JP2014512073A - 導電性ペースト組成物およびそれで製造される半導体デバイス - Google Patents

導電性ペースト組成物およびそれで製造される半導体デバイス Download PDF

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Publication number
JP2014512073A
JP2014512073A JP2014501293A JP2014501293A JP2014512073A JP 2014512073 A JP2014512073 A JP 2014512073A JP 2014501293 A JP2014501293 A JP 2014501293A JP 2014501293 A JP2014501293 A JP 2014501293A JP 2014512073 A JP2014512073 A JP 2014512073A
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Prior art keywords
paste composition
oxide
tellurium
lead
paste
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Pending
Application number
JP2014501293A
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English (en)
Japanese (ja)
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JP2014512073A5 (enExample
Inventor
ウォーレン ハン ケネス
リチャード ミケスカ カート
ジー．ラジェンドラン ラージ
トラルディ カーミン
ダグラス バーノーイ ポール
ワン ユエリ
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EIDP Inc
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EI Du Pont de Nemours and Co
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Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JP2014512073A publication Critical patent/JP2014512073A/ja
Publication of JP2014512073A5 publication Critical patent/JP2014512073A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0244—Powders, particles or spheres; Preforms made therefrom
    • B23K35/025—Pastes, creams, slurries
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • B23K35/268—Pb as the principal constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/36—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
    • B23K35/3601—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest with inorganic compounds as principal constituents
    • B23K35/3602—Carbonates, basic oxides or hydroxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/02—Frit compositions, i.e. in a powdered or comminuted form
    • C03C8/10—Frit compositions, i.e. in a powdered or comminuted form containing lead
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
    • C03C8/18—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions containing free metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20—Conductive material dispersed in non-conductive organic material
    • H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/128—Annealing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/52—PV systems with concentrators

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Conductive Materials (AREA)
  • Photovoltaic Devices (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
JP2014501293A 2011-03-24 2012-03-23 導電性ペースト組成物およびそれで製造される半導体デバイス Pending JP2014512073A (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201161467003P 2011-03-24 2011-03-24
US61/467,003 2011-03-24
US201161522368P 2011-08-11 2011-08-11
US61/522,368 2011-08-11
US201161549384P 2011-10-20 2011-10-20
US61/549,384 2011-10-20
PCT/US2012/030475 WO2012129554A2 (en) 2011-03-24 2012-03-23 Conductive paste composition and semiconductor devices made therewith

Publications (2)

Publication Number Publication Date
JP2014512073A true JP2014512073A (ja) 2014-05-19
JP2014512073A5 JP2014512073A5 (enExample) 2015-04-30

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JP2014501293A Pending JP2014512073A (ja) 2011-03-24 2012-03-23 導電性ペースト組成物およびそれで製造される半導体デバイス

Country Status (6)

Country Link
US (2) US8900487B2 (enExample)
EP (1) EP2689464A2 (enExample)
JP (1) JP2014512073A (enExample)
CN (1) CN103547542A (enExample)
TW (1) TW201245361A (enExample)
WO (1) WO2012129554A2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014093312A (ja) * 2012-10-31 2014-05-19 Noritake Co Ltd 太陽電池用導電性ペースト組成物
CN106415736A (zh) * 2014-06-20 2017-02-15 贺利氏贵金属北美康舍霍肯有限责任公司 用于导电糊的有机载体
JP2018182331A (ja) * 2017-04-18 2018-11-15 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーＥ．Ｉ．Ｄｕ Ｐｏｎｔ Ｄｅ Ｎｅｍｏｕｒｓ Ａｎｄ Ｃｏｍｐａｎｙ 導電性ペースト組成物およびそれによって製造される半導体デバイス
WO2024057484A1 (ja) * 2022-09-15 2024-03-21 株式会社ニコン ガラス組成物、及び標準試料ガラス

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI498308B (zh) 2010-05-04 2015-09-01 杜邦股份有限公司 含有鉛-碲-鋰-鈦-氧化物之厚膜膏及其在半導體裝置之製造中的用途
KR20130064659A (ko) * 2011-12-08 2013-06-18 제일모직주식회사 태양전지 전극용 페이스트 조성물 및 이로부터 제조된 전극
WO2013129578A1 (ja) * 2012-02-28 2013-09-06 京セラ株式会社 太陽電池の電極用導電性ペースト、太陽電池および太陽電池の製造方法
JP2015528178A (ja) * 2012-06-12 2015-09-24 ヘレウス プレシャス メタルズ ノース アメリカ コンショホーケン エルエルシー 接着促進剤を有する導電性ペースト
US8969709B2 (en) * 2012-08-30 2015-03-03 E I Du Pont De Nemours And Company Use of a conductive composition containing lead—tellurium-based oxide in the manufacture of semiconductor devices with lightly doped emitters
US9236161B2 (en) * 2012-09-06 2016-01-12 E I Du Pont De Nemours And Company Conductive paste composition and semiconductor devices made therewith
US10069021B2 (en) * 2012-10-12 2018-09-04 Heraeus Deutschland GmbH & Co. KG Electro-conductive pastes with salts with an anion consisting of halogen and oxygen in solar cell applications
TWI453087B (zh) * 2012-11-22 2014-09-21 Truan Sheng Lui 光伏鋁銲帶
KR101557536B1 (ko) * 2012-12-21 2015-10-06 제일모직주식회사 태양전지 전극용 페이스트 조성물 및 이로부터 제조된 전극
CN103915127B (zh) * 2013-01-03 2017-05-24 上海匡宇科技股份有限公司 用于表面高方阻硅基太阳能电池正面银浆及其制备方法
TWI493729B (zh) * 2013-02-08 2015-07-21 Giga Solar Materials Corp 用於太陽能電池正面電極之導電漿及其製造方法
EP2787510B1 (en) * 2013-04-02 2018-05-30 Heraeus Deutschland GmbH & Co. KG Particles comprising Al, Si and Mg in electro-conductive pastes and solar cell preparation
EP2792642B1 (de) 2013-04-15 2018-02-21 Heraeus Deutschland GmbH & Co. KG Sinterpaste mit gecoateten Silberoxid auf schwer sinterbare edlen und unedlen Oberflächen
US9799421B2 (en) 2013-06-07 2017-10-24 Heraeus Precious Metals North America Conshohocken Llc Thick print copper pastes for aluminum nitride substrates
EP2822000B1 (en) * 2013-07-03 2020-10-21 Heraeus Precious Metals North America Conshohocken LLC Thick print copper pastes for aluminium nitride substrates
KR101608123B1 (ko) * 2013-09-13 2016-03-31 제일모직주식회사 태양전지 전극　형성용 조성물 및 이로부터 제조된 전극
US9793025B2 (en) 2013-12-03 2017-10-17 E I Du Pont De Nemours And Company Conductive paste composition and semiconductor devices made therewith
KR101780531B1 (ko) * 2013-12-17 2017-09-22 삼성에스디아이 주식회사 태양전지 전극 형성용 조성물 및 이로부터 제조된 전극
JP6046753B2 (ja) 2014-01-17 2016-12-21 ヘレウス プレシャス メタルズ ノース アメリカ コンショホーケン エルエルシー 改良された接着特性を有する鉛−ビスマス−テルル−ケイ酸塩無機反応系
JP6595575B2 (ja) * 2014-07-11 2019-10-23 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 低温硬化してエレクトロニクス用途の熱伝導経路を形成する流動性組成物およびそれに関連する方法
WO2016014246A1 (en) * 2014-07-21 2016-01-28 Sun Chemical Corporation A silver paste containing organobismuth compounds and its use in solar cells
JP2018519634A (ja) * 2015-06-17 2018-07-19 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 潤滑油を含む導電性ペースト及び半導体素子
US10784383B2 (en) 2015-08-07 2020-09-22 E I Du Pont De Nemours And Company Conductive paste composition and semiconductor devices made therewith
US20170144920A1 (en) * 2015-11-20 2017-05-25 Giga Solar Materials Corp. Crystalline oxides, preparation thereof and conductive pastes containing the same
CN105858623A (zh) * 2016-03-30 2016-08-17 苏州开元民生科技股份有限公司 亚碲酸银的制备方法、晶体太阳能电池正极银浆及其制备方法
US10134925B2 (en) * 2016-04-13 2018-11-20 E I Du Pont De Nemours And Company Conductive paste composition and semiconductor devices made therewith
CN108321224A (zh) * 2017-10-30 2018-07-24 无锡帝科电子材料科技有限公司 用于制备太阳能电池电极的多元纳米材料、包括其的糊剂组合物及太阳能电池电极和电池
GB201804472D0 (en) * 2018-03-21 2018-05-02 Johnson Matthey Plc Condutive paste, method, electrode and solar cell
CN114173977B (zh) * 2019-09-10 2023-06-13 白光株式会社 钎焊装置
CN113800889B (zh) * 2021-09-10 2022-10-28 厦门海洋芯科技有限公司 一种碳赫兹膜及其应用

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JPH04270140A (ja) * 1990-06-21 1992-09-25 Johnson Matthey Inc シーリングガラス組成物および導電性成分を含む同組成物
JP2006302890A (ja) * 2005-04-14 2006-11-02 E I Du Pont De Nemours & Co 半導体デバイスの製造方法、およびそこで使用される導電性組成物

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US7771623B2 (en) 2005-06-07 2010-08-10 E.I. du Pont de Nemours and Company Dupont (UK) Limited Aluminum thick film composition(s), electrode(s), semiconductor device(s) and methods of making thereof
WO2010123967A2 (en) 2009-04-22 2010-10-28 E. I. Du Pont De Nemours And Company Glass compositions used in conductors for photovoltaic cells
TWI498308B (zh) * 2010-05-04 2015-09-01 杜邦股份有限公司 含有鉛-碲-鋰-鈦-氧化物之厚膜膏及其在半導體裝置之製造中的用途
US20130049148A1 (en) * 2011-02-22 2013-02-28 E I Du Pont De Nemours And Company Conductive paste composition and semiconductor devices made therewith
US8696948B2 (en) * 2011-08-11 2014-04-15 E I Du Pont De Nemours And Company Thick film paste containing lead—tellurium—lithium—titanium—oxide and its use in the manufacture of semiconductor devices
US8771554B2 (en) * 2011-10-20 2014-07-08 E I Du Pont De Nemours And Company Thick film silver paste containing Al2O3 and lead-tellurium—oxide and its use in the manufacture of semiconductor devices
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JPH04270140A (ja) * 1990-06-21 1992-09-25 Johnson Matthey Inc シーリングガラス組成物および導電性成分を含む同組成物
JP2006302890A (ja) * 2005-04-14 2006-11-02 E I Du Pont De Nemours & Co 半導体デバイスの製造方法、およびそこで使用される導電性組成物

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014093312A (ja) * 2012-10-31 2014-05-19 Noritake Co Ltd 太陽電池用導電性ペースト組成物
CN106415736A (zh) * 2014-06-20 2017-02-15 贺利氏贵金属北美康舍霍肯有限责任公司 用于导电糊的有机载体
JP2018182331A (ja) * 2017-04-18 2018-11-15 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーＥ．Ｉ．Ｄｕ Ｐｏｎｔ Ｄｅ Ｎｅｍｏｕｒｓ Ａｎｄ Ｃｏｍｐａｎｙ 導電性ペースト組成物およびそれによって製造される半導体デバイス
JP7098397B2 (ja) 2017-04-18 2022-07-11 ソーラー ペースト リミテッド ライアビリティ カンパニー 導電性ペースト組成物、及び導電性構造物を形成するための方法
WO2024057484A1 (ja) * 2022-09-15 2024-03-21 株式会社ニコン ガラス組成物、及び標準試料ガラス

Also Published As

Publication number Publication date
US8900487B2 (en) 2014-12-02
US20150083217A1 (en) 2015-03-26
TW201245361A (en) 2012-11-16
EP2689464A2 (en) 2014-01-29
US9640675B2 (en) 2017-05-02
WO2012129554A3 (en) 2013-02-28
US20130068290A1 (en) 2013-03-21
CN103547542A (zh) 2014-01-29
WO2012129554A2 (en) 2012-09-27

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