JP2014132667A5 - - Google Patents

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Publication number
JP2014132667A5
JP2014132667A5 JP2014018884A JP2014018884A JP2014132667A5 JP 2014132667 A5 JP2014132667 A5 JP 2014132667A5 JP 2014018884 A JP2014018884 A JP 2014018884A JP 2014018884 A JP2014018884 A JP 2014018884A JP 2014132667 A5 JP2014132667 A5 JP 2014132667A5
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Japan
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substrate
holding
unit
detection
detected
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JP2014018884A
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Japanese (ja)
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JP5733437B2 (ja
JP2014132667A (ja
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JP2014018884A 2010-08-20 2014-02-03 基板搬送装置、基板搬送方法及び記録媒体 Active JP5733437B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014018884A JP5733437B2 (ja) 2010-08-20 2014-02-03 基板搬送装置、基板搬送方法及び記録媒体

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010185068 2010-08-20
JP2010185068 2010-08-20
JP2014018884A JP5733437B2 (ja) 2010-08-20 2014-02-03 基板搬送装置、基板搬送方法及び記録媒体

Related Parent Applications (1)

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JP2011037159A Division JP5614326B2 (ja) 2010-08-20 2011-02-23 基板搬送装置、基板搬送方法及びその基板搬送方法を実行させるためのプログラムを記録した記録媒体

Publications (3)

Publication Number Publication Date
JP2014132667A JP2014132667A (ja) 2014-07-17
JP2014132667A5 true JP2014132667A5 (enExample) 2014-09-04
JP5733437B2 JP5733437B2 (ja) 2015-06-10

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JP2014018884A Active JP5733437B2 (ja) 2010-08-20 2014-02-03 基板搬送装置、基板搬送方法及び記録媒体

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JP (1) JP5733437B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM531888U (zh) * 2014-11-07 2016-11-11 應用材料股份有限公司 機器人及具有其之處理系統
US10279485B2 (en) * 2014-12-22 2019-05-07 Kawasaki Jukogyo Kabushiki Kaisha Robot system and method of detecting deformation of end effector
JP6858041B2 (ja) * 2017-03-16 2021-04-14 川崎重工業株式会社 基板搬送装置
US10790237B2 (en) * 2018-09-14 2020-09-29 Lam Research Corporation Fiducial-filtering automatic wafer centering process and associated system
KR102624577B1 (ko) * 2020-10-28 2024-01-15 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0864654A (ja) * 1994-08-22 1996-03-08 Dainippon Screen Mfg Co Ltd 基板搬送装置及び基板搬送方法
JP3200326B2 (ja) * 1995-04-24 2001-08-20 東京応化工業株式会社 円板状被処理物の移載方法及び移載装置
JP3938247B2 (ja) * 1998-04-16 2007-06-27 大日本スクリーン製造株式会社 基板処理装置
JP2009071008A (ja) * 2007-09-13 2009-04-02 Sokudo:Kk 基板処理装置

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