JP2014519203A5 - - Google Patents
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- Publication number
- JP2014519203A5 JP2014519203A5 JP2014511984A JP2014511984A JP2014519203A5 JP 2014519203 A5 JP2014519203 A5 JP 2014519203A5 JP 2014511984 A JP2014511984 A JP 2014511984A JP 2014511984 A JP2014511984 A JP 2014511984A JP 2014519203 A5 JP2014519203 A5 JP 2014519203A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- patterned
- protective material
- manufacturing
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 46
- 238000004519 manufacturing process Methods 0.000 claims 26
- 239000000463 material Substances 0.000 claims 24
- 230000001681 protective effect Effects 0.000 claims 22
- 238000005530 etching Methods 0.000 claims 11
- 239000000758 substrate Substances 0.000 claims 9
- 238000004590 computer program Methods 0.000 claims 3
- 238000002679 ablation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 239000011810 insulating material Substances 0.000 claims 2
- 238000000608 laser ablation Methods 0.000 claims 1
- 239000011241 protective layer Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP11167068.3 | 2011-05-23 | ||
| EP11167068 | 2011-05-23 | ||
| PCT/IB2012/052412 WO2012160475A1 (en) | 2011-05-23 | 2012-05-15 | Fabrication apparatus for fabricating a layer structure |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014519203A JP2014519203A (ja) | 2014-08-07 |
| JP2014519203A5 true JP2014519203A5 (https=) | 2015-07-02 |
| JP6009548B2 JP6009548B2 (ja) | 2016-10-19 |
Family
ID=46210330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014511984A Active JP6009548B2 (ja) | 2011-05-23 | 2012-05-15 | 層構造を製造するための製造装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9231212B2 (https=) |
| EP (1) | EP2715830B1 (https=) |
| JP (1) | JP6009548B2 (https=) |
| CN (1) | CN103548173B (https=) |
| WO (1) | WO2012160475A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150102180A (ko) | 2014-02-27 | 2015-09-07 | 삼성디스플레이 주식회사 | 레이저 빔 조사 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
| IT201900006740A1 (it) * | 2019-05-10 | 2020-11-10 | Applied Materials Inc | Procedimenti di strutturazione di substrati |
| CN110867523A (zh) * | 2019-10-30 | 2020-03-06 | 深圳市华星光电半导体显示技术有限公司 | 显示面板及其制造方法 |
| JP7402076B2 (ja) * | 2020-02-19 | 2023-12-20 | 株式会社カネカ | 薄膜デバイスの製造方法 |
| JP7467156B2 (ja) * | 2020-02-19 | 2024-04-15 | 株式会社カネカ | 薄膜デバイスの製造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0567559A (ja) * | 1991-09-10 | 1993-03-19 | Fujitsu Ltd | 微細パターンの形成方法 |
| JP4165692B2 (ja) * | 2002-08-05 | 2008-10-15 | 大日本印刷株式会社 | エレクトロルミネッセント素子の製造方法 |
| JP4289852B2 (ja) * | 2002-09-18 | 2009-07-01 | 大日本印刷株式会社 | エレクトロルミネッセント素子の製造方法 |
| US20050136622A1 (en) * | 2003-12-18 | 2005-06-23 | Mulligan Rose A. | Methods and apparatus for laser dicing |
| GB0408569D0 (en) * | 2004-04-16 | 2004-05-19 | Exitech Ltd | Method of patterning a functional material on to a substrate |
| US20060163744A1 (en) | 2005-01-14 | 2006-07-27 | Cabot Corporation | Printable electrical conductors |
| TW200640596A (en) | 2005-01-14 | 2006-12-01 | Cabot Corp | Production of metal nanoparticles |
| KR100833017B1 (ko) * | 2005-05-12 | 2008-05-27 | 주식회사 엘지화학 | 직접 패턴법을 이용한 고해상도 패턴형성방법 |
| JP2007048571A (ja) * | 2005-08-09 | 2007-02-22 | Seiko Epson Corp | 有機ｅｌ装置の製造方法、電子機器 |
| EP1916725A1 (en) * | 2006-10-27 | 2008-04-30 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | Organic light emitting diode device with multilayer seal |
| JP2007096340A (ja) * | 2006-11-27 | 2007-04-12 | Toshiba Corp | 加工方法及び半導体装置の製造方法 |
| US8420978B2 (en) * | 2007-01-18 | 2013-04-16 | The Board Of Trustees Of The University Of Illinois | High throughput, low cost dual-mode patterning method for large area substrates |
| US9472787B2 (en) * | 2011-05-23 | 2016-10-18 | Oledworks Gmbh | Fabrication apparatus for fabricating a patterned layer |
-
2012
- 2012-05-15 US US14/117,443 patent/US9231212B2/en active Active
- 2012-05-15 EP EP12726220.2A patent/EP2715830B1/en active Active
- 2012-05-15 WO PCT/IB2012/052412 patent/WO2012160475A1/en not_active Ceased
- 2012-05-15 JP JP2014511984A patent/JP6009548B2/ja active Active
- 2012-05-15 CN CN201280024681.4A patent/CN103548173B/zh active Active
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