JP2014511849A - 安定化された酸増幅剤 - Google Patents

安定化された酸増幅剤 Download PDF

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JP2014511849A
JP2014511849A JP2014502731A JP2014502731A JP2014511849A JP 2014511849 A JP2014511849 A JP 2014511849A JP 2014502731 A JP2014502731 A JP 2014502731A JP 2014502731 A JP2014502731 A JP 2014502731A JP 2014511849 A JP2014511849 A JP 2014511849A
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JP2014511849A5 (enExample
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エル． ブレイナード，ロバート
カルディノー，ブライアン
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Research Foundation of the State University of New York
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/01—Sulfonic acids
    • C07C309/02—Sulfonic acids having sulfo groups bound to acyclic carbon atoms
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/63—Esters of sulfonic acids
    • C07C309/64—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms
    • C07C309/65—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms of a saturated carbon skeleton
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/63—Esters of sulfonic acids
    • C07C309/64—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms
    • C07C309/70—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms of a carbon skeleton substituted by carboxyl groups
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/63—Esters of sulfonic acids
    • C07C309/72—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton
    • C07C309/73—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton to carbon atoms of non-condensed six-membered aromatic rings
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D317/00—Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms
    • C07D317/08—Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms having the hetero atoms in positions 1 and 3
    • C07D317/10—Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms having the hetero atoms in positions 1 and 3 not condensed with other rings
    • C07D317/14—Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms having the hetero atoms in positions 1 and 3 not condensed with other rings with substituted hydrocarbon radicals attached to ring carbon atoms
    • C07D317/18—Radicals substituted by singly bound oxygen or sulfur atoms
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D317/00—Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms
    • C07D317/08—Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms having the hetero atoms in positions 1 and 3
    • C07D317/72—Heterocyclic compounds containing five-membered rings having two oxygen atoms as the only ring hetero atoms having the hetero atoms in positions 1 and 3 spiro-condensed with carbocyclic rings
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D319/00—Heterocyclic compounds containing six-membered rings having two oxygen atoms as the only ring hetero atoms
    • C07D319/04—1,3-Dioxanes; Hydrogenated 1,3-dioxanes
    • C07D319/06—1,3-Dioxanes; Hydrogenated 1,3-dioxanes not condensed with other rings
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D319/00—Heterocyclic compounds containing six-membered rings having two oxygen atoms as the only ring hetero atoms
    • C07D319/04—1,3-Dioxanes; Hydrogenated 1,3-dioxanes
    • C07D319/08—1,3-Dioxanes; Hydrogenated 1,3-dioxanes condensed with carbocyclic rings or ring systems
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C2601/00—Systems containing only non-condensed rings
    • C07C2601/12—Systems containing only non-condensed rings with a six-membered ring
    • C07C2601/14—The ring being saturated

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Materials For Photolithography (AREA)
  • Heterocyclic Compounds That Contain Two Or More Ring Oxygen Atoms (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Steroid Compounds (AREA)
JP2014502731A 2011-04-01 2012-03-28 安定化された酸増幅剤 Pending JP2014511849A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161470767P 2011-04-01 2011-04-01
US61/470,767 2011-04-01
US201261597883P 2012-02-13 2012-02-13
US61/597,883 2012-02-13
PCT/US2012/030850 WO2012135286A2 (en) 2011-04-01 2012-03-28 Stabilized acid amplifiers

Publications (2)

Publication Number Publication Date
JP2014511849A true JP2014511849A (ja) 2014-05-19
JP2014511849A5 JP2014511849A5 (enExample) 2015-07-30

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JP2014502731A Pending JP2014511849A (ja) 2011-04-01 2012-03-28 安定化された酸増幅剤

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US (1) US20140193752A1 (enExample)
JP (1) JP2014511849A (enExample)
KR (1) KR20140033027A (enExample)
WO (1) WO2012135286A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10031416B2 (en) 2013-08-07 2018-07-24 Toyo Gosei Co., Ltd. Reagent for enhancing generation of chemical species
JP2022129980A (ja) * 2021-02-25 2022-09-06 東京応化工業株式会社 化学増幅型ポジ型感光性組成物、感光性ドライフィルム、パターン化されたレジスト膜の製造方法、鋳型付き基板の製造方法、及びめっき造形物の製造方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5960027B2 (ja) * 2012-08-31 2016-08-02 セントラル硝子株式会社 含フッ素酸増幅剤の保存方法
WO2014208102A1 (en) * 2013-06-27 2014-12-31 Toyo Gosei Co., Ltd. Reagent for Enhancing Generation of Chemical Species
JP2016539201A (ja) * 2013-10-02 2016-12-15 東洋合成工業株式会社 化学種発生向上試剤
US20160259245A1 (en) * 2013-10-07 2016-09-08 Toyo Gosei Co., Ltd. Reagent for enhancing generation of chemical species and manufacturing apparatus
KR102324819B1 (ko) 2014-12-12 2021-11-11 삼성전자주식회사 포토레지스트용 고분자, 포토레지스트 조성물, 패턴 형성 방법 및 반도체 장치의 제조 방법
US9951164B2 (en) * 2016-08-12 2018-04-24 International Business Machines Corporation Non-ionic aryl ketone based polymeric photo-acid generators
US9983475B2 (en) * 2016-08-12 2018-05-29 International Business Machines Corporation Fluorinated sulfonate esters of aryl ketones for non-ionic photo-acid generators
US9950999B2 (en) * 2016-08-12 2018-04-24 International Business Machines Corporation Non-ionic low diffusing photo-acid generators
US10662274B2 (en) 2016-12-02 2020-05-26 Georgia Tech Research Corporation Self-immolative polymers, articles thereof, and methods of making and using same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000231194A (ja) * 1998-12-07 2000-08-22 Fuji Photo Film Co Ltd ポジ型フォトレジスト組成物
JP2002006481A (ja) * 2000-06-23 2002-01-09 Toda Kogyo Corp 有機超強酸発生剤

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6605599B1 (en) * 1997-07-08 2003-08-12 Bristol-Myers Squibb Company Epothilone derivatives
US7632833B2 (en) * 2004-07-01 2009-12-15 Merck & Co., Inc. Mitotic kinesin inhibitors

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000231194A (ja) * 1998-12-07 2000-08-22 Fuji Photo Film Co Ltd ポジ型フォトレジスト組成物
JP2002006481A (ja) * 2000-06-23 2002-01-09 Toda Kogyo Corp 有機超強酸発生剤

Non-Patent Citations (11)

* Cited by examiner, † Cited by third party
Title
JPN6016004546; Ｓｔｒｅｉｔｗｉｅｓｅｒ，　Ａｎｄｒｅｗ，　Ｊｒ．: 'Ｔｈｅ　ａｐｐｌｉｃａｔｉｏｎ　ｏｆ　Ｔａｆｔ'ｓ　ｅｑｕａｔｉｏｎ　ｔｏ　ｐｏｌａｒ　ｅｆｆｅｃｔｓ　ｉｎ　ｓｏｌｖｏｌｙｓｅｓ' Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ａｍｅｒｉｃａｎ　Ｃｈｅｍｉｃａｌ　Ｓｏｃｉｅｔｙ Ｖｏｌ．　７８, 1956, Ｐ．　４９３５-４９３８ *
JPN6016004549; Ｚｅｆｉｒｏｖ，　Ｎ．　Ｓ．；　Ｋｏｚ'ｍｉｎ，　Ａ．　Ｓ．；　Ｄａｎ'ｋｏｖ，　Ｙｕ．　Ｖ．；　Ｚｈｄａｎｋｉｎ，　Ｖ．　Ｖ．；　Ｋｉｒｉｎ，　Ｖ．　Ｎ．: 'Ｐａｒｔｉｃｉｐａｔｉｏｎ　ｏｆ　ｓｕｌｆｏｎａｔｅ　ａｎｉｏｎｓ　ｉｎ　ｔｈｅ　ｅｌｅｃｔｒｏｐｈｉｌｉｃ　ａｄｄｉｔｉｏｎ　ｏｆ　ｈａｌｏｇｅｎｓ　ｔｏ　ｏｌｅｆｉｎｓ' Ｚｈｕｒｎａｌ　Ｏｒｇａｎｉｃｈｅｓｋｏｉ　Ｋｈｉｍｉｉ Ｖｏｌ．　２０，　Ｉｓｓ．　２, 1984, Ｐ．　２３３-２４２ *
JPN6016004551; Ｚｅｆｉｒｏｖ，　Ｎ．　Ｓ．；　Ｇａｋｈ，　Ａ．　Ａ．；　Ｚｈｄａｎｋｉｎ，　Ｖ．　Ｖ．；　Ｓｔａｎｇ，　Ｐｅｔｅｒ　Ｊ．: 'Ｉｎｔｅｒａｃｔｉｏｎ　ｏｆ　ｆｌｕｏｒｏｘｅｎｏｎｉｕｍ　ｔｒｉｆｌａｔｅ，　ｆｌｕｏｒｏｓｕｌｆａｔｅ　ａｎｄ　ｎｉｔｒａｔｅ　ｗｉｔｈ　ａｌｋｅｎｅｓ．　Ｓｔｅｒｅｏｃｈｅｍｉｃａｌ　ｅｖｉｄ' Ｊｏｕｒｎａｌ　ｏｆ　Ｏｒｇａｎｉｃ　Ｃｈｅｍｉｓｔｒｙ Ｖｏｌ．　５６，　Ｉｓｓ．　４, 1991, Ｐ．　１４１６-１４１８ *
JPN6016004553; Ａｌｉｇｉａｎｎｉｓ，　Ｎｅｃｔａｒｉｏｓ；　Ｐｏｕｌｉ，　Ｎｉｃｏｌｅ；　Ｍａｒａｋｏｓ，　Ｐａｎａｇｉｏｔｉｓ；　Ｍｉｔａｋｕ，　Ｓｏｆｉａ；　Ｓｋａｌｔｓｏｕｎｉｓ，　Ａｌｅｘｉｏｓ-Ｌｅａｎｄ: 'Ｄｅｓｉｇｎ，　ｓｙｎｔｈｅｓｉｓ　ａｎｄ　ｂｉｏｌｏｇｉｃａｌ　ａｃｔｉｖｉｔｙ　ｏｆ　７-Ｏ-（４-Ｏ-ａｃｅｔｙｌ-３-ｉｏｄｏ-２，３，６-ｔｒｉｄｅｏｘｙ-alpha-Ｌ-ａｒａｂｉｎｏ-ｈｅｘｏ' Ｃｈｅｍｉｃａｌ　＆　Ｐｈａｒｍａｃｅｕｔｉｃａｌ　Ｂｕｌｌｅｔｉｎ Ｖｏｌ．　４８，　Ｎｏ．１, 2000, Ｐ．　１&#xFF *
JPN6016004555; Ｄｏｂｂｓ，　Ａｄｒｉａｎ　Ｐ．；　Ｐｉｖｎｅｖｉ，　Ｌｅｖａｎ；　Ｐｅｎｎｙ，　Ｍａｒｋ　Ｊ．；　Ｍａｒｔｉｎｏｖｉｃ，　Ｓａｓａ；　Ｉｌｅｙ，　Ｊａｍｅｓ　Ｎ．；　Ｓｔｅｐｈｅｎｓｏｎ，　Ｐｅｔｅ: 'Ｍｏｎｏｆｌｕｏｒｉｎａｔｅｄ　ｄｉ-　ａｎｄ　ｔｅｔｒａｈｙｄｒｏｐｙｒａｎｓ　ｖｉａ　Ｐｒｉｎｓ-ｔｙｐｅ　ｃｙｃｌｉｓａｔｉｏｎｓ' Ｃｈｅｍｉｃａｌ　Ｃｏｍｍｕｎｉｃａｔｉｏｎｓ　（Ｃａｍｂｒｉｄｇｅ，　Ｕｎｉｔｅｄ　Ｋｉｎｇｄｏｍ） Ｉｓｓ．　２９, 2006, Ｐ．　３１３４-３１３６ *
JPN6016004559; Ｇｅｄｙｅ，　Ｒ．；　Ｂｒｏｗｎ，　Ｒ．　Ｓ．；　Ｓｌｅｂｏｃｋａ-Ｔｉｌｋ，　Ｈ．；　Ｂｕｓｃｈｅｋ，　Ｊ．　Ｍ．；　Ｋｏｐｅｃｋｙ，　Ｋ．　Ｒ．: 'Ｔｈｅ　ｑｕｅｓｔｉｏｎ　ｏｆ　ｒｅｖｅｒｓｉｂｌｅ　ｆｏｒｍａｔｉｏｎ　ｏｆ　ｂｒｏｍｏｎｉｕｍ　ｉｏｎｓ　ｄｕｒｉｎｇ　ｔｈｅ　ｃｏｕｒｓｅ　ｏｆ　ｅｌｅｃｔｒｏｐｈｉｌｉｃ　ｂｒｏｍｉｎａｔｉｏ' Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ａｍｅｒｉｃａｎ　Ｃｈｅｍｉｃａｌ　Ｓｏｃｉｅｔｙ Ｖｏｌ．　１０６，　Ｉｓｓ．　１６, 1984, Ｐ．　４５１５-４５２１ *
JPN6016004560; Ｈｕａｎｇ，　Ｐｅｉ-ｑｉａｎｇ；　Ｓａｂｂｅ，　Ｋａｔｒｉｅｎ；　Ｐｏｔｔｉｅ，　Ｍｉｅｋｅ；　Ｖａｎｄｅｗａｌｌｅ，　Ｍａｕｒｉｔｓ: 'Ａ　ｎｏｖｅｌ　ｓｙｎｔｈｅｓｉｓ　ｏｆ　１９-ｎｏｒ-１alpha，２５-ｄｉｈｙｄｒｏｘｙｖｉｔａｍｉｎ　Ｄ３　ａｎｄ　ｒｅｌａｔｅｄ　ａｎａｌｏｇｓ' Ｔｅｔｒａｈｅｄｒｏｎ　Ｌｅｔｔｅｒｓ Ｖｏｌ．　３６，　Ｉｓｓ．　４５, 1995, Ｐ．　８２９９-８３０２ *
JPN6016004562; Ｚｅｆｉｒｏｖ， Ｎ． Ｓ．； Ｋｏｚ'ｍｉｎ， Ａ． Ｓ．； Ｓｏｒｏｋｉｎ， Ｖ． Ｄ．； Ｚｈｄａｎｋｉｎ， Ｖ． Ｖ．: 'Ｎｕｃｌｅｏｐｈｉｌｉｃ ｐｒｏｐｅｒｔｉｅｓ ｏｆ ｔｒｉｆｌｕｏｒｏｍｅｔｈａｎｅｓｕｌｆｏｎａｔｅ ａｎｉｏｎ ｉｎ ｃｏｎｊｕｇａｔｅｄ ＡｄＥ ｒｅａｃｔｉｏｎｓ． Ｓｙｎｔｈｅｓｉｓ ｏ' Ｚｈｕｒｎａｌ Ｏｒｇａｎｉｃｈｅｓｋｏｉ Ｋｈｉｍｉｉ Ｖｏｌ． １８， Ｉｓｓ． ８, 1982, Ｐ． １７６８-１７６９ *
JPN6016004564; Ｐａｒｋｅｒ，　Ｒｏｂｅｒｔ　Ｊａｍｅｓ: 'Ｔｈｅ　Ａｚａ-Ｓｉｌｙｌ-Ｐｒｉｎｓ　Ｒｅａｃｔｉｏｎ：　Ｄｅｖｅｌｏｐｍｅｎｔ　ａｎｄ　Ａｐｐｌｉｃａｔｉｏｎ　ｔｏ　ｔｈｅ　Ｔｏｔａｌ　Ｓｙｎｔｈｅｓｉｓ　ｏｆ　（＋／-）-Ｐｉｐｅｃｏｌｉｃ' Ｕｎｉｖｅｒｓｉｔｙ　ｏｆ　Ｅｘｅｔｅｒ　Ｔｈｅｓｅｓ　［ｏｎｌｉｎｅ］ , 2008, Ｐ．　２３８, Ｕｎｉｖｅｒｓｉｔｙ　ｏｆ　Ｅｘｅｔｅｒ *
JPN7016000259; Ｈｏｓｏｉ，　Ｋｅｎｊｉ；　Ｃａｒｄｉｎｅａｕ，　Ｂｒｉａｎ；　Ｅａｒｌｅｙ，　Ｗｉｌｌｉａｍ；　Ｋｒｕｇｅｒ，　Ｓｅｔｈ；　Ｍｉｙａｕｃｈｉ，　Ｋｏｉｃｈｉ；　Ｂｒａｉｎａｒｄ，　Ｒｏｂｅｒｔ: 'Ｓｙｎｔｈｅｓｉｓ　ｏｆ　ｓｔａｂｌｅ　ａｃｉｄ　ａｍｐｌｉｆｉｅｒｓ　ｔｈａｔ　ｐｒｏｄｕｃｅ　ｓｔｒｏｎｇ　ｈｉｇｈｌｙ-ｆｌｕｏｒｉｎａｔｅｄ　ｐｏｌｙｍｅｒ-ｂｏｕｎｄ　ａｃｉｄ' Ｐｒｏｃｅｅｄｉｎｇｓ　ｏｆ　ＳＰＩＥ ８３２５, 2012, ８３２５１Ｓ／１-８３２５１Ｓ／７ *
JPN7016000260; Ｋｒｕｇｅｒ，　Ｓｅｔｈ；　Ｈｏｓｏｉ，　Ｋｅｎｊｉ；　Ｃａｒｄｉｎｅａｕ，　Ｂｒｉａｎ；　Ｍｉｙａｕｃｈｉ，　Ｋｏｉｃｈｉ；　Ｂｒａｉｎａｒｄ，　Ｒｏｂｅｒｔ: 'Ｓｔａｂｌｅ，　ｆｌｕｏｒｉｎａｔｅｄ　ａｃｉｄ　ａｍｐｌｉｆｉｅｒｓ　ｆｏｒ　ｕｓｅ　ｉｎ　ＥＵＶ　ｌｉｔｈｏｇｒａｐｈｙ' Ｐｒｏｃｅｅｄｉｎｇｓ　ｏｆ　ＳＰＩＥ ８３２５, 2012, ８３２５１４／１-８３２５１４／１３ *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10031416B2 (en) 2013-08-07 2018-07-24 Toyo Gosei Co., Ltd. Reagent for enhancing generation of chemical species
JP2022129980A (ja) * 2021-02-25 2022-09-06 東京応化工業株式会社 化学増幅型ポジ型感光性組成物、感光性ドライフィルム、パターン化されたレジスト膜の製造方法、鋳型付き基板の製造方法、及びめっき造形物の製造方法

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