JP2014085504A5 - - Google Patents

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Publication number
JP2014085504A5
JP2014085504A5 JP2012234068A JP2012234068A JP2014085504A5 JP 2014085504 A5 JP2014085504 A5 JP 2014085504A5 JP 2012234068 A JP2012234068 A JP 2012234068A JP 2012234068 A JP2012234068 A JP 2012234068A JP 2014085504 A5 JP2014085504 A5 JP 2014085504A5
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JP
Japan
Prior art keywords
stage
stator
substrate
supported
mover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012234068A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014085504A (ja
JP6172913B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012234068A priority Critical patent/JP6172913B2/ja
Priority claimed from JP2012234068A external-priority patent/JP6172913B2/ja
Publication of JP2014085504A publication Critical patent/JP2014085504A/ja
Publication of JP2014085504A5 publication Critical patent/JP2014085504A5/ja
Application granted granted Critical
Publication of JP6172913B2 publication Critical patent/JP6172913B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012234068A 2012-10-23 2012-10-23 ステージ装置、露光装置および物品の製造方法 Expired - Fee Related JP6172913B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012234068A JP6172913B2 (ja) 2012-10-23 2012-10-23 ステージ装置、露光装置および物品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012234068A JP6172913B2 (ja) 2012-10-23 2012-10-23 ステージ装置、露光装置および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2014085504A JP2014085504A (ja) 2014-05-12
JP2014085504A5 true JP2014085504A5 (enExample) 2015-11-26
JP6172913B2 JP6172913B2 (ja) 2017-08-02

Family

ID=50788613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012234068A Expired - Fee Related JP6172913B2 (ja) 2012-10-23 2012-10-23 ステージ装置、露光装置および物品の製造方法

Country Status (1)

Country Link
JP (1) JP6172913B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6624487B2 (ja) * 2015-04-30 2019-12-25 Toto株式会社 エアステージ装置
CN109384062B (zh) * 2018-09-19 2020-02-18 武汉华星光电技术有限公司 一种曝光机及其传送基板的方法
JP7689871B2 (ja) * 2020-08-12 2025-06-09 ファスフォードテクノロジ株式会社 ダイボンディング装置および半導体装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4208914B2 (ja) * 1997-03-25 2009-01-14 キヤノン株式会社 露光装置とこれを用いたデバイス製造方法、ならびにステージ装置
WO2005117075A1 (ja) * 2004-05-26 2005-12-08 Nikon Corporation 較正方法、予測方法、露光方法、反射率較正方法及び反射率計測方法、露光装置、並びにデバイス製造方法
JP2008182210A (ja) * 2006-12-27 2008-08-07 Canon Inc ステージ装置、露光装置及びデバイス製造方法
JP4366412B2 (ja) * 2007-04-23 2009-11-18 キヤノン株式会社 ステージ装置および露光装置
US20120064460A1 (en) * 2010-09-07 2012-03-15 Nikon Corporation Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method

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