JP2014056352A - 位置決め装置及び計測装置 - Google Patents

位置決め装置及び計測装置 Download PDF

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Publication number
JP2014056352A
JP2014056352A JP2012199919A JP2012199919A JP2014056352A JP 2014056352 A JP2014056352 A JP 2014056352A JP 2012199919 A JP2012199919 A JP 2012199919A JP 2012199919 A JP2012199919 A JP 2012199919A JP 2014056352 A JP2014056352 A JP 2014056352A
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Japan
Prior art keywords
acceleration
measurement
natural
natural frequency
positioning device
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JP2012199919A
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English (en)
Japanese (ja)
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JP2014056352A5 (enExample
Inventor
Takeshi Suzuki
猛司 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012199919A priority Critical patent/JP2014056352A/ja
Priority to US13/958,783 priority patent/US20140071460A1/en
Publication of JP2014056352A publication Critical patent/JP2014056352A/ja
Publication of JP2014056352A5 publication Critical patent/JP2014056352A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Feedback Control In General (AREA)
  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2012199919A 2012-09-11 2012-09-11 位置決め装置及び計測装置 Pending JP2014056352A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012199919A JP2014056352A (ja) 2012-09-11 2012-09-11 位置決め装置及び計測装置
US13/958,783 US20140071460A1 (en) 2012-09-11 2013-08-05 Positioning apparatus and measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012199919A JP2014056352A (ja) 2012-09-11 2012-09-11 位置決め装置及び計測装置

Publications (2)

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JP2014056352A true JP2014056352A (ja) 2014-03-27
JP2014056352A5 JP2014056352A5 (enExample) 2015-11-05

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JP2012199919A Pending JP2014056352A (ja) 2012-09-11 2012-09-11 位置決め装置及び計測装置

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US (1) US20140071460A1 (enExample)
JP (1) JP2014056352A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017102674A (ja) * 2015-12-01 2017-06-08 オムロン株式会社 軌跡生成装置、軌跡生成装置の制御方法、制御プログラム、および記録媒体
WO2017169404A1 (ja) * 2016-03-31 2017-10-05 ウシオ電機株式会社 ワーク搬送装置、光照射装置、ワーク搬送方法及び光照射方法
JP2019015746A (ja) * 2015-01-30 2019-01-31 株式会社東京精密 三次元座標測定装置
JP2019035764A (ja) * 2015-01-30 2019-03-07 株式会社東京精密 三次元座標測定装置
JP2019188578A (ja) * 2018-04-27 2019-10-31 ファナック株式会社 モータ制御装置及び工作機械
US10663283B2 (en) 2015-01-30 2020-05-26 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201003363D0 (en) * 2010-03-01 2010-04-14 Renishaw Plc Measurement method and apparatus
KR101600135B1 (ko) * 2010-03-10 2016-03-04 구로다 세이코 가부시키가이샤 병렬 슬라이더 장치의 제어 장치 및 제어 방법 및 측정 장치
US9658048B2 (en) * 2014-04-04 2017-05-23 Hexagon Metrology, Inc. Coordinate measuring machine with carbon fiber air bearings
KR101448510B1 (ko) * 2014-04-10 2014-10-14 순환엔지니어링 주식회사 스테이지의 직각도 측정 시스템 및 이를 이용한 스테이지의 홈 포지셔닝 방법
US9441935B2 (en) * 2014-07-07 2016-09-13 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measuring machine
US10207410B1 (en) * 2016-01-07 2019-02-19 Physical Optics Corporation Robotic autonomous navigation and orientation tracking system and methods
CN106092174A (zh) * 2016-08-24 2016-11-09 北京主导时代科技有限公司 一种基于传感器技术的载体定位方法和定位装置
JP6341962B2 (ja) * 2016-08-26 2018-06-13 株式会社ミツトヨ 三次元測定装置及び座標補正方法
JP2018031754A (ja) * 2016-08-26 2018-03-01 株式会社ミツトヨ 三次元測定装置及び座標補正方法
JP7144920B2 (ja) * 2017-01-06 2022-09-30 株式会社ミツトヨ 形状測定装置および移動機構
JP7528806B2 (ja) * 2021-02-04 2024-08-06 トヨタ自動車株式会社 制御装置、運搬システム、制御方法及び制御プログラム
DE102023134503B4 (de) 2023-12-08 2025-09-04 Klingelnberg Gmbh Verfahren und koordinatenmessmaschine

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001293638A (ja) * 2000-02-10 2001-10-23 Fanuc Ltd 制御装置
JP2009029617A (ja) * 2007-06-28 2009-02-12 Ihi Corp 制振位置決め制御方法および装置
JP2010038779A (ja) * 2008-08-06 2010-02-18 Mitsutoyo Corp 測定機、及びフィルタ装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5638267A (en) * 1994-06-15 1997-06-10 Convolve, Inc. Method and apparatus for minimizing unwanted dynamics in a physical system
JP4136067B2 (ja) * 1997-05-02 2008-08-20 キヤノン株式会社 検出装置及びそれを用いた露光装置
JP3778424B2 (ja) * 2001-09-06 2006-05-24 ソニー株式会社 位置決め装置及び位置決め方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001293638A (ja) * 2000-02-10 2001-10-23 Fanuc Ltd 制御装置
JP2009029617A (ja) * 2007-06-28 2009-02-12 Ihi Corp 制振位置決め制御方法および装置
JP2010038779A (ja) * 2008-08-06 2010-02-18 Mitsutoyo Corp 測定機、及びフィルタ装置

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019015746A (ja) * 2015-01-30 2019-01-31 株式会社東京精密 三次元座標測定装置
JP2019035764A (ja) * 2015-01-30 2019-03-07 株式会社東京精密 三次元座標測定装置
JP2019035777A (ja) * 2015-01-30 2019-03-07 株式会社東京精密 三次元座標測定装置
JP2019056713A (ja) * 2015-01-30 2019-04-11 株式会社東京精密 三次元座標測定装置
JP2019070666A (ja) * 2015-01-30 2019-05-09 株式会社東京精密 三次元座標測定装置
US10663283B2 (en) 2015-01-30 2020-05-26 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus
US11067382B2 (en) 2015-01-30 2021-07-20 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus
JP2017102674A (ja) * 2015-12-01 2017-06-08 オムロン株式会社 軌跡生成装置、軌跡生成装置の制御方法、制御プログラム、および記録媒体
WO2017169404A1 (ja) * 2016-03-31 2017-10-05 ウシオ電機株式会社 ワーク搬送装置、光照射装置、ワーク搬送方法及び光照射方法
JP2017182000A (ja) * 2016-03-31 2017-10-05 ウシオ電機株式会社 ワーク搬送装置、光照射装置、ワーク搬送方法及び光照射方法
JP2019188578A (ja) * 2018-04-27 2019-10-31 ファナック株式会社 モータ制御装置及び工作機械
US10759012B2 (en) 2018-04-27 2020-09-01 Fanuc Corporation Motor controller and machine tool

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