CN103477216A - 包括具有集成加热的传感器元件的蒸气传感器 - Google Patents

包括具有集成加热的传感器元件的蒸气传感器 Download PDF

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Publication number
CN103477216A
CN103477216A CN2012800180319A CN201280018031A CN103477216A CN 103477216 A CN103477216 A CN 103477216A CN 2012800180319 A CN2012800180319 A CN 2012800180319A CN 201280018031 A CN201280018031 A CN 201280018031A CN 103477216 A CN103477216 A CN 103477216A
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conductive electrode
conductive
capacitance
circuit element
vapor
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CN2012800180319A
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Chinese (zh)
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M·C·帕拉佐托
J·藤格琼雅萨姆
S·H·格里斯卡
M·S·文德兰德
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN2012800180319A 2011-04-13 2012-04-04 包括具有集成加热的传感器元件的蒸气传感器 Pending CN103477216A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161475009P 2011-04-13 2011-04-13
US61/475,009 2011-04-13
PCT/US2012/032153 WO2012141958A1 (en) 2011-04-13 2012-04-04 Vapor sensor including sensor element with integral heating

Publications (1)

Publication Number Publication Date
CN103477216A true CN103477216A (zh) 2013-12-25

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CN2012800180319A Pending CN103477216A (zh) 2011-04-13 2012-04-04 包括具有集成加热的传感器元件的蒸气传感器

Country Status (6)

Country Link
US (1) US9506888B2 (enExample)
EP (1) EP2697637B1 (enExample)
JP (1) JP2014510933A (enExample)
KR (1) KR20140026469A (enExample)
CN (1) CN103477216A (enExample)
WO (1) WO2012141958A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106062545A (zh) * 2014-02-27 2016-10-26 3M创新有限公司 低于环境温度的蒸汽传感器和使用方法
CN114729920A (zh) * 2019-10-29 2022-07-08 P.E.S.科技有限公司 土壤中挥发性有机化合物的分析系统

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
KR101922035B1 (ko) 2011-06-08 2018-11-26 쓰리엠 이노베이티브 프로퍼티즈 컴파니 습도 센서 및 그를 위한 센서 요소
EP2791667B1 (en) 2011-12-13 2018-03-28 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
EP2856128B1 (en) 2012-05-29 2016-09-14 3M Innovative Properties Company Humidity sensor and sensor element
KR102131314B1 (ko) 2012-06-25 2020-07-07 쓰리엠 이노베이티브 프로퍼티즈 컴파니 센서 요소, 이의 제조 방법 및 사용 방법
WO2014022155A1 (en) * 2012-08-02 2014-02-06 3M Innovative Properties Company Portable electronic device and vapor sensor card
EP3048983B1 (en) 2013-09-26 2020-11-25 3M Innovative Properties Company Vapor sensor suitable for detecting alcoholic residue at a skin site
US10209213B2 (en) 2014-02-27 2019-02-19 3M Innovative Properties Company Flexible sensor patch and method of using the same
US9780554B2 (en) * 2015-07-31 2017-10-03 Apple Inc. Moisture sensors

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5296819A (en) * 1991-06-25 1994-03-22 Yamatake-Honeywell Co., Ltd. Polymer capacitative moisture sensitive device comprising heating means
CN1117196A (zh) * 1994-07-16 1996-02-21 东南大学 高性能无机薄膜型湿敏器件及其制作方法
US5511418A (en) * 1993-08-23 1996-04-30 Vaisala Oy Method for measurement of relative humidity, in particular in radiosondes, and humidity detectors that make use of the method
US6356087B1 (en) * 1997-07-11 2002-03-12 Mannesmann Vdo Ag System for determining relative air humidity
DE10041921A1 (de) * 2000-08-25 2002-03-21 Dornier Gmbh Stoffsensor
CN101815936A (zh) * 2007-10-05 2010-08-25 3M创新有限公司 包含微孔聚合物的有机化学传感器及使用方法

Family Cites Families (92)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3231534A1 (de) * 1982-08-25 1984-03-01 Endress Hauser Gmbh Co Taupunktmessgeraet
JPS59153159A (ja) 1983-02-21 1984-09-01 Hitachi Ltd ガス検出装置
JPS59206754A (ja) * 1983-05-11 1984-11-22 Matsushita Electric Ind Co Ltd 有機分子検出素子
US5269175A (en) 1984-04-06 1993-12-14 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Sensor for investigating liquids
DE3519410A1 (de) 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Betriebsverfahren und sensor fuer gasanalyse
US4975249A (en) 1987-07-27 1990-12-04 Elliott Stanley B Optical and capacitance type, phase transition, humidity-responsive devices
JPH06281610A (ja) 1993-01-29 1994-10-07 Nok Corp 湿度センサ、アルコ−ルセンサまたはケトンセンサ
FR2718240B1 (fr) 1994-03-31 1996-06-21 Inst Nat Environnement Ind Procédé de caractérisation d'un mélange gazeux par oxydation catalytique.
ATE239224T1 (de) 1995-06-30 2003-05-15 Klaus Zuechner Messeinrichtung und verfahren zur bestimmung des wassergehaltes in einem gas
US6815211B1 (en) 1998-08-04 2004-11-09 Ntc Technology Oxygen monitoring methods and apparatus (I)
FI104654B (fi) 1996-12-13 2000-03-15 Vaisala Oyj Menetelmä polymeeripohjaisen kaasuanturin selektiivisyyden parantamiseksi
US6787047B1 (en) 1997-03-13 2004-09-07 Robert Bosch Gmbh Methods for manufacturing a microstructured sensor
IL136607A (en) 1997-08-08 2005-03-20 California Inst Of Techn Techniques and systems for analyte detection
US7039446B2 (en) 2001-01-26 2006-05-02 Sensys Medical, Inc. Indirect measurement of tissue analytes through tissue properties
US6579690B1 (en) 1997-12-05 2003-06-17 Therasense, Inc. Blood analyte monitoring through subcutaneous measurement
US20020131897A1 (en) 2000-09-19 2002-09-19 James Samsoondar Apparatus of handling fluids
CA2325886C (en) 1998-04-09 2009-07-21 California Institute Of Technology Electronic techniques for analyte detection
AU4208099A (en) 1998-05-27 1999-12-13 California Institute Of Technology Method of resolving analytes in a fluid
TWI272385B (en) 1998-09-11 2007-02-01 Matsushita Electric Industrial Co Ltd Gas identification system
DK1102559T3 (da) 1998-09-30 2003-09-29 Cygnus Therapeutic Systems Fremgangsmåde og anordning til forudsigelse af fysiologiske værdier
US6596236B2 (en) 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
DE19907164C2 (de) 1999-02-19 2002-10-24 Micronas Gmbh Meßeinrichtung sowie Verfahren zu deren Herstellung
US6455319B1 (en) 1999-05-10 2002-09-24 California Institute Of Technology Use of spatiotemporal response behavior in sensor arrays to detect analytes in fluids
US6165347A (en) 1999-05-12 2000-12-26 Industrial Scientific Corporation Method of identifying a gas
US6320388B1 (en) 1999-06-11 2001-11-20 Rae Systems, Inc. Multiple channel photo-ionization detector for simultaneous and selective measurement of volatile organic compound
WO2001001121A1 (en) 1999-06-29 2001-01-04 Ut-Battelle, Llc Multi-modal analysis of micromechanical structures for sensing applications
GB0002081D0 (en) 2000-01-28 2000-03-22 Univ Cambridge Tech Atmospheric content detection
AU2001249138A1 (en) 2000-03-10 2001-09-24 Cyrano Sciences, Inc. Measuring and analyzing multi-dimensional sensory information for identificationpurposes
US6338266B1 (en) 2000-04-05 2002-01-15 Industrial Scientific Corporation Method of identifying a gas and associated apparatus
AU2001278840A1 (en) 2000-04-22 2001-11-07 M-Biotech, Inc. Hydrogel biosensor and biosensor-based health alarm system
US6539774B1 (en) 2000-11-10 2003-04-01 Hrl Laboratories, Llc Thin film metal hydride hydrogen sensor
JP4344486B2 (ja) 2001-03-09 2009-10-14 日本碍子株式会社 ガスセンサ
US7657292B2 (en) 2001-03-16 2010-02-02 Nellcor Puritan Bennett Llc Method for evaluating extracellular water concentration in tissue
DE10213805A1 (de) 2001-03-28 2002-11-07 Denso Corp Gassensor und Verfahren zum Herstellen eines Gassensors
BRPI0209825B8 (pt) 2001-05-17 2023-01-17 Siemens Vdo Automotive Corp Sensor de combustível
US20050016871A1 (en) 2001-10-01 2005-01-27 Compton Richard Guy Determining gas concentration
US7160690B2 (en) 2001-11-06 2007-01-09 Arete Associates Nitrate sensor
US6640626B2 (en) 2002-01-18 2003-11-04 Hitachi, Ltd. Method and system for identifying a type of gas
US20030166296A1 (en) 2002-03-01 2003-09-04 Morrison Roxane F. Chemical species analyzer
ES2357318T3 (es) 2002-03-22 2011-04-25 Animas Technologies Llc Mejora del rendimiento de un dispositivo monitorizador de analito.
US7200495B2 (en) 2002-04-11 2007-04-03 The Charles Stark Draper Laboratory Method and apparatus for analyzing spatial and temporal processes of interaction
US7449146B2 (en) 2002-09-30 2008-11-11 3M Innovative Properties Company Colorimetric sensor
US6917885B2 (en) 2003-06-06 2005-07-12 Steris Inc. Method and apparatus for formulating and controlling chemical concentration in a gas mixture
US7373255B2 (en) 2003-06-06 2008-05-13 Biacore Ab Method and system for determination of molecular interaction parameters
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
US20080119703A1 (en) 2006-10-04 2008-05-22 Mark Brister Analyte sensor
US8369919B2 (en) 2003-08-01 2013-02-05 Dexcom, Inc. Systems and methods for processing sensor data
CN1321477C (zh) 2003-10-28 2007-06-13 比亚迪股份有限公司 锂离子二次电池
US7217354B2 (en) 2003-08-29 2007-05-15 Ut-Battelle, Llc Method and apparatus for detection of chemical vapors
US20050148003A1 (en) 2003-11-26 2005-07-07 Steven Keith Methods of correcting a luminescence value, and methods of determining a corrected analyte concentration
DE112005000249B4 (de) 2004-01-27 2014-10-16 H2Scan Corp. Dünnschichtgassensorkonfiguration
US7680607B1 (en) 2004-05-13 2010-03-16 The United States Of America As Represented By The Secretary Of The Navy System and method for gas recognition by analysis of bispectrum functions
WO2005114700A2 (en) 2004-05-19 2005-12-01 Applera Corporation Expression quantification using mass spectrometry
US20080312859A1 (en) 2004-09-03 2008-12-18 Novo Nordisk A/S Method of Calibrating a System for Measuring the Concentration of Substances in Body and an Apparatus for Exercising the Method
US20090076360A1 (en) 2007-09-13 2009-03-19 Dexcom, Inc. Transcutaneous analyte sensor
US7776269B2 (en) 2005-03-15 2010-08-17 The United States Of America As Represented By The Secretary Of The Navy Capacitive based sensing of molecular adsorbates on the surface of single wall nanotubes
CN101228545B (zh) 2005-07-19 2016-06-01 瑞士再保险公司 用于对技术设备反馈地、动态地进行监控的系统和方法
GB0517869D0 (en) 2005-09-02 2005-10-12 Univ Warwick Gas-sensing semiconductor devices
GB0518458D0 (en) 2005-09-09 2005-10-19 Boc Group Plc Arc welding
US7512431B2 (en) 2005-09-13 2009-03-31 Medtronic, Inc. Normalization method for a chronically implanted optical sensor
WO2007056869A1 (en) 2005-11-21 2007-05-24 Nir Diagnostics Inc. Modified method and apparatus for measuring analytes
DE102005057214A1 (de) 2005-11-29 2007-06-14 Justus-Liebig-Universität Giessen Erfindung betreffend Gassensoren
US8293340B2 (en) 2005-12-21 2012-10-23 3M Innovative Properties Company Plasma deposited microporous analyte detection layer
US7556774B2 (en) 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
US20070299617A1 (en) 2006-06-27 2007-12-27 Willis John P Biofouling self-compensating biosensor
US7767143B2 (en) 2006-06-27 2010-08-03 3M Innovative Properties Company Colorimetric sensors
US8067110B2 (en) 2006-09-11 2011-11-29 3M Innovative Properties Company Organic vapor sorbent protective device with thin-film indicator
US7952692B2 (en) 2006-12-12 2011-05-31 Orsense Ltd. Method and apparatus for determination of analyte concentration
DE102006060633A1 (de) 2006-12-21 2008-06-26 Robert Bosch Gmbh Verfahren zum Betreiben eines Sensorelements und Sensorelement zur Bestimmung der Konzentration von Gaskomponenten in einem Gasgemisch
WO2008141243A2 (en) 2007-05-10 2008-11-20 Glumetrics, Inc. Device and methods for calibrating analyte sensors
US7653497B2 (en) 2007-05-15 2010-01-26 Spectrasensors, Inc. Energy flow measurement in gas pipelines
WO2009001070A1 (en) 2007-06-25 2008-12-31 Qinetiq Limited Heater suitable for use in a preconcentrator device
FI120851B (fi) 2007-06-27 2010-03-31 Valtion Teknillinen Anturi kuluneen ajan ja kosteuden osoitukseen, menetelmä sen valmistamiseksi ja sen käyttö
US8378694B2 (en) 2007-10-05 2013-02-19 3M Innovative Properties Company Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using
US20100191474A1 (en) 2007-10-23 2010-07-29 Technion Research And Development Foundation Ltd. Electronic nose device with sensors composed of nanowires of columnar discotic liquid crystals with low sensititive to humidity
US7783442B2 (en) 2007-10-31 2010-08-24 Medtronic Minimed, Inc. System and methods for calibrating physiological characteristic sensors
IL189576A0 (en) 2008-02-18 2008-12-29 Technion Res & Dev Foundation Chemically sensitive field effect transistors for explosive detection
US7816681B2 (en) 2008-12-03 2010-10-19 Electronics And Telecommunications Research Institute Capacitive gas sensor and method of fabricating the same
BRPI0918200A2 (pt) 2008-12-23 2015-12-08 3M Innovative Properties Co elemento de detecção e método de detecção de analitos químicos orgânicos
DE212010000021U1 (de) 2009-01-29 2011-10-24 3M Innovative Properties Company Überwachungsvorrichtung (Monitor) zur optischen Detektion von organischen Analyten
RU2487337C2 (ru) 2009-03-30 2013-07-10 3М Инновейтив Пропертиз Компани Способ контроля вещества в атмосфере и устройство для его осуществления
EP2433112A4 (en) 2009-05-22 2015-05-13 3M Innovative Properties Co MULTILAYER COLORIMETRIC SENSORS
CN103069269B (zh) 2010-06-15 2016-08-03 3M创新有限公司 可变电容传感器及其制造方法
CN103154712B (zh) 2010-09-30 2015-11-25 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
WO2012141894A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Electronic device including calibration information and method of using the same
CN103492872B (zh) 2011-04-13 2016-04-06 3M创新有限公司 使用吸收性传感器元件的方法
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
KR101922035B1 (ko) 2011-06-08 2018-11-26 쓰리엠 이노베이티브 프로퍼티즈 컴파니 습도 센서 및 그를 위한 센서 요소
CN103620387B (zh) 2011-06-16 2017-02-15 3M创新有限公司 表面等离子体共振传感器元件和包括其的传感器
EP2791667B1 (en) 2011-12-13 2018-03-28 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5296819A (en) * 1991-06-25 1994-03-22 Yamatake-Honeywell Co., Ltd. Polymer capacitative moisture sensitive device comprising heating means
US5511418A (en) * 1993-08-23 1996-04-30 Vaisala Oy Method for measurement of relative humidity, in particular in radiosondes, and humidity detectors that make use of the method
CN1117196A (zh) * 1994-07-16 1996-02-21 东南大学 高性能无机薄膜型湿敏器件及其制作方法
US6356087B1 (en) * 1997-07-11 2002-03-12 Mannesmann Vdo Ag System for determining relative air humidity
DE10041921A1 (de) * 2000-08-25 2002-03-21 Dornier Gmbh Stoffsensor
CN101815936A (zh) * 2007-10-05 2010-08-25 3M创新有限公司 包含微孔聚合物的有机化学传感器及使用方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106062545A (zh) * 2014-02-27 2016-10-26 3M创新有限公司 低于环境温度的蒸汽传感器和使用方法
US10161896B2 (en) 2014-02-27 2018-12-25 3M Innovative Properties Company Sub-ambient temperature vapor sensor and method of use
CN114729920A (zh) * 2019-10-29 2022-07-08 P.E.S.科技有限公司 土壤中挥发性有机化合物的分析系统

Also Published As

Publication number Publication date
JP2014510933A (ja) 2014-05-01
WO2012141958A1 (en) 2012-10-18
KR20140026469A (ko) 2014-03-05
EP2697637B1 (en) 2021-01-13
EP2697637A1 (en) 2014-02-19
US20140028333A1 (en) 2014-01-30
US9506888B2 (en) 2016-11-29

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