JP2014207310A - 太陽電池セル - Google Patents
太陽電池セル Download PDFInfo
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- JP2014207310A JP2014207310A JP2013083757A JP2013083757A JP2014207310A JP 2014207310 A JP2014207310 A JP 2014207310A JP 2013083757 A JP2013083757 A JP 2013083757A JP 2013083757 A JP2013083757 A JP 2013083757A JP 2014207310 A JP2014207310 A JP 2014207310A
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- 238000010248 power generation Methods 0.000 claims abstract description 41
- 239000004065 semiconductor Substances 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 239000013078 crystal Substances 0.000 claims abstract description 5
- 238000009792 diffusion process Methods 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 7
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 92
- 230000007423 decrease Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910004541 SiN Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0475—PV cell arrays made by cells in a planar, e.g. repetitive, configuration on a single semiconductor substrate; PV cell microarrays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/035281—Shape of the body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
本発明の第1の実施形態に係る裏面電極型太陽電池セル10の構造を、図1及び2を参照して説明する。図1は、例えばSiのn型単結晶半導体基板で構成される発電層1に対して、正孔収集層として機能するp+拡散層2、電子収集層として機能するn+拡散層3を複数対形成し、それぞれの拡散層2、3に対して正電極4または負電極5を設けた太陽電池セルの断面図を示している。このような状態の太陽電池セルにおいて、従来は分割線6に沿って太陽電池セルを物理的に切断して、面積が等しい複数の小型セルを形成し、これらを配線によって直列に接続して高電圧出力を提供する太陽電池パネルを形成していた。
図2に示す本発明の第1の実施形態に係る太陽電池セルでは、隣接する領域1a、1a(或いは1b、1b)間が溝7によって分離されているが、溝7の底と発電層1の受光面との間で非分割領域が残り、電気的に接続されている。そのため、わずかではあるがこの非分割領域を通してキャリアが隣接の領域間を移動する。本発明の隣接する領域1a、1aは直列に接続されているため、電流(キャリア)のバランスが各領域で一定でないと、各領域の中で一番小さな電流の影響を受け、結果として全体の発電量が低下する。第2の実施形態に係る太陽電池セルは、この点を考慮してなされたもので、隣接領域間のキャリア移動を制限する機構を設けたことを特徴とする。
図8は、本発明の第3の実施形態に係る太陽電池セル40の断面図である。本実施形態の太陽電池セル40は、例えば図5に示す太陽電池セル30に対して、溝7の表面に絶縁膜7aを形成したことを特徴としている。絶縁膜7aは、例えばボロンまたはリンを含有したガラス、SiO2、SiNx、樹脂等を材料としている。
2 p+拡散層
3 n+拡散層
4 正電極
5 負電極
7 溝
7a 絶縁膜
8 配線層
10 太陽電池セル
12 高濃度ドープ層
Claims (7)
- 発電層を形成するp型またはn型の単結晶半導体基板と、
前記半導体基板の受光面と対向する裏面に接して前記半導体基板内に設けられた複数の正孔収集層、電子収集層及び溝と、
隣接する前記溝の間に前記正孔収集層と前記電子収集層が設けられ、かつ、前記溝を挟んで前記正孔収集層と前記電子収集層が設けられており、
前記溝を挟む前記正孔収集層及び前記電子収集層とを接続する配線層とを備え、
前記溝は、前記裏面側から前記半導体基板内に向かって形成されている、太陽電池セル。 - 請求項1に記載の太陽電池セルにおいて、前記半導体基板の受光面と前記溝の底との間に前記発電層の導電型に応じて、ドープ濃度が所定以上である高濃度ドープ層が形成されている、太陽電池セル。
- 請求項1に記載の太陽電池セルにおいて、前記半導体基板の受光面と前記溝の底との間に前記発電層のキャリア濃度より低いキャリア濃度である低キャリア濃度層が形成されている、太陽電池セル。
- 請求項1に記載の太陽電池セルにおいて、前記半導体基板の受光面側には、前記隣接する溝間で導電型の異なる拡散層が形成されている、太陽電池セル。
- 請求項1に記載の太陽電池セルにおいて、前記溝の表面には絶縁膜が形成されている、太陽電池セル。
- 請求項1に記載の太陽電池セルにおいて、前記溝は、前記半導体基板の厚さの4分の3以下の深さに形成される、太陽電池セル。
- 請求項1に記載の太陽電池セルにおいて、前記半導体基板は、Si,Ge,C,SiGe,SiCを材料として形成される、太陽電池セル。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013083757A JP5708695B2 (ja) | 2013-04-12 | 2013-04-12 | 太陽電池セル |
US14/243,678 US20140305504A1 (en) | 2013-04-12 | 2014-04-02 | Solar cell |
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JP2013083757A JP5708695B2 (ja) | 2013-04-12 | 2013-04-12 | 太陽電池セル |
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JP2014207310A true JP2014207310A (ja) | 2014-10-30 |
JP5708695B2 JP5708695B2 (ja) | 2015-04-30 |
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JP2013083757A Active JP5708695B2 (ja) | 2013-04-12 | 2013-04-12 | 太陽電池セル |
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US (1) | US20140305504A1 (ja) |
JP (1) | JP5708695B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018056091A1 (ja) * | 2016-09-26 | 2018-03-29 | シャープ株式会社 | 光起電力装置、移動体および光起電力装置の製造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6366914B2 (ja) * | 2013-09-24 | 2018-08-01 | 株式会社東芝 | 多接合型太陽電池 |
TWI538230B (zh) * | 2015-03-23 | 2016-06-11 | 茂迪股份有限公司 | 背接觸太陽能電池組及其製造方法 |
GB202004533D0 (en) * | 2020-03-27 | 2020-05-13 | Power Roll Ltd | A two-terminal device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05304282A (ja) * | 1991-07-25 | 1993-11-16 | Nec Corp | 集積回路装置 |
JP2008066316A (ja) * | 2004-12-27 | 2008-03-21 | Naoetsu Electronics Co Ltd | 裏面接合型太陽電池及びその製造方法 |
JP2008211161A (ja) * | 2007-01-30 | 2008-09-11 | Zeo System:Kk | ワンチップ高電圧光電池 |
JP2010504003A (ja) * | 2006-06-21 | 2010-02-04 | クゥアルコム・インコーポレイテッド | 干渉情報を測定、通信、および/または使用する方法および装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4352948A (en) * | 1979-09-07 | 1982-10-05 | Massachusetts Institute Of Technology | High-intensity solid-state solar-cell device |
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2013
- 2013-04-12 JP JP2013083757A patent/JP5708695B2/ja active Active
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2014
- 2014-04-02 US US14/243,678 patent/US20140305504A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05304282A (ja) * | 1991-07-25 | 1993-11-16 | Nec Corp | 集積回路装置 |
JP2008066316A (ja) * | 2004-12-27 | 2008-03-21 | Naoetsu Electronics Co Ltd | 裏面接合型太陽電池及びその製造方法 |
JP2010504003A (ja) * | 2006-06-21 | 2010-02-04 | クゥアルコム・インコーポレイテッド | 干渉情報を測定、通信、および/または使用する方法および装置 |
JP2008211161A (ja) * | 2007-01-30 | 2008-09-11 | Zeo System:Kk | ワンチップ高電圧光電池 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018056091A1 (ja) * | 2016-09-26 | 2018-03-29 | シャープ株式会社 | 光起電力装置、移動体および光起電力装置の製造方法 |
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