JP2014092500A5 - - Google Patents

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Publication number
JP2014092500A5
JP2014092500A5 JP2012244182A JP2012244182A JP2014092500A5 JP 2014092500 A5 JP2014092500 A5 JP 2014092500A5 JP 2012244182 A JP2012244182 A JP 2012244182A JP 2012244182 A JP2012244182 A JP 2012244182A JP 2014092500 A5 JP2014092500 A5 JP 2014092500A5
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JP
Japan
Prior art keywords
resonator element
element according
adjustment film
vibrating
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012244182A
Other languages
English (en)
Japanese (ja)
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JP2014092500A (ja
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Publication date
Application filed filed Critical
Priority to JP2012244182A priority Critical patent/JP2014092500A/ja
Priority claimed from JP2012244182A external-priority patent/JP2014092500A/ja
Publication of JP2014092500A publication Critical patent/JP2014092500A/ja
Publication of JP2014092500A5 publication Critical patent/JP2014092500A5/ja
Withdrawn legal-status Critical Current

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JP2012244182A 2012-11-06 2012-11-06 振動片、振動子、電子デバイス、電子機器、および移動体 Withdrawn JP2014092500A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012244182A JP2014092500A (ja) 2012-11-06 2012-11-06 振動片、振動子、電子デバイス、電子機器、および移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012244182A JP2014092500A (ja) 2012-11-06 2012-11-06 振動片、振動子、電子デバイス、電子機器、および移動体

Publications (2)

Publication Number Publication Date
JP2014092500A JP2014092500A (ja) 2014-05-19
JP2014092500A5 true JP2014092500A5 (cg-RX-API-DMAC10.html) 2015-11-12

Family

ID=50936655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012244182A Withdrawn JP2014092500A (ja) 2012-11-06 2012-11-06 振動片、振動子、電子デバイス、電子機器、および移動体

Country Status (1)

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JP (1) JP2014092500A (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10822225B2 (en) 2016-12-27 2020-11-03 Honeywell International Inc. MEMS sensors with selectively adjusted damping of suspension
GB2558392B (en) * 2016-12-27 2021-08-04 Honeywell Int Inc MEMS Sensors with selectively adjusted damping of suspension
JP6848589B2 (ja) * 2017-03-28 2021-03-24 セイコーエプソン株式会社 振動素子の周波数調整方法、振動素子の製造方法および振動素子

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9800194D0 (sv) * 1998-01-23 1998-01-23 Gert Andersson Anordning för mätning av vinkelhastighet
WO2005071832A1 (ja) * 2004-01-27 2005-08-04 Murata Manufacturing Co., Ltd. 圧電共振部品の周波数調整方法及び圧電共振部品
JP2006105614A (ja) * 2004-09-30 2006-04-20 Seiko Epson Corp 振動型ジャイロスコープ、及び振動型ジャイロスコープの製造方法
CN102089969B (zh) * 2008-10-16 2014-05-21 西铁城控股株式会社 晶体振子的制造方法

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