JP2014510489A5 - - Google Patents
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- Publication number
- JP2014510489A5 JP2014510489A5 JP2014500501A JP2014500501A JP2014510489A5 JP 2014510489 A5 JP2014510489 A5 JP 2014510489A5 JP 2014500501 A JP2014500501 A JP 2014500501A JP 2014500501 A JP2014500501 A JP 2014500501A JP 2014510489 A5 JP2014510489 A5 JP 2014510489A5
- Authority
- JP
- Japan
- Prior art keywords
- array
- cmut
- cmut cells
- bulk
- cells
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161466172P | 2011-03-22 | 2011-03-22 | |
| US61/466,172 | 2011-03-22 | ||
| PCT/IB2012/051173 WO2012127360A2 (en) | 2011-03-22 | 2012-03-13 | Ultrasonic cmut with suppressed acoustic coupling to the substrate |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014510489A JP2014510489A (ja) | 2014-04-24 |
| JP2014510489A5 true JP2014510489A5 (https=) | 2015-04-16 |
| JP5961246B2 JP5961246B2 (ja) | 2016-08-02 |
Family
ID=45937471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014500501A Active JP5961246B2 (ja) | 2011-03-22 | 2012-03-13 | 基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20130331705A1 (https=) |
| EP (1) | EP2688686B1 (https=) |
| JP (1) | JP5961246B2 (https=) |
| CN (1) | CN103501922B (https=) |
| BR (1) | BR112013023981A2 (https=) |
| RU (1) | RU2589272C2 (https=) |
| WO (1) | WO2012127360A2 (https=) |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IN2014CN04975A (https=) * | 2011-12-20 | 2015-09-18 | Koninkl Philips Nv | |
| GB2513884B (en) | 2013-05-08 | 2015-06-17 | Univ Bristol | Method and apparatus for producing an acoustic field |
| DE102013223695B4 (de) * | 2013-11-20 | 2016-09-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum herstellen eines kapazitiven ultraschallwandlers und anordnung einer mehrzahl von kapazitiven ultraschallwandlern |
| KR102155695B1 (ko) | 2014-02-12 | 2020-09-21 | 삼성전자주식회사 | 전기 음향 변환기 |
| GB2530036A (en) | 2014-09-09 | 2016-03-16 | Ultrahaptics Ltd | Method and apparatus for modulating haptic feedback |
| WO2016083273A1 (en) * | 2014-11-25 | 2016-06-02 | Koninklijke Philips N.V. | Ultrasound system and method |
| SG11201706527QA (en) | 2015-02-20 | 2017-09-28 | Ultrahaptics Ip Ltd | Algorithm improvements in a haptic system |
| WO2016132144A1 (en) | 2015-02-20 | 2016-08-25 | Ultrahaptics Ip Limited | Perceptions in a haptic system |
| JP6925286B2 (ja) * | 2015-06-30 | 2021-08-25 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | 超音波システム及び超音波パルス送信方法 |
| WO2017001965A1 (en) | 2015-07-02 | 2017-01-05 | Koninklijke Philips N.V. | Multi-mode capacitive micromachined ultrasound transducer and associated devices, systems, and methods |
| DE102015212683A1 (de) * | 2015-07-07 | 2017-01-12 | Robert Bosch Gmbh | Schallwandler und Einbauanordnung mit einem Schallwandler |
| US10818162B2 (en) | 2015-07-16 | 2020-10-27 | Ultrahaptics Ip Ltd | Calibration techniques in haptic systems |
| US9751108B2 (en) | 2015-07-31 | 2017-09-05 | Texas Instruments Incorporated | Extended range ultrasound transducer |
| US10795042B2 (en) | 2015-11-24 | 2020-10-06 | Halliburton Energy Services, Inc. | Ultrasonic transducer with suppressed lateral mode |
| TWI721183B (zh) | 2016-06-20 | 2021-03-11 | 美商蝴蝶網路公司 | 用於微製造超音波傳感器的電接點配置 |
| US10268275B2 (en) | 2016-08-03 | 2019-04-23 | Ultrahaptics Ip Ltd | Three-dimensional perceptions in haptic systems |
| WO2018095833A1 (en) * | 2016-11-22 | 2018-05-31 | Koninklijke Philips N.V. | Ultrasound device and acoustic component for use in such a device |
| US11039814B2 (en) | 2016-12-04 | 2021-06-22 | Exo Imaging, Inc. | Imaging devices having piezoelectric transducers |
| US10943578B2 (en) | 2016-12-13 | 2021-03-09 | Ultrahaptics Ip Ltd | Driving techniques for phased-array systems |
| EP3459646A1 (en) * | 2017-09-22 | 2019-03-27 | Koninklijke Philips N.V. | Ultrasound transducer device and method for controlling the same |
| US11531395B2 (en) | 2017-11-26 | 2022-12-20 | Ultrahaptics Ip Ltd | Haptic effects from focused acoustic fields |
| EP3729418B1 (en) | 2017-12-22 | 2024-11-20 | Ultrahaptics Ip Ltd | Minimizing unwanted responses in haptic systems |
| EP3729417B1 (en) | 2017-12-22 | 2025-09-10 | Ultrahaptics Ip Ltd | Tracking in haptic systems |
| US10966683B2 (en) * | 2018-03-22 | 2021-04-06 | Exo Imaging Inc. | Integrated ultrasonic transducers |
| US10648852B2 (en) | 2018-04-11 | 2020-05-12 | Exo Imaging Inc. | Imaging devices having piezoelectric transceivers |
| US10656007B2 (en) | 2018-04-11 | 2020-05-19 | Exo Imaging Inc. | Asymmetrical ultrasound transducer array |
| SG11202010752VA (en) | 2018-05-02 | 2020-11-27 | Ultrahaptics Ip Ltd | Blocking plate structure for improved acoustic transmission efficiency |
| WO2019226547A1 (en) | 2018-05-21 | 2019-11-28 | Exo Imaging, Inc. | Ultrasonic transducers with q spoiling |
| JP7515182B2 (ja) | 2018-08-01 | 2024-07-12 | エコー イメージング，インク． | ハイブリッド端子を備えた超音波トランスデューサの統合のためのシステムおよび方法 |
| US11098951B2 (en) | 2018-09-09 | 2021-08-24 | Ultrahaptics Ip Ltd | Ultrasonic-assisted liquid manipulation |
| US12373033B2 (en) | 2019-01-04 | 2025-07-29 | Ultrahaptics Ip Ltd | Mid-air haptic textures |
| EP3906462B1 (en) | 2019-01-04 | 2025-06-18 | Ultrahaptics IP Ltd | Mid-air haptic textures |
| US11842517B2 (en) | 2019-04-12 | 2023-12-12 | Ultrahaptics Ip Ltd | Using iterative 3D-model fitting for domain adaptation of a hand-pose-estimation neural network |
| WO2021050853A1 (en) | 2019-09-12 | 2021-03-18 | Exo Imaging, Inc. | Increased mut coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries |
| CA3154040A1 (en) | 2019-10-13 | 2021-04-22 | Benjamin John Oliver LONG | Dynamic capping with virtual microphones |
| US11374586B2 (en) | 2019-10-13 | 2022-06-28 | Ultraleap Limited | Reducing harmonic distortion by dithering |
| US11715453B2 (en) | 2019-12-25 | 2023-08-01 | Ultraleap Limited | Acoustic transducer structures |
| US11816267B2 (en) | 2020-06-23 | 2023-11-14 | Ultraleap Limited | Features of airborne ultrasonic fields |
| WO2022058738A1 (en) | 2020-09-17 | 2022-03-24 | Ultraleap Limited | Ultrahapticons |
| CN115968272A (zh) * | 2021-03-29 | 2023-04-14 | 艾科索成像公司 | 用于减少mut阵列中的串扰的沟槽 |
| US11951512B2 (en) | 2021-03-31 | 2024-04-09 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
| US11819881B2 (en) | 2021-03-31 | 2023-11-21 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
| US20220393095A1 (en) * | 2021-06-02 | 2022-12-08 | Ultraleap Limited | Electromechanical Transducer Mount |
| US12486159B2 (en) | 2021-06-30 | 2025-12-02 | Exo Imaging, Inc. | Micro-machined ultrasound transducers with insulation layer and methods of manufacture |
| US12517585B2 (en) | 2021-07-15 | 2026-01-06 | Ultraleap Limited | Control point manipulation techniques in haptic systems |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2117415C1 (ru) * | 1994-05-31 | 1998-08-10 | Шанаурин Александр Михайлович | Электростатический конденсаторный преобразователь |
| US6262946B1 (en) | 1999-09-29 | 2001-07-17 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling |
| US6443901B1 (en) | 2000-06-15 | 2002-09-03 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers |
| US6862254B2 (en) | 2000-10-19 | 2005-03-01 | Sensant Corporation | Microfabricated ultrasonic transducer with suppressed substrate modes |
| US6669644B2 (en) | 2001-07-31 | 2003-12-30 | Koninklijke Philips Electronics N.V. | Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy |
| US6831394B2 (en) | 2002-12-11 | 2004-12-14 | General Electric Company | Backing material for micromachined ultrasonic transducer devices |
| US20040190377A1 (en) * | 2003-03-06 | 2004-09-30 | Lewandowski Robert Stephen | Method and means for isolating elements of a sensor array |
| US7303530B2 (en) * | 2003-05-22 | 2007-12-04 | Siemens Medical Solutions Usa, Inc. | Transducer arrays with an integrated sensor and methods of use |
| US7030536B2 (en) * | 2003-12-29 | 2006-04-18 | General Electric Company | Micromachined ultrasonic transducer cells having compliant support structure |
| US7545075B2 (en) | 2004-06-04 | 2009-06-09 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same |
| US7888709B2 (en) * | 2004-09-15 | 2011-02-15 | Sonetics Ultrasound, Inc. | Capacitive micromachined ultrasonic transducer and manufacturing method |
| EP1890606A1 (en) * | 2005-04-25 | 2008-02-27 | Koninklijke Philips Electronics N.V. | Method and apparatus for continuous imaging by ultrasound transducer system |
| WO2006123300A2 (en) * | 2005-05-18 | 2006-11-23 | Kolo Technologies, Inc. | Micro-electro-mechanical transducers |
| CN101558552B (zh) * | 2005-06-17 | 2017-05-31 | 科隆科技公司 | 具有绝缘延伸部的微机电换能器 |
| JP4724505B2 (ja) * | 2005-09-09 | 2011-07-13 | 株式会社日立製作所 | 超音波探触子およびその製造方法 |
| US7741686B2 (en) * | 2006-07-20 | 2010-06-22 | The Board Of Trustees Of The Leland Stanford Junior University | Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame |
| JP5175853B2 (ja) * | 2006-09-25 | 2013-04-03 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | フリップチップ相互接続貫通チップビア |
| US7843022B2 (en) * | 2007-10-18 | 2010-11-30 | The Board Of Trustees Of The Leland Stanford Junior University | High-temperature electrostatic transducers and fabrication method |
| US8207652B2 (en) * | 2009-06-16 | 2012-06-26 | General Electric Company | Ultrasound transducer with improved acoustic performance |
| JP5578810B2 (ja) * | 2009-06-19 | 2014-08-27 | キヤノン株式会社 | 静電容量型の電気機械変換装置 |
| KR20110002630A (ko) * | 2009-07-02 | 2011-01-10 | 삼성전자주식회사 | 휴대 단말기의 카메라 운용 방법 및 장치 |
| JP5495918B2 (ja) * | 2009-07-24 | 2014-05-21 | キヤノン株式会社 | 電気機械変換装置、及び電気機械変換装置の作製方法 |
| US8455289B1 (en) * | 2011-12-02 | 2013-06-04 | Texas Instruments Incorporated | Low frequency CMUT with thick oxide |
-
2012
- 2012-03-13 US US14/000,891 patent/US20130331705A1/en not_active Abandoned
- 2012-03-13 BR BR112013023981A patent/BR112013023981A2/pt not_active Application Discontinuation
- 2012-03-13 JP JP2014500501A patent/JP5961246B2/ja active Active
- 2012-03-13 CN CN201280014348.5A patent/CN103501922B/zh active Active
- 2012-03-13 EP EP12713338.7A patent/EP2688686B1/en active Active
- 2012-03-13 RU RU2013146954/28A patent/RU2589272C2/ru not_active IP Right Cessation
- 2012-03-13 WO PCT/IB2012/051173 patent/WO2012127360A2/en not_active Ceased
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