KR20140026469A - 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서 - Google Patents

일체형 가열을 갖는 센서 요소를 포함하는 증기 센서 Download PDF

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Publication number
KR20140026469A
KR20140026469A KR1020137029693A KR20137029693A KR20140026469A KR 20140026469 A KR20140026469 A KR 20140026469A KR 1020137029693 A KR1020137029693 A KR 1020137029693A KR 20137029693 A KR20137029693 A KR 20137029693A KR 20140026469 A KR20140026469 A KR 20140026469A
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South Korea
Prior art keywords
conductive electrode
conductive
capacitance
electrical communication
sensor
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Korean (ko)
Inventor
마이클 씨. 팔라쪼토
저스틴 퉁준야탐
스테판 에이취. 그리스카
마이클 에스. 웬드랜드
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쓰리엠 이노베이티브 프로퍼티즈 컴파니
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Publication of KR20140026469A publication Critical patent/KR20140026469A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1020137029693A 2011-04-13 2012-04-04 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서 Withdrawn KR20140026469A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161475009P 2011-04-13 2011-04-13
US61/475,009 2011-04-13
PCT/US2012/032153 WO2012141958A1 (en) 2011-04-13 2012-04-04 Vapor sensor including sensor element with integral heating

Publications (1)

Publication Number Publication Date
KR20140026469A true KR20140026469A (ko) 2014-03-05

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KR1020137029693A Withdrawn KR20140026469A (ko) 2011-04-13 2012-04-04 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서

Country Status (6)

Country Link
US (1) US9506888B2 (enExample)
EP (1) EP2697637B1 (enExample)
JP (1) JP2014510933A (enExample)
KR (1) KR20140026469A (enExample)
CN (1) CN103477216A (enExample)
WO (1) WO2012141958A1 (enExample)

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Also Published As

Publication number Publication date
JP2014510933A (ja) 2014-05-01
WO2012141958A1 (en) 2012-10-18
EP2697637B1 (en) 2021-01-13
US20140028333A1 (en) 2014-01-30
CN103477216A (zh) 2013-12-25
EP2697637A1 (en) 2014-02-19
US9506888B2 (en) 2016-11-29

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