JP2014130059A5 - - Google Patents

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Publication number
JP2014130059A5
JP2014130059A5 JP2012287555A JP2012287555A JP2014130059A5 JP 2014130059 A5 JP2014130059 A5 JP 2014130059A5 JP 2012287555 A JP2012287555 A JP 2012287555A JP 2012287555 A JP2012287555 A JP 2012287555A JP 2014130059 A5 JP2014130059 A5 JP 2014130059A5
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JP
Japan
Prior art keywords
dimensional shape
contact
probe
shape measuring
measured
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JP2012287555A
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English (en)
Japanese (ja)
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JP6198393B2 (ja
JP2014130059A (ja
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Priority to JP2012287555A priority Critical patent/JP6198393B2/ja
Priority claimed from JP2012287555A external-priority patent/JP6198393B2/ja
Publication of JP2014130059A publication Critical patent/JP2014130059A/ja
Publication of JP2014130059A5 publication Critical patent/JP2014130059A5/ja
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JP2012287555A 2012-12-28 2012-12-28 接触式三次元形状測定装置及びプローブ制御方法 Expired - Fee Related JP6198393B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012287555A JP6198393B2 (ja) 2012-12-28 2012-12-28 接触式三次元形状測定装置及びプローブ制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012287555A JP6198393B2 (ja) 2012-12-28 2012-12-28 接触式三次元形状測定装置及びプローブ制御方法

Publications (3)

Publication Number Publication Date
JP2014130059A JP2014130059A (ja) 2014-07-10
JP2014130059A5 true JP2014130059A5 (enExample) 2016-02-18
JP6198393B2 JP6198393B2 (ja) 2017-09-20

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Family Applications (1)

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JP2012287555A Expired - Fee Related JP6198393B2 (ja) 2012-12-28 2012-12-28 接触式三次元形状測定装置及びプローブ制御方法

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JP (1) JP6198393B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6446298B2 (ja) * 2015-03-10 2018-12-26 Ntn株式会社 振動測定装置
CN108775373B (zh) * 2018-06-13 2019-12-10 南京埃斯顿自动化股份有限公司 一种伺服电机与负载多级传动系统的振动抑制方法
JP7246827B2 (ja) * 2018-12-27 2023-03-28 株式会社ディスコ 自己診断機能を備える加工装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003294434A (ja) * 2002-03-29 2003-10-15 Ricoh Co Ltd 接触式プローブ
JP4622683B2 (ja) * 2005-06-01 2011-02-02 株式会社ジェイテクト 加工機
JP2007304037A (ja) * 2006-05-15 2007-11-22 Olympus Corp 形状測定装置

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