JP2014093153A5 - - Google Patents

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Publication number
JP2014093153A5
JP2014093153A5 JP2012242028A JP2012242028A JP2014093153A5 JP 2014093153 A5 JP2014093153 A5 JP 2014093153A5 JP 2012242028 A JP2012242028 A JP 2012242028A JP 2012242028 A JP2012242028 A JP 2012242028A JP 2014093153 A5 JP2014093153 A5 JP 2014093153A5
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JP
Japan
Prior art keywords
stage
charged particle
particle beam
vibration information
information
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JP2012242028A
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English (en)
Japanese (ja)
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JP2014093153A (ja
JP6114002B2 (ja
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Priority to JP2012242028A priority Critical patent/JP6114002B2/ja
Priority claimed from JP2012242028A external-priority patent/JP6114002B2/ja
Publication of JP2014093153A publication Critical patent/JP2014093153A/ja
Publication of JP2014093153A5 publication Critical patent/JP2014093153A5/ja
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Publication of JP6114002B2 publication Critical patent/JP6114002B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012242028A 2012-11-01 2012-11-01 荷電粒子線装置 Expired - Fee Related JP6114002B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012242028A JP6114002B2 (ja) 2012-11-01 2012-11-01 荷電粒子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012242028A JP6114002B2 (ja) 2012-11-01 2012-11-01 荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2014093153A JP2014093153A (ja) 2014-05-19
JP2014093153A5 true JP2014093153A5 (enrdf_load_stackoverflow) 2015-11-12
JP6114002B2 JP6114002B2 (ja) 2017-04-12

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ID=50937108

Family Applications (1)

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JP2012242028A Expired - Fee Related JP6114002B2 (ja) 2012-11-01 2012-11-01 荷電粒子線装置

Country Status (1)

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JP (1) JP6114002B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6700642B2 (ja) * 2016-02-22 2020-05-27 株式会社ホロン 画像振動抑制装置および画像振動抑制方法
JP2018005974A (ja) * 2016-06-27 2018-01-11 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US9793091B1 (en) 2016-06-28 2017-10-17 Ngr Inc. Image generation apparatus
US10840059B2 (en) 2016-07-28 2020-11-17 Hitachi High-Tech Corporation Charged particle radiation device
JP7680923B2 (ja) * 2021-09-16 2025-05-21 株式会社ニューフレアテクノロジー マルチ電子ビーム検査装置、多極子アレイの制御方法、及びマルチ電子ビーム検査方法
JP2025108795A (ja) * 2022-04-08 2025-07-24 株式会社日立ハイテク 荷電粒子ビームシステム

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2788139B2 (ja) * 1991-09-25 1998-08-20 株式会社日立製作所 電子線描画装置
JPH10208679A (ja) * 1997-01-27 1998-08-07 Hitachi Ltd 荷電粒子線装置
JP3767872B2 (ja) * 1997-06-02 2006-04-19 富士通株式会社 電子ビーム装置及びその調整方法
JP2004311659A (ja) * 2003-04-04 2004-11-04 Nikon Corp 荷電粒子線装置の調整方法及び荷電粒子線装置
JP5058489B2 (ja) * 2006-01-25 2012-10-24 株式会社荏原製作所 試料表面検査装置及び検査方法
JP5561968B2 (ja) * 2009-08-12 2014-07-30 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置、荷電粒子ビーム描画方法および振動成分抽出方法

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