JP2014170926A5 - - Google Patents
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- Publication number
- JP2014170926A5 JP2014170926A5 JP2014014570A JP2014014570A JP2014170926A5 JP 2014170926 A5 JP2014170926 A5 JP 2014170926A5 JP 2014014570 A JP2014014570 A JP 2014014570A JP 2014014570 A JP2014014570 A JP 2014014570A JP 2014170926 A5 JP2014170926 A5 JP 2014170926A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- piezoelectric
- vibrating body
- substrate
- ceramic layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000919 ceramic Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims 3
- 239000005751 Copper oxide Substances 0.000 claims 3
- 229910000431 copper oxide Inorganic materials 0.000 claims 3
- 238000010304 firing Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 229910052810 boron oxide Inorganic materials 0.000 claims 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 claims 1
- 239000007772 electrode material Substances 0.000 claims 1
- 239000000156 glass melt Substances 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 239000000843 powder Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014014570A JP2014170926A (ja) | 2013-02-08 | 2014-01-29 | 振動体、その製造方法、及び振動型駆動装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013023670 | 2013-02-08 | ||
| JP2013023670 | 2013-02-08 | ||
| JP2014014570A JP2014170926A (ja) | 2013-02-08 | 2014-01-29 | 振動体、その製造方法、及び振動型駆動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014170926A JP2014170926A (ja) | 2014-09-18 |
| JP2014170926A5 true JP2014170926A5 (enExample) | 2017-03-02 |
Family
ID=51297014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014014570A Pending JP2014170926A (ja) | 2013-02-08 | 2014-01-29 | 振動体、その製造方法、及び振動型駆動装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9837938B2 (enExample) |
| JP (1) | JP2014170926A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| HUE061708T2 (hu) * | 2020-11-07 | 2023-08-28 | Contemporary Amperex Technology Co Ltd | Energiafejlesztõ készülék, felfüggesztés, jármû, valamint eszköz és eljárás energiafejlesztõ készülék elõállítására |
| CN113242499A (zh) * | 2021-06-18 | 2021-08-10 | 江苏波速传感器有限公司 | 一种超薄双晶多层压电陶瓷扬声器单元 |
| WO2023286758A1 (ja) * | 2021-07-14 | 2023-01-19 | 京セラ株式会社 | 接合体 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2842448B2 (ja) | 1989-07-11 | 1999-01-06 | 日本碍子株式会社 | 圧電／電歪膜型アクチュエータ |
| JP2723710B2 (ja) * | 1991-08-29 | 1998-03-09 | 日本電気株式会社 | 多層ガラスセラミック基板及びその製造方法 |
| JP2001063048A (ja) * | 1999-08-26 | 2001-03-13 | Kyocera Corp | 圧電／電歪膜型アクチュエータ及びこれを用いたインクジェットプリンタヘッド |
| JP2003008092A (ja) * | 2001-06-20 | 2003-01-10 | Mutsuo Munekata | 積層型圧電素子とその製造方法ならびに積層型圧電素子用封止材料 |
| JP2004200382A (ja) | 2002-12-18 | 2004-07-15 | Ngk Insulators Ltd | 圧電／電歪膜型素子 |
| JP2004304887A (ja) | 2003-03-28 | 2004-10-28 | Canon Inc | 振動型駆動装置 |
| CA2561615A1 (en) * | 2005-10-04 | 2007-04-04 | Tdk Corporation | Piezoelectric ceramic composition and laminated piezoelectric element |
| JP5067541B2 (ja) * | 2007-03-30 | 2012-11-07 | Ｔｄｋ株式会社 | 誘電体磁器組成物、複合電子部品および積層セラミックコンデンサ |
| JP2009124791A (ja) | 2007-11-12 | 2009-06-04 | Canon Inc | 振動体及び振動波アクチュエータ |
| JP5669452B2 (ja) * | 2009-07-28 | 2015-02-12 | キヤノン株式会社 | 振動体の製造方法 |
| JP5597368B2 (ja) | 2009-07-29 | 2014-10-01 | 京セラ株式会社 | 積層型電子部品およびその製法 |
| JP5717975B2 (ja) * | 2010-03-31 | 2015-05-13 | キヤノン株式会社 | 振動体及び振動波アクチュエータ |
| JP5669443B2 (ja) * | 2010-05-31 | 2015-02-12 | キヤノン株式会社 | 振動体とその製造方法及び振動波アクチュエータ |
| JP2012015758A (ja) | 2010-06-30 | 2012-01-19 | Nec Casio Mobile Communications Ltd | 発振装置、その製造方法、電子機器 |
| JP5588771B2 (ja) | 2010-07-16 | 2014-09-10 | Ｆｄｋ株式会社 | 圧電材料、および圧電材料の製造方法 |
| JP5665522B2 (ja) | 2010-12-20 | 2015-02-04 | キヤノン株式会社 | 振動体及び振動型駆動装置 |
| JP5786224B2 (ja) * | 2011-03-10 | 2015-09-30 | キヤノン株式会社 | 圧電素子、圧電素子を有する圧電アクチュエータおよび振動波モータ |
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2014
- 2014-01-29 JP JP2014014570A patent/JP2014170926A/ja active Pending
- 2014-02-07 US US14/175,448 patent/US9837938B2/en active Active