JP2014063946A - Substrate processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable efficient substrate processing by enabling change in position of a rear face Sb of a substrate S, where a backup pin B comes in contact without involving arrangement work of the backup pins B with respect to a base part 31.SOLUTION: In a substrate processing apparatus, backup pins B which come in contact with a rear face Sb of a substrate S for backup are switched among a plurality of backup pins B arranged on a base part 31. Accordingly, positions where the backup pins B come in contact with the rear face Sb of the substrate S in an overlapping support region Ro can be changed. That is, by switching the backup pins B which come in contact with the rear face Sb of the substrate S among the plurality of backup pins B previously arranged on the base part 31 but not performing arrangement work to change the arrangement of the backup pins B with respect to the base part 31, the positions on the rear face Sb of the substrate S where the backup pins B come in contact are changed in the overlapping support region Ro.

Description

  The present invention relates to a technique for backing up a substrate with a backup member by bringing a backup member into contact with the back surface of the substrate in a substrate processing apparatus that performs substrate processing on the surface of the substrate.

  2. Description of the Related Art Conventionally, there has been known a substrate processing apparatus that performs substrate processing such as mounting of electronic components and printing of solder paste on the surface of a substrate positioned in the apparatus. In Patent Document 1, a backup member (backup pin) disposed on a base portion (base plate) is brought into contact with the back surface of the substrate, thereby stably supporting the substrate against the force received by the substrate by the substrate processing. Techniques to do this have been proposed. In particular, in Patent Document 1, a backup member is detachable with respect to each of a plurality of holes provided in the base portion. Therefore, by changing the hole for mounting the backup member and changing the arrangement of the backup member in the base part, the backup member is brought into contact with the back surface of the substrate according to the state of the back surface of the substrate to be processed. The position to be changed can be changed.

  That is, a land or the like is formed on the back surface of the substrate, or an electronic component is already mounted. Therefore, it is necessary to adjust the position where the backup member comes into contact with the back surface of the substrate so that the backup member does not come into contact with them. On the other hand, according to Patent Document 1, by rearranging the backup member with respect to the base portion, the substrate can be changed according to the position of a structure such as a land or an electronic component (that is, the state of the back surface of the substrate) The position where the backup member comes into contact with the back surface of the battery can be changed.

Japanese Patent Application Laid-Open No. 2003-263497

  By the way, in Patent Document 1, when changing the position where the backup member comes into contact with the back surface of the substrate, it is necessary to rearrange the backup member with respect to the base portion. Therefore, every time it is necessary to change the contact position of the backup member on the back surface of the substrate, it is necessary to perform the backup member placement operation. However, the time required for placing the backup member sometimes delays the start of the substrate processing and makes it difficult to efficiently perform the substrate processing.

  The present invention has been made in view of the above-described problems, and enables efficient substrate processing by changing the position where the backup member abuts the back surface of the substrate without involving the placement of the backup member with respect to the base portion. The purpose is to provide the technology.

  In order to achieve the above object, a substrate processing apparatus according to the present invention transports a substrate in the substrate transport direction, positions the substrate for substrate processing, and a back surface of the substrate positioned by the transport unit. On the other hand, substrate processing is performed in a base portion where a plurality of backup members that abut in a common support region in the substrate transport direction are arranged, and a processing execution region including a support region with respect to the surface of the substrate positioned by the substrate transport means. The position at which the backup member abuts on the back surface of the substrate in the support area by switching between the processing execution means to be performed and the backup member that abuts on the back surface of the substrate undergoing substrate processing among the plurality of backup members disposed in the base portion Switching means for controlling according to the state of the back surface of the substrate in the support area.

  In the invention (substrate processing apparatus) configured as described above, a backup member that contacts the back surface of the substrate and supports the substrate in the support region can be disposed on the base portion. A plurality of backup members can be disposed on the base portion, and the plurality of backup members can contact the back surface of the substrate in a common support region. Then, the backup member that contacts the back surface of the substrate that receives the substrate processing in the support region, in other words, the backup member that contacts the back surface of the substrate for backup, is switched among the plurality of backup members arranged in the base portion. . This makes it possible to change the position where the backup member contacts the back surface of the substrate in the support area. In other words, the present invention does not perform the arrangement work of changing the arrangement of the backup member with respect to the base portion, but by switching the backup member that contacts the back surface of the substrate from among the plurality of backup members already arranged on the base portion. The position where the backup member contacts the back surface of the substrate in the support area is changed. Therefore, the position where the backup member comes into contact with the back surface of the substrate can be changed without involving the placement work of the backup member with respect to the base portion, and efficient substrate processing can be realized.

  By the way, when substrate processing is performed on a substrate longer than the processing execution area in the substrate transport direction, substrate processing on the substrate can be performed in multiple stages. For example, when performing substrate processing on a substrate in two stages, first, the substrate processing is performed on a preceding portion of the substrate that falls within the processing execution area. Subsequently, the substrate is transported in the substrate transport direction, and the remaining portion of the substrate that does not fit in the processing execution region in the previous substrate processing is moved to the processing execution region and subjected to substrate processing. Thereby, the substrate processing can be performed on the entire substrate longer than the processing execution region in the substrate transport direction.

  However, in such an apparatus that performs multi-stage substrate processing on a single substrate, the state of the back surface of the substrate that is sequentially transferred to the support area differs at each stage. It is necessary to change the position of contact with the back surface of the substrate. However, in the method of changing the arrangement of the backup member with respect to the base portion according to the state of the back surface of the substrate before executing the substrate processing at each stage, it is necessary to arrange the backup member before the start of each stage. The substrate processing at each stage cannot be started quickly, and it takes a long time to complete the substrate processing on the entire substrate. Therefore, a substrate processing apparatus may be configured as follows using the present invention.

  In other words, the substrate transport means positions the first range, which is a part of the substrate, within the support region, and then transports the substrate in the substrate transport direction, so that a part of the substrate that is different from the first range in the substrate transport direction. The second range is positioned in the support region, and the processing execution means executes the substrate processing on the surface of the substrate in the first range positioned in the support region, and then the second range of substrates positioned in the support region. The substrate processing is performed on the front surface of the substrate, and the switching unit includes a backup member that contacts the back surface of the substrate in the first range in the support region, and a backup member that contacts the back surface of the substrate in the second range in the support region. By switching among the plurality of backup members arranged in the base portion, the position where the backup member abuts in the support area during execution of the substrate processing is determined according to the state of the back surface of the substrate in each of the first range and the second range. System As to, it may constitute a substrate processing apparatus.

  In this substrate processing apparatus, as the substrate processing is performed on the substrate in multiple stages, the first range and the second range of the substrates different from each other in the substrate transport direction are sequentially positioned in the support region, Supported by a backup member. At this time, it is necessary to control the position where the backup member contacts the back surface of the substrate in accordance with the state of the back surface of the substrate in each of the first range and the second range. On the other hand, in the above configuration to which the present invention is applied, the backup member brought into contact with the back surface of the substrate in the first range in the support region and the backup member brought into contact with the back surface of the substrate in the second range in the support region And switching among the plurality of backup members arranged in the base portion. Thereby, the position where the backup member abuts is controlled according to the state of the back surface of the substrate in each of the first range and the second range. That is, instead of performing the backup member placement operation, the backup members that contact the back surface of the substrate are switched from among the plurality of backup members that are already placed on the base portion, so that the substrates in each of the first range and the second range The position where the backup member abuts can be controlled in accordance with the state of the back surface. As a result, substrate processing at each stage can be started quickly, and substrate processing can be quickly completed on the entire substrate.

  Incidentally, various configurations are conceivable as a specific configuration for switching the backup member in contact with the back surface of the substrate among the plurality of backup members already arranged on the base portion. For example, the base portion includes a plurality of plate members provided in the support region so as to overlap each other in the substrate transport direction while being arranged in an orthogonal direction orthogonal to the substrate transport direction, and each having a backup member disposed on the support region. Has a moving mechanism for moving each plate member between an abutting position where the backup member arranged on the plate member abuts against the back surface of the substrate and a separated position where the backup member is separated from the back surface of the substrate, and a plate which takes the abutting position. The substrate processing apparatus may be configured to switch the backup member that contacts the back surface of the substrate by switching the member among the plurality of plate members.

  In such a configuration, the base member is configured by a plurality of plate members provided in the support region so as to overlap each other in the substrate transport direction while being arranged in an orthogonal direction orthogonal to the substrate transport direction. A backup member can be disposed on each of the two. Each plate member is movable between a contact position where the backup member disposed on the plate member contacts the back surface of the substrate and a separated position where the backup member is separated from the back surface of the substrate. By switching the plate to be used among the plurality of plate members, the backup member that contacts the back surface of the substrate is switched. Therefore, it is possible to easily control the position where the backup member contacts the back surface of the substrate only by controlling the position of each plate member.

  Further, the base portion has one joining member provided on one side of the plurality of plate members in the substrate transport direction and the other joining member provided on the other side, and a part of the plurality of plate members and one of the plate members The side joining member is integrally joined as one movable member, and a part of the plurality of plate members that are not joined to the one side joining member and the other joining member are integrally joined as the other movable member. The switching means controls the positions of the one movable member and the other movable member with a movement mechanism, thereby causing the plate member of either the one movable member or the other movable member to take a contact position and hit the back surface of the substrate. The substrate processing apparatus may be configured to switch the backup member in contact therewith.

  In such a configuration, the one joining member and the other joining member are provided so as to sandwich the plurality of plate members from both sides in the substrate transport direction. A part of the plurality of plate members and the one-side joining member are integrally joined as one movable member, and a part of the plurality of plate members that are not joined to the one-side joining member and the other joining member are On the other hand, they are integrally joined as a movable member. Then, the switching means controls the positions of the one movable member and the other movable member by a moving mechanism, thereby causing the plate member of either the one movable member or the other movable member to take a contact position so that the back surface of the substrate is Switch the backup member that contacts. In such a configuration, it is possible to easily control the position where the backup member contacts the back surface of the substrate only by controlling the positions of the one movable member and the other movable member.

  Further, the substrate processing apparatus may be configured such that the plate member of the one movable member and the plate member of the other movable member are alternately arranged in the orthogonal direction. By comprising in this way, the backup member arrange | positioned at the plate member of one movable member and the backup member arrange | positioned at the plate member of the other movable member are located in a line in the orthogonal direction. Therefore, regardless of which backup member of the one movable member and the other movable member is used, the contact position of the backup member with the substrate can be dispersed in the orthogonal direction, and the substrate can be stably supported.

  At this time, the moving mechanism includes a one drive unit that has a position control function and drives one movable member, and another drive unit that drives the other movable member with lower position control accuracy than the one drive unit. The switching means controls the position when contacting the back surface of the substrate of the backup member arranged on the one movable member by controlling the position of the one movable member by the position control function of the one drive unit, On the other hand, the other movable member is abutted by the other drive unit against the one movable member positioned by the position control function of the drive unit, so that the position when contacting the back surface of the substrate of the backup member arranged on the other movable member is determined. The substrate processing apparatus may be configured to control.

  In such a configuration, the one movable member is driven with high positional accuracy by the one drive unit having a position control function, while the other movable member is driven by the other drive unit having relatively low position control accuracy. Driven. As a result, the cost can be reduced as compared with a configuration in which a drive unit having high positional accuracy is prepared for each of the one movable member and the other movable member. However, the position of the backup member when contacting the back surface of the substrate needs to be controlled with a certain degree of accuracy. Therefore, although it is driven by the other drive unit with low positional accuracy for cost reduction, the position of the backup member arranged on the other movable member also is controlled with high accuracy when contacting the back surface of the substrate. Is preferred. Therefore, in this configuration, the other movable member is abutted against the one movable member positioned by the position control function of the one drive unit by the other drive unit, so that the back surface of the backup member substrate disposed on the other movable member The position at the time of contact is controlled. As described above, since the positioning of the other movable member is performed by abutting the other movable member against the one movable member positioned with high positional accuracy, the back surface of the substrate is also used for the backup member disposed on the other movable member. It is possible to control the position at the time of contacting with high accuracy.

  Here, a servo motor or a stepping motor can be used as the one drive unit. Moreover, an air cylinder can be used as the other drive unit.

  In addition, the specific structure for switching the backup member which contact | abuts the back surface of a board | substrate out of the some backup member already arrange | positioned at the base part is not restricted above. Therefore, each of the plurality of backup members has a movable contact portion, and the switching means separates the contact portion of each of the plurality of backup members from the position where the contact portion contacts the back surface of the substrate. The substrate processing apparatus may be configured so that the backup member that contacts the back surface of the substrate is switched among the plurality of backup members by controlling the position between the plurality of backup members.

  As described above, according to the present invention, it is possible to change the position where the backup member abuts on the back surface of the substrate without involving the placement work of the backup member with respect to the base portion, thereby realizing efficient substrate processing. .

It is a top view which shows schematic structure of an example of the component mounting apparatus which can apply this invention. FIG. 2 is a front view partially showing the component mounting apparatus shown in FIG. 1. It is a block diagram which shows the main electrical structures of the component mounting apparatus shown in FIG. It is a perspective view which shows typically schematic structure of the base part with which the component mounting apparatus of FIG. 1 is provided. 3 is a flowchart illustrating an example of an operation executed by the component mounting apparatus in FIG. 1.

  FIG. 1 is a plan view showing an example of a schematic configuration of a component mounting apparatus to which the present invention is applicable. FIG. 2 is a front view partially showing the component mounting apparatus shown in FIG. FIG. 3 is a block diagram showing the main electrical configuration of the component mounting apparatus shown in FIG. The component mounting apparatus 1 shown in these drawings has a configuration capable of mounting electronic components such as resistors, capacitors, and ICs (Integrated Circuits) on the surface Sf of the substrate S. 1 and 2 and the drawings shown below, in order to clarify the directional relationship of each figure, the X-axis direction is the substrate transport direction, the Y-axis direction is the width direction, and the Z-axis direction is the vertical direction. The orthogonal coordinate axes will be indicated as appropriate.

  In the component mounting apparatus 1, the substrate transport mechanism 2 is disposed on the base 11, and the substrate S can be transported in a predetermined transport direction X. More specifically, the substrate transport mechanism 2 includes a pair of conveyors 21 and 21 that transport the substrate S in the transport direction X from the right side to the left side of FIG. And the conveyors 21 and 21 perform conveyance of the board | substrate S according to the command from the drive control part 210 of the control unit 200. FIG. Specifically, the conveyors 21 and 21 hold the substrate S carried in from the outside of the apparatus in an overlapping manner on the work area Rp having a predetermined width in the transport direction X, and fix and hold it by fixing means (not shown). When the head unit 6 described later completes component mounting on the surface Sf of the substrate S fixed to the work area Rp, the conveyors 21 and 21 carry the substrate S out of the apparatus.

  In this embodiment, since the board S is longer than the work area Rp in the transport direction X, component mounting on the surface Sf of the board S cannot be completed at once in the work area Rp. Therefore, component mounting on the board S is executed in two stages. Specifically, the downstream range D1, which is a part of the downstream side of the substrate S in the transport direction X, is positioned in the work area Rp (first positioning step). Subsequently, component mounting is performed on the surface Sf of the substrate S in the downstream range D1 in the work region Rp (first mounting step). When this second mounting step is completed, the substrate S is transported in the transport direction X, and the upstream range D2, which is a part of the upstream side of the substrate S in the transport direction X (a part different from the downstream range D1), is a work area. Positioning in Rp (second positioning step). Subsequently, component mounting is performed on the surface Sf of the substrate S in the upstream range D2 in the work region Rp (second mounting step). When this second mounting step is completed, the component mounting on the entire surface Sf of the substrate S is completed, and the substrate S is carried out of the apparatus.

  On the base 11, a backup unit 3 that supports the substrate S fixed to the work area Rp from below is provided. The backup unit 3 supports the substrate S by bringing a plurality of backup pins B detachably disposed on the upper surface of the base unit 31 into contact with the back surface Sb of the substrate S from below. The base 31 is composed of two backup plates 311 and 311 (push-up plates) (FIG. 4).

  FIG. 4 is a perspective view schematically showing a schematic configuration of a base portion provided in the component mounting apparatus of FIG. 1. Here, the configuration of the base unit 31 and the backup unit 3 including the same will be described in detail with reference to FIG. As shown in the column “initial state” in FIG. 4, the base unit 31 includes a backup plate 311 located on the downstream (+ X) side in the transport direction X and a backup plate located on the upstream (−X) side in the transport direction X. And plate 312.

  The downstream backup plate 311 has a configuration in which a rectangular wide flat plate 311a which is wide in the width direction Y and long in the transport direction X and a rectangular small plate 311b which is narrow in the width direction Y and extends in the transport direction X are integrally joined. It comprises. Specifically, in the backup plate 311, a plurality (four pieces) of small plate 311b arranged at equal intervals in the width direction Y are attached to the upstream end of the wide plate 311a in the transport direction X. For example, the operator can detachably place the backup pin B on the entire surface of the backup plate 311 including both the wide flat plate 311a and the small flat plate 311b. The backup plate 311 has a length equal to the work area Rp in the transport direction X.

  The upstream backup plate 312 has a configuration in which a rectangular wide flat plate 312a which is wide in the width direction Y and short in the transport direction X and a small rectangular plate 312b which is narrow in the width direction Y and extends in the transport direction X are integrally joined. It comprises. That is, in the backup plate 312, a plurality (three) of small plate 312b arranged at equal intervals in the width direction Y are attached to the downstream end of the wide plate 312a in the transport direction X. For example, the operator can detachably attach the backup pin B to the small plate 312b of the backup plate 312.

  In plan view from the vertical direction Z, the backup plates 311 and 312 are opposed to each other in the transport direction X, and the small plate 311b (312b) of one 311 (312) is adjacent to the small plate 312b of the other 312 (311). (311b). In this way, the overlapping support regions Ro in which the small flat plates 311b and 312b of the backup plates 311 and 312 are alternately arranged in the width direction Y and overlap each other in the transport direction X are formed with a predetermined length in the transport direction X.

  The backup unit 3 is provided with a lifting mechanism 35 that lifts and lowers these backup plates 311 and 312. The lifting mechanism 35 includes a servo motor 351 that lifts and lowers the backup plate 311 and an air cylinder 352 that lifts and lowers the backup plate 312. Therefore, the drive control unit 210 can raise and lower the backup plates 311 and 312 independently by controlling the servo motor 351 and the air cylinder 352.

  Specifically, as shown in the column of “first mounting step” in FIGS. 2 and 4, the backup plate 311 is positioned at the raised position Zh, and the backup plate 312 is lowered to the lowered position Zl lower than the raised position Zh. By positioning, the backup pins B arranged on the backup plate 311 can be brought into contact with the back surface Sb of the substrate S to support the substrate S. Alternatively, as shown in the column “second mounting step” in FIGS. 2 and 4, the backup plate 312 is positioned at the raised position Zh and the backup plate 311 is positioned at the lowered position Zl. The arranged backup pin B can be brought into contact with the back surface Sb of the substrate S to support the substrate S. In the “initial state” shown in FIG. 4, both the backup plates 311 and 312 are located at the lowered position Zl.

  Note that the positioning of the backup plate 311 to the raised position Zh is controlled with high accuracy by the position control function of the servo motor 351. On the other hand, the backup plate 312 is moved up and down by the air cylinder 352 having lower positional accuracy than the servo motor 351. Therefore, it is difficult to sufficiently secure the positioning accuracy of the backup plate 312 with only the air cylinder 352. Therefore, the positioning accuracy of the backup plate 312 is configured to be ensured by the servo motor 351.

  That is, a key member 315 extending downward is attached to the backup plate 312. The key member 315 is configured to abut against the lower surface of the backup plate 311 positioned at the lowered position Zl when the backup plate 312 is at the raised position Zh. Therefore, the backup plate 312 is raised from the state in which the backup plate 311 is positioned at the lowered position Zl by the servo motor 351, and the key member 315 is abutted against the backup plate 311, so that the backup plate 312 can be positioned at the raised position Zh. As a result, the backup plate 312 can be positioned at the raised position with the same accuracy as the position control by the servomotor 351.

  As described above, the small flat plates 311b and 312b overlap in the transport direction X in the overlapping support region Ro. Therefore, the backup pin B arranged on the small piece flat plate 311b and the backup pin B arranged on the small piece flat plate 312b abut on the back surface Sb of the substrate S in the overlapping support region Ro common in the transport direction X. Can be supported. Moreover, the small flat plates 311b and 312b belong to different backup plates 311 and 312 that move up and down independently of each other. Therefore, by switching the backup plates 311 and 312 that are positioned at the raised position Zh, the backup pin B that contacts the back surface Sb of the substrate S is one of those arranged on the small plate 311b and those arranged on the small plate 312b. Can be switched. Therefore, if the arrangement of the backup pins B is different between the small flat plates 311b and 312b, the arrangement of the backup pins B that support the substrate S in the overlapping support region Ro can be changed, in other words, the back surface of the substrate S. The position of the backup pin B that comes into contact with Sb can be changed. The details of the configuration of the base unit 31 and the backup unit 3 including the base unit 31 have been described above. Subsequently, the description returns to the overall configuration of the component mounting apparatus 1 with reference to FIGS.

  On the front side (+ Y axis direction side) and the rear side (−Y axis direction side) of the conveyors 21, the component supply unit 4 is arranged. The component supply unit 4 has a configuration in which a large number of feeders 41 for supplying electronic components are arranged in the X-axis direction. Each feeder 41 is a tape feeder provided with a reel (not shown) around which a tape storing and holding an electronic component is wound, and the electronic component can be supplied to the head unit 6. Specifically, small pieces of chip electronic components such as an integrated circuit (IC), a transistor, and a capacitor are stored and held on the tape at predetermined intervals. The feeder 41 feeds the tape from the reel toward the head unit 6 to intermittently feed the electronic component in the tape to the component suction position. As a result, electronic components can be picked up by the suction nozzle 62 mounted on the mounting head 61 of the head unit 6.

  The head unit 6 conveys the electronic component sucked and held by the suction nozzle 62 of the mounting head 61 to the surface Sf of the substrate S and transfers it to the mounting location designated by the user. Specifically, the head unit 6 includes six mounting heads 61F arranged in a line in the X-axis direction on the front side and six mounting heads 61R arranged in a line in the X-axis direction on the rear side. A total of 12 mounting heads 61 are provided. That is, as shown in FIGS. 1 and 2, in the head unit 6, six mounting heads 61F extending in the vertical direction Z are provided in a row at an equal pitch in the X-axis direction. Further, a rear row configured in the same manner as the front row is provided on the rear side (−Y-axis direction side) with respect to the mounting head 61F. That is, six mounting heads 61 </ b> R extending in the vertical direction Z are provided in a row at an equal pitch in the X-axis direction. The mounting head 61F and the mounting head 61R are arranged with a half-pitch shift in the X-axis direction, and are arranged in a zigzag shape in plan view as shown in FIG. Therefore, when viewed from the Y-axis direction, as shown in FIG. 2, the twelve mounting heads 61 are arranged in a line in the X-axis direction without overlapping each other.

  The tip of each mounting head 61 to which the suction nozzle 62 is attached can communicate with any of the negative pressure generator, the positive pressure generator, and the atmosphere via the pressure switching mechanism 7. The grip controller 220 of the control unit 200 can switch the pressure applied to the tip of the mounting head 61 by controlling the pressure switching mechanism 7. Therefore, when a negative pressure suction force from the negative pressure generating device is applied to the tip portion of the mounting head 61 by pressure switching, the suction nozzle 62 attached to the tip portion sucks and holds the electronic component. Conversely, when positive pressure from the positive pressure generator is applied to the tip of the mounting head 61, the suction holding of the electronic component by the suction nozzle 62 is released and the electronic component is attached to the substrate S. Then, after the electronic component is mounted, the suction nozzle 62 is opened to the atmosphere. As described above, in the head unit 6, the electronic component can be attached and detached by controlling the negative pressure adsorption force and the positive pressure supply by the grip control unit 220.

  Each mounting head 61 can be moved up and down (moved in the Z-axis direction) with respect to the head unit 6 by a nozzle lifting drive mechanism (not shown), and rotated around the nozzle center axis by a nozzle rotation driving mechanism (not shown). Direction rotation). Among these drive mechanisms, the nozzle raising / lowering drive mechanism raises and lowers the mounting head 61 between a position when the electronic component is attracted or mounted (lowering end) and a position when the electronic component is conveyed (upward end). It is something to be made. On the other hand, the nozzle rotation driving mechanism is a mechanism for rotating the suction nozzle 62 as necessary, and the electronic component can be positioned in a predetermined R direction during mounting by rotation driving. These drive mechanisms are each composed of a Z-axis servo motor Mz, an R-axis servo motor Mr, and a predetermined power transmission mechanism. The drive control unit 210 controls the Z-axis servo motor Mz and the R-axis servo motor Mr. By controlling the drive, each mounting head 61 can be moved in the Z-axis direction and the R direction.

  The head unit 6 that holds the mounting heads 61 can move in the X-axis direction and the Y-axis direction (directions orthogonal to the X-axis and Z-axis directions) over a predetermined range of the base 11. That is, the head unit 6 is supported so as to be movable along the X axis with respect to the mounting head support member 63 extending in the X axis direction. Further, both ends of the mounting head support member 63 are supported by a fixed rail 64 in the Y-axis direction, and are movable along the fixed rail 64 in the Y-axis direction. The head unit 6 is driven in the X-axis direction via the ball screw 66 by the X-axis servo motor Mx, and the mounting head support member 63 is driven in the Y-axis direction via the ball screw 68 by the Y-axis servo motor My. Is done. Therefore, the drive control unit 210 can drive the X-axis servomotor Mx and the Y-axis servomotor My to move the head unit 6 to a predetermined position in the XY plane. As a result, it is possible to perform an operation of moving the head unit 6 as appropriate and transporting the electronic component sucked by the mounting head 61 from the component supply unit 4 to the mounting location.

  In addition, the component mounting apparatus 1 is provided with two types of cameras (component recognition camera C1 and component inspection camera C2) that image electronic components. The component recognition camera C1 is composed of an illumination unit, a CCD (Charge Coupled Device) camera, and the like, and is arranged on the base 11, in order to check the suction state of the electronic component by the suction nozzle 62 of each mounting head 61. Mainly used. Specifically, the drive control unit 210 moves the head unit 6 as appropriate, thereby moving the electronic component sucked by the suction nozzle 62 above the component recognition camera C1. In this state, the image of the electronic component captured by the component recognition camera C1 is transferred to the control unit 200 (the image processing unit 230). The control unit 200 controls the R-axis servo motor Mr by the drive control unit 210 based on this image, thereby appropriately rotating the mounting head 61 in the R direction to appropriately adjust the angle of the electronic component attached to the substrate S. adjust.

  On the other hand, the component inspection camera C2 includes an illumination unit and a CCD camera and is mounted on the head unit 6, and is mainly used for inspecting the mounting state of the electronic component attached to the substrate S. Specifically, the drive control unit 210 moves the head unit 6 as appropriate, thereby moving the component inspection camera C2 above the mounting position of the electronic component. In this state, an image of the electronic component captured by the component inspection camera C2 is transferred to the image processing unit 230. The image processing unit 230 determines the quality of the electronic component mounting state from the transferred electronic component image.

  As shown in FIG. 3, the component mounting apparatus 1 includes a display 91 and an input device 92 that function as an interface with a user. The display 91 has a function as an input terminal that is configured by a touch panel and receives an input from a user, in addition to a function of displaying an operation state or the like of the component mounting apparatus 1. The input device 92 includes a mouse and a keyboard, and fulfills a function of receiving input from the user. The input / output control for the display 91 and the input device 92 is executed by the input / output control unit 240 of the control unit 200.

  The overall operation of the component mounting apparatus 1 configured as described above is comprehensively controlled by the main control unit 250. That is, the main control unit 250 controls the entire apparatus 1 by exchanging signals with each unit of the control unit 200 via the bus 270 based on programs and data stored in the storage unit 260. Specifically, the storage unit 260 stores a mounting program 262 (production program). The mounting program 262 is a program for controlling the mounting head 61 and the like in order to attach the electronic component to the mounting position of the substrate S. The mounting program 262 includes the mounting procedure and the like in addition to the position and angle of attaching the electronic component to the substrate S. Information is incorporated. Subsequently, an example of an operation executed under the control of the main control unit 250 will be described.

  FIG. 5 is a flowchart showing an example of an operation executed by the component mounting apparatus of FIG. In the operation example of the figure, a case where component mounting is performed on the substrate S longer than the work area Rp in the transport direction X is shown. Note that the flowchart in the figure is executed by the control unit 200 operating according to the mounting program.

  When the production of the substrate is started, both the backup plates 311 and 312 are positioned at the lowered position Zl in step S101, and the backup pins B arranged on the backup plates 311 and 312 are retracted from the loading path of the substrate S. . When the retracting operation of the backup pin B in step S101 is completed, the conveyor 21 carries the substrate S (step S102), and positions the downstream range D1 of the substrate S in the work area Rp (step S103).

  When the substrate S is fixed in this state, the backup pin B arranged on the base portion 31 comes into contact with the back surface Sb of the substrate S in the downstream range D1, and supports the substrate S. As illustrated in FIG. 2, electronic components are already mounted on the back surface Sb of the substrate S. Although not shown in FIG. 2, lands and the like are also formed on the back surface Sb of the substrate S. Therefore, it is necessary to abut the back-up pin B on the back surface Sb of the substrate S while avoiding structures such as these electronic components and lands. On the other hand, on the backup plate 311 of the base portion 31, the backup pin B is arranged at a position where it does not interfere with the structure on the back surface Sb of the substrate S in the downstream range D1. Therefore, in step S104, the backup plate 311 is positioned at the raised position Zh. As a result, as shown in the column of “first mounting step” in FIG. 2, the backup pins B arranged on the backup plate 311 come into contact with the back surface Sb of the substrate S in the downstream range D1 to support the substrate S. . Note that the placement of the backup pin B on the backup plate 311 is completed in advance by the operator before the start of substrate production.

  Thus, when the backup of the downstream range D1 is completed, step S105 is executed, and component mounting is executed on the surface Sf of the substrate S in the downstream range D1. When the component mounting is completed, the backup plate 311 is positioned at the lowered position Zl in step S106, and the backup pin B arranged on the backup plate 311 is retracted from the transport path of the substrate S. When the retracting operation of the backup pin B in step S106 is completed, the conveyor 21 transports the substrate S (step S107), and positions the upstream range D2 of the substrate S in the work area Rp (step S108). More specifically, the upstream range of the substrate S is within an overlapping support region Ro (included in the work region Rp) in which the position where the backup pin B abuts on the back surface Sb of the substrate S can be changed to support the substrate S. D2 is positioned.

  When the substrate S is fixed in this state, the backup pin B arranged on the base portion 31 comes into contact with the back surface Sb of the substrate S in the downstream range D1, and supports the substrate S. As described above, since there are structures on the back surface Sb of the substrate S, it is necessary to abut the backup pins B on the back surface Sb of the substrate S while avoiding these structures. However, the arrangement of structures on the back surface Sb of the substrate S differs between the downstream range D1 and the upstream range D2. Therefore, it is not appropriate to use the backup pin B arranged on the backup plate 311 used for supporting the downstream range D1 for supporting the substrate S in the upstream range D2. On the other hand, on the backup plate 312 of the base portion 31, the backup pin B is disposed at a position where it does not interfere with the structure on the back surface Sb of the substrate S in the upstream range D2. Therefore, in step S109, the backup plate 312 is positioned at the raised position Zh. As a result, as shown in the column “second mounting step” in FIG. 2, the backup pins B arranged on the backup plate 312 come into contact with the back surface Sb of the substrate S in the upstream range D2 to support the substrate S. . Note that the placement of the backup pin B on the backup plate 312 is completed in advance by the operator before the start of substrate production.

  Thus, when the backup of the upstream range D2 is completed, step S110 is executed, and component mounting is executed on the surface Sf of the substrate S in the upstream range D2. When the component mounting is completed, the backup plate 312 is positioned at the lowered position Zl in step S111, and the backup pin B arranged on the backup plate 312 is retracted from the carry-out path of the substrate S. When the retracting operation of the backup pin B in step S111 is completed, the conveyor 21 carries out the substrate S (step S112). In step S113, it is determined whether or not component mounting has been completed for all the boards S scheduled to be produced. If not completed (in the case of “NO” in step S113), the process returns to step S101 to continue board production. On the other hand, if it is completed (in the case of “YES” in step S113), the board production is terminated.

  As described above, in this embodiment, the backup pin B that supports the substrate S by contacting the back surface Sb of the substrate S in the overlapping support region Ro can be disposed on the base portion 31. A plurality of backup pins B can be disposed on the base portion 31, and the plurality of backup pins B can be brought into contact with the back surface Sb of the substrate S in a common overlapping support region Ro. A backup pin B that abuts on the back surface Sb of the substrate S that receives the component mounting in the overlapping support region Ro, in other words, a backup pin B that abuts on the back surface Sb of the substrate S for backup is disposed on the base portion 31. Switching is performed among the plurality of backup pins B. This makes it possible to change the position where the backup pin B contacts the back surface Sb of the substrate S in the overlapping support region Ro. That is, in the present embodiment, the placement operation of changing the placement of the backup pins B with respect to the base portion 31 is not performed, but the back surface Sb of the substrate S is hit among the plurality of backup pins B already placed on the base portion 31. By switching the backup pin B in contact, the position where the backup pin B contacts the back surface Sb of the substrate S in the overlapping support region Ro is changed. Therefore, the position where the backup pin B abuts on the back surface Sb of the substrate S can be changed without involving the placement work of the backup pin B with respect to the base portion 31, and efficient component mounting can be realized.

  By the way, as shown in this embodiment, when component mounting is performed on the substrate S longer than the work area Rp in the transport direction X, component mounting on the substrate S is performed in two stages. be able to. That is, first, component mounting is performed on the preceding portion (downstream range D1) of the board S that fits in the work area Rp. Subsequently, the substrate S is transported in the transport direction X, and the remaining portion (upstream range D2) of the substrate S that did not fit in the work area Rp in the previous component mounting is moved to the work area Rp to receive component mounting. . As a result, component mounting can be performed on the entire board S longer than the work area Rp in the transport direction X.

  However, in such an apparatus that performs multi-stage component mounting on one board S, the state of the back surface Sb of the board S that is sequentially transported to the overlapping support region Ro differs in each stage. Accordingly, it is necessary to change the position where the backup pin B contacts the back surface Sb of the substrate S. However, in the method of changing the arrangement of the backup pins B with respect to the base portion 31 according to the state of the back surface Sb of the substrate S before executing the component mounting at each stage, the arrangement work of the backup pins B is performed before the start of each stage. Since it is necessary, the component mounting at each stage cannot be started immediately, and it takes a long time to complete the component mounting on the entire board S. On the other hand, in this embodiment, the substrate processing apparatus is configured as follows.

  That is, the backup pin B brought into contact with the back surface Sb of the substrate S in the downstream range D1 in the overlapping support region Ro and the backup pin B brought into contact with the back surface Sb of the substrate S in the upstream range D2 in the overlapping support region Ro Switching is performed among the plurality of backup pins B arranged in the unit 31. Thereby, the position where the backup pin B contacts is controlled according to the state of the back surface of the substrate S in each of the downstream range D1 and the upstream range D2. That is, instead of performing the placement operation of the backup pin B, the backup pin B that contacts the back surface Sb of the substrate S is switched from among the plurality of backup pins B already arranged on the base portion 31, so that the downstream range D 1 and The position where the backup pin B contacts can be controlled according to the state of the back surface of the substrate S in each of the upstream ranges D2. As a result, component mounting at each stage can be started quickly, and component mounting on the entire board S can be completed quickly.

  In this embodiment, the base portion 31 is configured by a plurality of small plate plates 311b and 312b provided in the overlapping support region Ro so as to overlap each other in the transport direction X while being aligned in the width direction Y. A backup pin B can be disposed on each of the flat plates 311b and 312b. Each of the small flat plates 311b and 312b is movable between a contact position (Zh) where the backup pin B disposed on the small plate 311b and 312b contacts the back surface Sb of the substrate S and a separation position (Zl) where the backup pin B is separated. It has become. And the backup pin B which contacts the back surface Sb of the board | substrate S is switched by switching the small piece flat plates 311b and 312b which take an abutment position in the some small piece flat plates 311b and 312b. Therefore, it is possible to easily control the position where the backup pin B contacts the back surface Sb of the substrate S only by controlling the position of each of the small flat plates 311b and 312b.

  In this embodiment, wide flat plates 311a and 312a are provided so as to sandwich a plurality of small piece flat plates 311b and 312b from both sides in the transport direction X. The small flat plate 311b and the wide flat plate 311a are integrally joined as the backup plate 311 and the small flat plate 312b and the wide flat plate 312a are integrally joined as the backup plate 312. Then, by controlling the positions of the backup plates 311 and 312 by the lifting mechanism 35, the small plate 311b or 312b of the backup plate 311 or 312 is brought into the contact position (Zh), and the back surface Sb of the substrate S is obtained. The backup pin B that comes into contact with is switched. In such a configuration, it is possible to easily control the position where the backup pin B contacts the back surface Sb of the substrate S only by controlling the position of the backup plates 311 and 312.

  In this embodiment, the small flat plates 311b and 312b are alternately arranged in the width direction Y. In such a configuration, the backup pins B arranged on the small plate 311b of the backup plate 311 and the backup pins B arranged on the small plate 312b of the backup plate 312 are alternately arranged in the width direction Y. Therefore, regardless of which backup plate 311 or 312 is used, the contact position of the backup pin B with the substrate S is dispersed in the width direction Y, and the substrate S can be stably supported.

  In this embodiment, the backup plate 311 is driven with high position accuracy by a servo motor 351 having a position control function, whereas the backup plate 312 is an air cylinder 352 having relatively low position control accuracy. Driven by. As a result, the cost can be reduced as compared with a configuration in which servo motors having high positional accuracy are prepared for the backup plates 311 and 312 respectively. However, the height of the backup pin B when contacting the back surface Sb of the substrate S needs to be controlled with a certain degree of accuracy. Therefore, although it is driven by the air cylinder 352 with low positional accuracy for cost reduction, the backup pin B arranged on the backup plate 312 is also highly accurate when contacting the back surface Sb of the substrate S. It is preferable to control by. Therefore, in this embodiment, the backup pin 311 disposed on the backup plate 312 is abutted against the backup plate 311 positioned by the position control function of the servo motor 351 by abutting the key member 315 attached to the backup plate 312. The position when contacting the back surface Sb of the substrate S of B is controlled. Thus, since the backup plate 312 is positioned by abutting the key member 315 of the backup plate 312 against the backup plate 311 positioned with high positional accuracy, the backup pin B arranged on the backup plate 312 is In addition, the height when contacting the back surface Sb of the substrate S can be controlled with high accuracy.

  As described above, in the above embodiment, the component mounting apparatus 1 corresponds to an example of the “substrate processing apparatus” of the present invention, the substrate transport mechanism 2 corresponds to an example of the “transport means” of the present invention, and the base portion 31. Corresponds to an example of the “base unit” of the present invention, the head unit 6 corresponds to an example of the “processing execution unit” of the present invention, and the backup unit 3 and the control unit 200 cooperate to form the “switching unit” of the present invention. The backup pin B corresponds to an example of the “backup member” of the present invention, the transport direction X corresponds to an example of the “substrate transport direction” of the present invention, and the work area Rp corresponds to “ The overlapping support region Ro corresponds to an example of the “support region” of the present invention, and the component mounting corresponds to an example of the “board processing” of the present invention. Further, the downstream range D1 corresponds to an example of the “first range” of the present invention, the upstream range D2 corresponds to an example of the “second range” of the present invention, and the width direction Y corresponds to the “orthogonal direction” of the present invention. Each of the small flat plates 311b and 312b corresponds to an example of the “plate member” of the present invention, the lifting mechanism 35 corresponds to an example of the “moving mechanism” of the present invention, and the wide flat plate 311a corresponds to the present invention. The wide flat plate 312a corresponds to an example of the “other joint member” of the present invention, the backup plate 311 corresponds to an example of the “one movable member” of the present invention, and the backup plate 312 Corresponds to an example of the “other movable member” of the present invention, the servo motor 351 corresponds to an example of the “one drive unit” of the present invention, and the air cylinder 352 corresponds to an example of the “other drive unit” of the present invention. .

  The present invention is not limited to the above-described embodiment, and various modifications can be made to the above-described one without departing from the spirit of the present invention. For example, in the above-described embodiment, in the component mounting on one board S performed in a plurality of stages, the contact position of the backup pin B is changed according to the state of the back surface Sb of the board S in each stage. In addition, switching of the contact position of the backup pin B to the substrate S (switching operation) has been performed. However, the purpose of switching the backup pin is not limited to this. Therefore, even when the component mounting on the substrate S is performed at once without dividing it into a plurality of stages, when the type of the substrate S to be produced is changed, the state of the back surface Sb of the substrate S also changes. Accordingly, the backup pin may be switched according to this.

  The specific configuration for changing the position where the backup pin contacts the back surface Sb of the substrate S is not limited to the above. For example, when the top portion of the backup pin is configured to be movable up and down, the top portion is raised and brought into contact with the back surface Sb of the substrate S, while the top portion is lowered and separated from the back surface Sb of the substrate S. it can. Therefore, the position where the backup pin B contacts the back surface Sb of the substrate S can be changed by switching the backup pin B that raises the top of the plurality of backup pins B arranged on the base portion 31.

  Various modifications can be made to the form of the overlapping support region Ro. That is, in the above embodiment, the overlapping support region Ro is provided in a part of the work region Rp. However, the overlapping support area Ro may be provided for the entire work area Rp.

  Moreover, in the said embodiment, the component mounting apparatus 1 which performs component mounting as a board | substrate process was illustrated and demonstrated. However, the present invention can also be applied to a printing apparatus that prints solder paste instead of mounting components.

  Moreover, in the said embodiment, it did not mention in particular about the method of fixing the backup pin B to the backup plates 311 and 312. However, this fixing method can employ various methods, and may fix each other by magnetic force.

  The specific configuration for driving the backup plate 311 is not limited to the servo motor 351 described above, and may be a stepping motor capable of highly accurate position control, for example.

DESCRIPTION OF SYMBOLS 1 ... Component mounting apparatus 2 ... Board | substrate conveyance mechanism 3 ... Backup part 31 ... Base part 311 ... Backup plate 311a ... Wide flat plate 311b ... Small piece flat plate 312 ... Backup plate 312a ... Wide flat plate 312b ... Small piece flat plate 315 ... Key member 35 ... Lifting mechanism 351 ... Servo motor 352 ... Air cylinder 6 ... Head unit 200 ... Control unit B ... Backup pin D1 ... Downstream range D2 ... Upstream range Ro ... Overlapping support area Rp ... Working area S ... Substrate Sb ... Back side Sf ... Front surface X ... Transport direction Y ... Width direction Z ... Vertical direction Zh ... Up position Zl ... Down position

Claims (9)

Conveying means for conveying the substrate in the substrate conveying direction and positioning the substrate for substrate processing;
A base portion on which a plurality of backup members that are in contact with a back surface of the substrate positioned by the transport means in a common support region in the substrate transport direction are disposed;
Processing execution means for executing the substrate processing in a processing execution area including the support area with respect to the surface of the substrate positioned by the substrate transport means;
By switching the backup member that contacts the back surface of the substrate subjected to the substrate processing among the plurality of backup members arranged in the base portion, the backup member contacts the back surface of the substrate in the support region. The substrate processing apparatus provided with the switching means which controls a position according to the state of the back surface of the said substrate in the said support area | region. The substrate transport means transports the substrate in the substrate transport direction after positioning a first range, which is a part of the substrate, in the support region, and is different from the first range in the substrate transport direction. Positioning a second range of a portion of the substrate within the support region;
The processing execution means executes the substrate processing on the surface of the substrate in the first range positioned in the support region, and then executes the processing on the surface of the substrate in the second range positioned in the support region. Performing the substrate processing;
The switching means includes the backup member that contacts the back surface of the substrate in the first range in the support region, and the backup member that contacts the back surface of the substrate in the second range in the support region. By switching among the plurality of backup members arranged on the base portion, the position where the backup member abuts in the support region during execution of the substrate processing can be changed in each of the first range and the second range. The substrate processing apparatus of Claim 1 controlled according to the state of the back surface of the said board | substrate. The base portion includes a plurality of plate members that are provided in the support region so as to overlap each other in the substrate transport direction while being arranged in an orthogonal direction orthogonal to the substrate transport direction, and in which the backup members are respectively disposed. ,
The switching means includes a moving mechanism for moving each plate member between a contact position where the backup member disposed on the plate member contacts the back surface of the substrate and a separation position where the backup member is separated from the back surface of the substrate. The substrate processing apparatus according to claim 1, wherein the backup member that contacts the back surface of the substrate is switched by switching the plate member that takes the contact position among the plurality of plate members. The base portion includes one joining member provided on one side of the plurality of plate members in the substrate transport direction and the other joining member provided on the other side, and a part of the plurality of plate members And the one side joining member are integrally joined as one movable member, and a part of the plurality of plate members that are not joined to the one side joining member and the other joining member are integrally joined as the other movable member. It has a joined structure,
The switching means controls the positions of the one movable member and the other movable member by the moving mechanism, thereby causing the plate member of either the one movable member or the other movable member to take the contact position. The substrate processing apparatus according to claim 3, wherein the backup member that contacts the back surface of the substrate is switched.   The substrate processing apparatus according to claim 4, wherein the plate member of the one movable member and the plate member of the other movable member are alternately arranged in the orthogonal direction. The moving mechanism has a position control function to drive the one movable member, and one drive unit that drives the other movable member with a lower position control accuracy than the one drive unit. Have
The switching means controls the position of the one movable member by the position control function of the one drive unit, thereby determining the position when the backup member disposed on the one movable member contacts the back surface of the substrate. The backup member disposed on the other movable member by controlling the other movable member against the one movable member positioned by the position control function of the one drive unit while being controlled by the other drive unit 6. The substrate processing apparatus according to claim 4, wherein the position of the substrate when contacting the back surface of the substrate is controlled.   The substrate processing apparatus according to claim 6, wherein the one driving unit is a servo motor or a stepping motor.   The substrate processing apparatus according to claim 6, wherein the other drive unit is an air cylinder. Each of the plurality of backup members has a movable contact portion,
The switching means is in contact with the back surface of the substrate by controlling the contact portion of each of the plurality of backup members between a position where the contact portion is in contact with the back surface of the substrate and a position where it is separated from the back surface of the substrate. The substrate processing apparatus according to claim 1, wherein the backup member is switched among the plurality of backup members.

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