JP2014510933A - センサ素子を含み一体型加熱機構を備えた蒸気センサ - Google Patents

センサ素子を含み一体型加熱機構を備えた蒸気センサ Download PDF

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Publication number
JP2014510933A
JP2014510933A JP2014505186A JP2014505186A JP2014510933A JP 2014510933 A JP2014510933 A JP 2014510933A JP 2014505186 A JP2014505186 A JP 2014505186A JP 2014505186 A JP2014505186 A JP 2014505186A JP 2014510933 A JP2014510933 A JP 2014510933A
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conductive electrode
conductive
capacitance
circuit element
electrical communication
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JP2014510933A5 (enExample
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マイケル, シー. パラツォットー,
ジャスティン タンジャンヤサム,
ステファン, エイチ. グリスカ,
マイケル, エス. ウェンドランド,
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3M Innovative Properties Co
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228Circuits therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122Circuits particularly adapted therefor, e.g. linearising circuits
    • G01N27/123Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2014505186A 2011-04-13 2012-04-04 センサ素子を含み一体型加熱機構を備えた蒸気センサ Pending JP2014510933A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161475009P 2011-04-13 2011-04-13
US61/475,009 2011-04-13
PCT/US2012/032153 WO2012141958A1 (en) 2011-04-13 2012-04-04 Vapor sensor including sensor element with integral heating

Publications (2)

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JP2014510933A true JP2014510933A (ja) 2014-05-01
JP2014510933A5 JP2014510933A5 (enExample) 2015-03-12

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JP2014505186A Pending JP2014510933A (ja) 2011-04-13 2012-04-04 センサ素子を含み一体型加熱機構を備えた蒸気センサ

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US (1) US9506888B2 (enExample)
EP (1) EP2697637B1 (enExample)
JP (1) JP2014510933A (enExample)
KR (1) KR20140026469A (enExample)
CN (1) CN103477216A (enExample)
WO (1) WO2012141958A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
JP2014510933A (ja) 2011-04-13 2014-05-01 スリーエム イノベイティブ プロパティズ カンパニー センサ素子を含み一体型加熱機構を備えた蒸気センサ
JP5955379B2 (ja) 2011-04-13 2016-07-20 スリーエム イノベイティブ プロパティズ カンパニー 揮発性有機化合物の検出方法
EP2718706B1 (en) 2011-06-08 2015-03-11 3M Innovative Properties Company Humidity sensor and sensor element therefor
CN104024848B (zh) 2011-12-13 2016-01-20 3M创新有限公司 用于识别和定量测定气体介质中的未知有机化合物的方法
WO2013180936A1 (en) 2012-05-29 2013-12-05 3M Innovative Properties Company Humidity sensor and sensor element
EP2864770B1 (en) 2012-06-25 2017-09-27 3M Innovative Properties Company Sensor element, method of making, and method of using the same
US9702840B2 (en) * 2012-08-02 2017-07-11 3M Innovative Properties Company Portable electronic device and vapor sensor card
US10041920B2 (en) 2013-09-26 2018-08-07 3M Innovative Properties Company Vapor sensor suitable for detecting alcoholic residue at a skin site
EP3111202B1 (en) 2014-02-27 2021-07-14 3M Innovative Properties Company Flexible sensor patch and method of using the same
JP6576356B2 (ja) * 2014-02-27 2019-09-18 スリーエム イノベイティブ プロパティズ カンパニー サブ周囲温度蒸気センサ及びその使用方法
US9780554B2 (en) * 2015-07-31 2017-10-03 Apple Inc. Moisture sensors
GB201915639D0 (en) * 2019-10-29 2019-12-11 P E S Tech Limited A sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965246A (ja) * 1982-08-25 1984-04-13 エンドレス・ウント・ハウザ−・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング・ウント・コンパニ− 露点測定装置
JPS59206754A (ja) * 1983-05-11 1984-11-22 Matsushita Electric Ind Co Ltd 有機分子検出素子
JP2001509600A (ja) * 1997-07-11 2001-07-24 マンネスマン ファウ デー オー アクチエンゲゼルシャフト 相対大気湿度を測定する装置
JP2010540967A (ja) * 2007-10-05 2010-12-24 スリーエム イノベイティブ プロパティズ カンパニー プラズマ蒸着されたミクロ孔質層を含む有機化学センサー、並びに作製及び使用方法

Family Cites Families (94)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59153159A (ja) 1983-02-21 1984-09-01 Hitachi Ltd ガス検出装置
US5269175A (en) 1984-04-06 1993-12-14 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Sensor for investigating liquids
DE3519410A1 (de) 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Betriebsverfahren und sensor fuer gasanalyse
US4975249A (en) 1987-07-27 1990-12-04 Elliott Stanley B Optical and capacitance type, phase transition, humidity-responsive devices
JPH0599877A (ja) 1991-06-25 1993-04-23 Yamatake Honeywell Co Ltd 感湿装置
JPH06281610A (ja) 1993-01-29 1994-10-07 Nok Corp 湿度センサ、アルコ−ルセンサまたはケトンセンサ
FI96640C (fi) * 1993-08-23 1996-07-25 Vaisala Oy Menetelmä suhteellisen kosteuden mittaamiseksi, etenkin radiosondeissa
FR2718240B1 (fr) 1994-03-31 1996-06-21 Inst Nat Environnement Ind Procédé de caractérisation d'un mélange gazeux par oxydation catalytique.
CN1037041C (zh) * 1994-07-16 1998-01-14 东南大学 金属-氧化物-半导体结构电容式湿敏器件及其制造方法
US5777206A (en) 1995-06-30 1998-07-07 Zuechner; Klaus Method and measuring device for determining the water content of a gas
US6815211B1 (en) 1998-08-04 2004-11-09 Ntc Technology Oxygen monitoring methods and apparatus (I)
FI104654B (fi) 1996-12-13 2000-03-15 Vaisala Oyj Menetelmä polymeeripohjaisen kaasuanturin selektiivisyyden parantamiseksi
US6787047B1 (en) 1997-03-13 2004-09-07 Robert Bosch Gmbh Methods for manufacturing a microstructured sensor
NZ504675A (en) 1997-08-08 2003-12-19 Cyrano Sciences Inc Techniques and systems for analyte detection
US7039446B2 (en) 2001-01-26 2006-05-02 Sensys Medical, Inc. Indirect measurement of tissue analytes through tissue properties
US6579690B1 (en) 1997-12-05 2003-06-17 Therasense, Inc. Blood analyte monitoring through subcutaneous measurement
US20020131897A1 (en) 2000-09-19 2002-09-19 James Samsoondar Apparatus of handling fluids
US6627154B1 (en) 1998-04-09 2003-09-30 Cyrano Sciences Inc. Electronic techniques for analyte detection
AU4208099A (en) 1998-05-27 1999-12-13 California Institute Of Technology Method of resolving analytes in a fluid
WO2000016090A1 (en) 1998-09-11 2000-03-23 Matsushita Electric Industrial Co., Ltd. Gas identification system
JP3537136B2 (ja) 1998-09-30 2004-06-14 シグナス, インコーポレイテッド 生理的数値を予測する方法および装置
US6596236B2 (en) 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
DE19907164C2 (de) 1999-02-19 2002-10-24 Micronas Gmbh Meßeinrichtung sowie Verfahren zu deren Herstellung
AU6046700A (en) 1999-05-10 2000-11-21 California Institute Of Technology Use of spatiotemporal response behavior in sensor arrays to detect analytes in fluids
US6165347A (en) 1999-05-12 2000-12-26 Industrial Scientific Corporation Method of identifying a gas
US6320388B1 (en) 1999-06-11 2001-11-20 Rae Systems, Inc. Multiple channel photo-ionization detector for simultaneous and selective measurement of volatile organic compound
AU5887100A (en) 1999-06-29 2001-01-31 Ut-Battelle, Llc Multi-modal analysis of micromechanical structures for sensing applications
GB0002081D0 (en) 2000-01-28 2000-03-22 Univ Cambridge Tech Atmospheric content detection
WO2001069186A1 (en) 2000-03-10 2001-09-20 Cyrano Sciences, Inc. Measuring and analyzing multi-dimensional sensory information for identification purposes
US6338266B1 (en) 2000-04-05 2002-01-15 Industrial Scientific Corporation Method of identifying a gas and associated apparatus
WO2001081890A2 (en) 2000-04-22 2001-11-01 M-Biotech, Inc. Hydrogel biosensor and biosensor-based health alarm system
DE10041921A1 (de) * 2000-08-25 2002-03-21 Dornier Gmbh Stoffsensor
US6539774B1 (en) 2000-11-10 2003-04-01 Hrl Laboratories, Llc Thin film metal hydride hydrogen sensor
JP4344486B2 (ja) 2001-03-09 2009-10-14 日本碍子株式会社 ガスセンサ
US7657292B2 (en) 2001-03-16 2010-02-02 Nellcor Puritan Bennett Llc Method for evaluating extracellular water concentration in tissue
DE10213805A1 (de) 2001-03-28 2002-11-07 Denso Corp Gassensor und Verfahren zum Herstellen eines Gassensors
WO2002093150A1 (en) 2001-05-17 2002-11-21 Siemens Vdo Automotive Corporation Capacitive fuel sensor
EP1444513A2 (en) 2001-10-01 2004-08-11 Isis Innovation Limited Membrane-covered sensor for determining the concentration of oxygen and carbon dioxide
US7160690B2 (en) 2001-11-06 2007-01-09 Arete Associates Nitrate sensor
US6640626B2 (en) 2002-01-18 2003-11-04 Hitachi, Ltd. Method and system for identifying a type of gas
US20030166296A1 (en) 2002-03-01 2003-09-04 Morrison Roxane F. Chemical species analyzer
DE60337038D1 (de) 2002-03-22 2011-06-16 Animas Technologies Llc Leistungsverbesserung einer Analytenüberwachungsvorrichtung
US7200495B2 (en) 2002-04-11 2007-04-03 The Charles Stark Draper Laboratory Method and apparatus for analyzing spatial and temporal processes of interaction
US7449146B2 (en) 2002-09-30 2008-11-11 3M Innovative Properties Company Colorimetric sensor
US6917885B2 (en) 2003-06-06 2005-07-12 Steris Inc. Method and apparatus for formulating and controlling chemical concentration in a gas mixture
US7373255B2 (en) 2003-06-06 2008-05-13 Biacore Ab Method and system for determination of molecular interaction parameters
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
US8369919B2 (en) 2003-08-01 2013-02-05 Dexcom, Inc. Systems and methods for processing sensor data
CN1321477C (zh) 2003-10-28 2007-06-13 比亚迪股份有限公司 锂离子二次电池
US7217354B2 (en) 2003-08-29 2007-05-15 Ut-Battelle, Llc Method and apparatus for detection of chemical vapors
US20050148003A1 (en) 2003-11-26 2005-07-07 Steven Keith Methods of correcting a luminescence value, and methods of determining a corrected analyte concentration
US8774886B2 (en) 2006-10-04 2014-07-08 Dexcom, Inc. Analyte sensor
US7228725B2 (en) 2004-01-27 2007-06-12 H2Scan Llc Thin film gas sensor configuration
US7680607B1 (en) 2004-05-13 2010-03-16 The United States Of America As Represented By The Secretary Of The Navy System and method for gas recognition by analysis of bispectrum functions
JP2007538262A (ja) 2004-05-19 2007-12-27 アプレラ コーポレイション 質量分析を使用する発現の定量化
EP1788930A1 (en) 2004-09-03 2007-05-30 Novo Nordisk A/S A method of calibrating a system for measuring the concentration of substances in body and an apparatus for exercising the method
US20090076360A1 (en) 2007-09-13 2009-03-19 Dexcom, Inc. Transcutaneous analyte sensor
US7776269B2 (en) 2005-03-15 2010-08-17 The United States Of America As Represented By The Secretary Of The Navy Capacitive based sensing of molecular adsorbates on the surface of single wall nanotubes
EP1910991A1 (de) 2005-07-19 2008-04-16 Swiss Reinsurance Company System und verfahren zur rückgekoppelten, dynamischen überwachung von unterlegungshöhen bei risikoereignissen
GB0517869D0 (en) 2005-09-02 2005-10-12 Univ Warwick Gas-sensing semiconductor devices
GB0518458D0 (en) 2005-09-09 2005-10-19 Boc Group Plc Arc welding
US7512431B2 (en) 2005-09-13 2009-03-31 Medtronic, Inc. Normalization method for a chronically implanted optical sensor
US7933005B2 (en) 2005-11-21 2011-04-26 Nir Diagnostics Inc. Modified method and apparatus for measuring analytes
DE102005057214A1 (de) 2005-11-29 2007-06-14 Justus-Liebig-Universität Giessen Erfindung betreffend Gassensoren
US8293340B2 (en) 2005-12-21 2012-10-23 3M Innovative Properties Company Plasma deposited microporous analyte detection layer
US7556774B2 (en) 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
US20070299617A1 (en) 2006-06-27 2007-12-27 Willis John P Biofouling self-compensating biosensor
US7767143B2 (en) 2006-06-27 2010-08-03 3M Innovative Properties Company Colorimetric sensors
US8067110B2 (en) 2006-09-11 2011-11-29 3M Innovative Properties Company Organic vapor sorbent protective device with thin-film indicator
US7952692B2 (en) 2006-12-12 2011-05-31 Orsense Ltd. Method and apparatus for determination of analyte concentration
DE102006060633A1 (de) 2006-12-21 2008-06-26 Robert Bosch Gmbh Verfahren zum Betreiben eines Sensorelements und Sensorelement zur Bestimmung der Konzentration von Gaskomponenten in einem Gasgemisch
WO2008141243A2 (en) 2007-05-10 2008-11-20 Glumetrics, Inc. Device and methods for calibrating analyte sensors
US7653497B2 (en) 2007-05-15 2010-01-26 Spectrasensors, Inc. Energy flow measurement in gas pipelines
EP2158470A1 (en) 2007-06-25 2010-03-03 Qinetiq Limited Preconcentrator device incorporating a polymer of intrinsic microporosity
FI120851B (fi) 2007-06-27 2010-03-31 Valtion Teknillinen Anturi kuluneen ajan ja kosteuden osoitukseen, menetelmä sen valmistamiseksi ja sen käyttö
JP2010540966A (ja) 2007-10-05 2010-12-24 スリーエム イノベイティブ プロパティズ カンパニー ミクロ孔質ポリマーを含む有機化学センサー、及び使用方法
US20100191474A1 (en) 2007-10-23 2010-07-29 Technion Research And Development Foundation Ltd. Electronic nose device with sensors composed of nanowires of columnar discotic liquid crystals with low sensititive to humidity
US7783442B2 (en) 2007-10-31 2010-08-24 Medtronic Minimed, Inc. System and methods for calibrating physiological characteristic sensors
IL189576A0 (en) 2008-02-18 2008-12-29 Technion Res & Dev Foundation Chemically sensitive field effect transistors for explosive detection
US7816681B2 (en) 2008-12-03 2010-10-19 Electronics And Telecommunications Research Institute Capacitive gas sensor and method of fabricating the same
WO2010075333A2 (en) 2008-12-23 2010-07-01 3M Innovative Properties Company Organic chemical sensor with microporous organosilicate material
WO2010088088A2 (en) 2009-01-29 2010-08-05 3M Innovative Properties Company Monitor for optical detection of organic analytes
EP2414816A4 (en) 2009-03-30 2015-01-21 3M Innovative Properties Co OPTOELECTRONIC METHODS AND DEVICES FOR DETECTION OF ANALYTES
WO2010135413A2 (en) 2009-05-22 2010-11-25 3M Innovative Properties Company Multilayer colorimetric sensors
US9018060B2 (en) 2010-06-15 2015-04-28 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
WO2012050686A1 (en) 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
WO2012044419A1 (en) 2010-09-30 2012-04-05 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
JP2014510933A (ja) 2011-04-13 2014-05-01 スリーエム イノベイティブ プロパティズ カンパニー センサ素子を含み一体型加熱機構を備えた蒸気センサ
KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
JP5955379B2 (ja) 2011-04-13 2016-07-20 スリーエム イノベイティブ プロパティズ カンパニー 揮発性有機化合物の検出方法
KR101990015B1 (ko) 2011-04-13 2019-06-17 쓰리엠 이노베이티브 프로퍼티즈 컴파니 교정 정보를 포함하는 전자 디바이스 및 이를 이용하는 방법
EP2718706B1 (en) 2011-06-08 2015-03-11 3M Innovative Properties Company Humidity sensor and sensor element therefor
CN103620387B (zh) 2011-06-16 2017-02-15 3M创新有限公司 表面等离子体共振传感器元件和包括其的传感器
CN104024848B (zh) 2011-12-13 2016-01-20 3M创新有限公司 用于识别和定量测定气体介质中的未知有机化合物的方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965246A (ja) * 1982-08-25 1984-04-13 エンドレス・ウント・ハウザ−・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング・ウント・コンパニ− 露点測定装置
JPS59206754A (ja) * 1983-05-11 1984-11-22 Matsushita Electric Ind Co Ltd 有機分子検出素子
JP2001509600A (ja) * 1997-07-11 2001-07-24 マンネスマン ファウ デー オー アクチエンゲゼルシャフト 相対大気湿度を測定する装置
JP2010540967A (ja) * 2007-10-05 2010-12-24 スリーエム イノベイティブ プロパティズ カンパニー プラズマ蒸着されたミクロ孔質層を含む有機化学センサー、並びに作製及び使用方法

Also Published As

Publication number Publication date
WO2012141958A1 (en) 2012-10-18
US9506888B2 (en) 2016-11-29
EP2697637B1 (en) 2021-01-13
US20140028333A1 (en) 2014-01-30
KR20140026469A (ko) 2014-03-05
EP2697637A1 (en) 2014-02-19
CN103477216A (zh) 2013-12-25

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