JP5733437B2 - 基板搬送装置、基板搬送方法及び記録媒体 - Google Patents

基板搬送装置、基板搬送方法及び記録媒体 Download PDF

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JP5733437B2
JP5733437B2 JP2014018884A JP2014018884A JP5733437B2 JP 5733437 B2 JP5733437 B2 JP 5733437B2 JP 2014018884 A JP2014018884 A JP 2014018884A JP 2014018884 A JP2014018884 A JP 2014018884A JP 5733437 B2 JP5733437 B2 JP 5733437B2
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JP2014132667A (ja
JP2014132667A5 (enExample
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徳太郎 林
徳太郎 林
坂口　公也
公也 坂口
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Tokyo Electron Ltd
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JP2014018884A 2010-08-20 2014-02-03 基板搬送装置、基板搬送方法及び記録媒体 Active JP5733437B2 (ja)

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JP2014018884A JP5733437B2 (ja) 2010-08-20 2014-02-03 基板搬送装置、基板搬送方法及び記録媒体

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Families Citing this family (5)

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TWM531888U (zh) * 2014-11-07 2016-11-11 應用材料股份有限公司 機器人及具有其之處理系統
US10279485B2 (en) * 2014-12-22 2019-05-07 Kawasaki Jukogyo Kabushiki Kaisha Robot system and method of detecting deformation of end effector
JP6858041B2 (ja) * 2017-03-16 2021-04-14 川崎重工業株式会社 基板搬送装置
US10790237B2 (en) * 2018-09-14 2020-09-29 Lam Research Corporation Fiducial-filtering automatic wafer centering process and associated system
KR102624577B1 (ko) * 2020-10-28 2024-01-15 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

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JPH0864654A (ja) * 1994-08-22 1996-03-08 Dainippon Screen Mfg Co Ltd 基板搬送装置及び基板搬送方法
JP3200326B2 (ja) * 1995-04-24 2001-08-20 東京応化工業株式会社 円板状被処理物の移載方法及び移載装置
JP3938247B2 (ja) * 1998-04-16 2007-06-27 大日本スクリーン製造株式会社 基板処理装置
JP2009071008A (ja) * 2007-09-13 2009-04-02 Sokudo:Kk 基板処理装置

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