JP2014107363A5 - - Google Patents

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Publication number
JP2014107363A5
JP2014107363A5 JP2012258086A JP2012258086A JP2014107363A5 JP 2014107363 A5 JP2014107363 A5 JP 2014107363A5 JP 2012258086 A JP2012258086 A JP 2012258086A JP 2012258086 A JP2012258086 A JP 2012258086A JP 2014107363 A5 JP2014107363 A5 JP 2014107363A5
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JP
Japan
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pulse
frequency
plasma processing
period
frequency power
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JP2012258086A
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English (en)
Japanese (ja)
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JP2014107363A (ja
JP6002556B2 (ja
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Priority claimed from JP2012258086A external-priority patent/JP6002556B2/ja
Priority to JP2012258086A priority Critical patent/JP6002556B2/ja
Application filed filed Critical
Priority to TW101148068A priority patent/TWI508168B/zh
Priority to KR1020130007790A priority patent/KR101425307B1/ko
Priority to US13/749,784 priority patent/US8992724B2/en
Publication of JP2014107363A publication Critical patent/JP2014107363A/ja
Priority to US14/609,807 priority patent/US9502217B2/en
Publication of JP2014107363A5 publication Critical patent/JP2014107363A5/ja
Publication of JP6002556B2 publication Critical patent/JP6002556B2/ja
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JP2012258086A 2012-11-27 2012-11-27 プラズマ処理装置およびプラズマ処理方法 Active JP6002556B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012258086A JP6002556B2 (ja) 2012-11-27 2012-11-27 プラズマ処理装置およびプラズマ処理方法
TW101148068A TWI508168B (zh) 2012-11-27 2012-12-18 Plasma processing device and plasma processing method
KR1020130007790A KR101425307B1 (ko) 2012-11-27 2013-01-24 플라즈마 처리 장치 및 플라즈마 처리 방법
US13/749,784 US8992724B2 (en) 2012-11-27 2013-01-25 Plasma processing apparatus and plasma processing method
US14/609,807 US9502217B2 (en) 2012-11-27 2015-01-30 Plasma processing apparatus and plasma processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012258086A JP6002556B2 (ja) 2012-11-27 2012-11-27 プラズマ処理装置およびプラズマ処理方法

Publications (3)

Publication Number Publication Date
JP2014107363A JP2014107363A (ja) 2014-06-09
JP2014107363A5 true JP2014107363A5 (cg-RX-API-DMAC7.html) 2015-08-13
JP6002556B2 JP6002556B2 (ja) 2016-10-05

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JP2012258086A Active JP6002556B2 (ja) 2012-11-27 2012-11-27 プラズマ処理装置およびプラズマ処理方法

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US (2) US8992724B2 (cg-RX-API-DMAC7.html)
JP (1) JP6002556B2 (cg-RX-API-DMAC7.html)
KR (1) KR101425307B1 (cg-RX-API-DMAC7.html)
TW (1) TWI508168B (cg-RX-API-DMAC7.html)

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JP6424120B2 (ja) * 2015-03-23 2018-11-14 東京エレクトロン株式会社 電源システム、プラズマ処理装置及び電源制御方法
JP6670692B2 (ja) * 2015-09-29 2020-03-25 株式会社日立ハイテク プラズマ処理装置およびプラズマ処理方法
CN107295739A (zh) * 2016-04-12 2017-10-24 北京北方华创微电子装备有限公司 产生脉冲等离子体的方法及其等离子体设备
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CN107172818B (zh) * 2017-07-12 2023-06-16 信丰迅捷兴电路科技有限公司 一种全自动的蚀刻装置及其控制方法
KR102435263B1 (ko) * 2017-07-25 2022-08-23 삼성전자주식회사 플라즈마 처리 장치 및 방법, 및 이를 이용한 반도체 장치의 제조 방법
EP3711082B1 (en) 2017-11-17 2025-08-27 AES Global Holdings, Pte. Ltd. Improved application of modulating supplies in a plasma processing system
US11437221B2 (en) 2017-11-17 2022-09-06 Advanced Energy Industries, Inc. Spatial monitoring and control of plasma processing environments
PL3711080T3 (pl) 2017-11-17 2023-12-11 Aes Global Holdings, Pte. Ltd. Zsynchronizowane pulsowanie źródła przetwarzania plazmy oraz polaryzacji podłoża
US12505986B2 (en) 2017-11-17 2025-12-23 Advanced Energy Industries, Inc. Synchronization of plasma processing components
TWI792598B (zh) 2017-11-17 2023-02-11 新加坡商Aes 全球公司 用於在空間域和時間域上控制基板上的電漿處理之系統和方法，及相關的電腦可讀取媒體
US12230476B2 (en) 2017-11-17 2025-02-18 Advanced Energy Industries, Inc. Integrated control of a plasma processing system
JP6792754B2 (ja) * 2018-11-14 2020-12-02 株式会社エスイー プラズマを用いた処理装置及び処理対象物にプラズマを照射する処理を行う処理方法
KR102743927B1 (ko) 2019-01-10 2024-12-17 삼성전자주식회사 플라즈마 균일성 제어 방법 및 플라즈마 프로세싱 시스템
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KR20220031713A (ko) 2019-07-12 2022-03-11 에이이에스 글로벌 홀딩스 피티이 리미티드 단일 제어식 스위치를 갖는 바이어스 공급부
US11239056B2 (en) 2019-07-29 2022-02-01 Advanced Energy Industries, Inc. Multiplexed power generator output with channel offsets for pulsed driving of multiple loads
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