 (OSRAM)
EP (1) EP2709743A4 (OSRAM)
JP (1) JP6117188B2 (OSRAM)
KR (1) KR101899418B1 (OSRAM)
CN (1) CN103561839B (OSRAM)
TW (1) TWI587903B (OSRAM)
WO (1) WO2012161860A1 (OSRAM)

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NL2024324A (en) * 2018-12-31 2020-07-10 Asml Netherlands Bv Apparatus for controlling introduction of euv target material into an euv chamber
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JP7660572B2 (ja) * 2019-12-17 2025-04-11 エーエスエムエル ネザーランズ ビー．ブイ． 極端紫外光源用のターゲット材料タンク
JP7491737B2 (ja) * 2020-05-21 2024-05-28 ギガフォトン株式会社 ターゲット供給装置、ターゲット供給方法、及び電子デバイスの製造方法
JP2022006351A (ja) * 2020-06-24 2022-01-13 ギガフォトン株式会社 ターゲット供給装置、ターゲット供給方法、及び電子デバイスの製造方法
CN112138452A (zh) * 2020-10-14 2020-12-29 杭州师范大学钱江学院 一种中药渣药液分离器及其分离方法
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CN116264753B (zh) * 2021-12-15 2025-09-12 北京锐德康科技有限公司 用于重频激光打靶的靶片及可装卸靶盘
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