JP2014083562A - レーザ照射ユニット及びレーザ加工装置 - Google Patents

レーザ照射ユニット及びレーザ加工装置 Download PDF

Info

Publication number
JP2014083562A
JP2014083562A JP2012233985A JP2012233985A JP2014083562A JP 2014083562 A JP2014083562 A JP 2014083562A JP 2012233985 A JP2012233985 A JP 2012233985A JP 2012233985 A JP2012233985 A JP 2012233985A JP 2014083562 A JP2014083562 A JP 2014083562A
Authority
JP
Japan
Prior art keywords
modulation element
spatial modulation
laser
light
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012233985A
Other languages
English (en)
Japanese (ja)
Inventor
Tatsuya Nakamura
達哉 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2012233985A priority Critical patent/JP2014083562A/ja
Priority to KR1020130123303A priority patent/KR20140052840A/ko
Publication of JP2014083562A publication Critical patent/JP2014083562A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54Glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/56Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2012233985A 2012-10-23 2012-10-23 レーザ照射ユニット及びレーザ加工装置 Pending JP2014083562A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012233985A JP2014083562A (ja) 2012-10-23 2012-10-23 レーザ照射ユニット及びレーザ加工装置
KR1020130123303A KR20140052840A (ko) 2012-10-23 2013-10-16 레이저 조사 유닛 및 레이저 가공 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012233985A JP2014083562A (ja) 2012-10-23 2012-10-23 レーザ照射ユニット及びレーザ加工装置

Publications (1)

Publication Number Publication Date
JP2014083562A true JP2014083562A (ja) 2014-05-12

Family

ID=50787156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012233985A Pending JP2014083562A (ja) 2012-10-23 2012-10-23 レーザ照射ユニット及びレーザ加工装置

Country Status (2)

Country Link
JP (1) JP2014083562A (ko)
KR (1) KR20140052840A (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105057882A (zh) * 2015-08-24 2015-11-18 北京航空航天大学 一种去除汽车车身油漆的激光方法
WO2021221061A1 (ja) * 2020-04-28 2021-11-04 浜松ホトニクス株式会社 レーザ加工ヘッド及びレーザ加工装置
JP2023515703A (ja) * 2020-04-23 2023-04-13 ドルビー ラボラトリーズ ライセンシング コーポレイション 調整可能な角度の照射を備えた投影システム及び方法
WO2023128261A1 (ko) * 2021-12-30 2023-07-06 탈렌티스 주식회사 Mems 미러 배열을 이용한 파장 선택형 레이저 시스템

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105057882A (zh) * 2015-08-24 2015-11-18 北京航空航天大学 一种去除汽车车身油漆的激光方法
JP2023515703A (ja) * 2020-04-23 2023-04-13 ドルビー ラボラトリーズ ライセンシング コーポレイション 調整可能な角度の照射を備えた投影システム及び方法
WO2021221061A1 (ja) * 2020-04-28 2021-11-04 浜松ホトニクス株式会社 レーザ加工ヘッド及びレーザ加工装置
JP7475952B2 (ja) 2020-04-28 2024-04-30 浜松ホトニクス株式会社 レーザ加工ヘッド及びレーザ加工装置
WO2023128261A1 (ko) * 2021-12-30 2023-07-06 탈렌티스 주식회사 Mems 미러 배열을 이용한 파장 선택형 레이저 시스템

Also Published As

Publication number Publication date
KR20140052840A (ko) 2014-05-07

Similar Documents

Publication Publication Date Title
JP5137488B2 (ja) レーザ照射装置およびそれを用いたレーザ加工システム
JP5086687B2 (ja) レーザ加工装置
JP5301955B2 (ja) 欠陥修正装置
JP5286744B2 (ja) 空間光変調ユニット、照明光学系、露光装置及びデバイスの製造方法
WO2006100780A1 (ja) リペア方法及びその装置
US20070033680A1 (en) Optical inspection system and its illumination method
CN109416507A (zh) 光学系统及使用此系统校正掩模缺陷的方法
JP2006343684A (ja) パターン描画装置
JP2014083562A (ja) レーザ照射ユニット及びレーザ加工装置
JP4879619B2 (ja) レーザ加工装置
JP5064778B2 (ja) レーザ加工装置
JP2008210814A (ja) 変調器
JP2009210726A (ja) マスクレス露光装置
JP2007029959A (ja) レーザ加工機
JP7427352B2 (ja) 露光装置
JP5346690B2 (ja) レーザ照射装置
JP2003324057A (ja) アライメント装置およびアライメント方法
JP5120814B2 (ja) パターン形成方法及びパターン形成装置
US20110205553A1 (en) Method for focusing an object plane and optical assembly
JP2014197580A (ja) 露光装置
CN113039036B (zh) 激光加工装置
US20240103379A1 (en) Exposure apparatus, exposure method, and flat panel display manufacturing method
JP2002090313A (ja) パターン欠陥検査装置
JP2012115879A (ja) レーザ加工装置、及び、レーザ加工方法
JP2012118375A (ja) パターン投影装置およびレーザ加工装置