JP2014028986A5 - - Google Patents

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Publication number
JP2014028986A5
JP2014028986A5 JP2012169184A JP2012169184A JP2014028986A5 JP 2014028986 A5 JP2014028986 A5 JP 2014028986A5 JP 2012169184 A JP2012169184 A JP 2012169184A JP 2012169184 A JP2012169184 A JP 2012169184A JP 2014028986 A5 JP2014028986 A5 JP 2014028986A5
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JP
Japan
Prior art keywords
thin film
visible light
light transmittance
metal
aln
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012169184A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014028986A (ja
JP5938290B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2012169184A priority Critical patent/JP5938290B2/ja
Priority claimed from JP2012169184A external-priority patent/JP5938290B2/ja
Priority to PCT/JP2013/070618 priority patent/WO2014021325A1/ja
Priority to TW102127409A priority patent/TWI630658B/zh
Publication of JP2014028986A publication Critical patent/JP2014028986A/ja
Publication of JP2014028986A5 publication Critical patent/JP2014028986A5/ja
Application granted granted Critical
Publication of JP5938290B2 publication Critical patent/JP5938290B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012169184A 2012-07-31 2012-07-31 透明導電膜及びその製造方法 Expired - Fee Related JP5938290B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012169184A JP5938290B2 (ja) 2012-07-31 2012-07-31 透明導電膜及びその製造方法
PCT/JP2013/070618 WO2014021325A1 (ja) 2012-07-31 2013-07-30 透明導電膜及びその製造方法
TW102127409A TWI630658B (zh) 2012-07-31 2013-07-31 Transparent conductive film and method of manufacturing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012169184A JP5938290B2 (ja) 2012-07-31 2012-07-31 透明導電膜及びその製造方法

Publications (3)

Publication Number Publication Date
JP2014028986A JP2014028986A (ja) 2014-02-13
JP2014028986A5 true JP2014028986A5 (enrdf_load_stackoverflow) 2015-09-17
JP5938290B2 JP5938290B2 (ja) 2016-06-22

Family

ID=50027998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012169184A Expired - Fee Related JP5938290B2 (ja) 2012-07-31 2012-07-31 透明導電膜及びその製造方法

Country Status (3)

Country Link
JP (1) JP5938290B2 (enrdf_load_stackoverflow)
TW (1) TWI630658B (enrdf_load_stackoverflow)
WO (1) WO2014021325A1 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6366221B2 (ja) * 2012-09-21 2018-08-01 コニカミノルタ株式会社 透明電極、及び電子デバイス
KR102341963B1 (ko) 2014-05-23 2021-12-22 더 리젠츠 오브 더 유니버시티 오브 미시건 광전자 및 광자 공학 응용을 위한 도핑된 귀금속 초박막
CN104269221A (zh) * 2014-08-29 2015-01-07 上海蓝沛新材料科技股份有限公司 一种利用含钯化合物的墨水制备透明导电膜的方法
JP2016191967A (ja) * 2015-03-30 2016-11-10 株式会社神戸製鋼所 窒素含有Ｃｕ合金膜、積層膜、およびこれらの製造方法、ならびにＣｕ合金スパッタリングターゲット
JP7157729B2 (ja) * 2019-06-28 2022-10-20 日東電工株式会社 粘着剤層付き偏光フィルム及び液晶パネル
CN113913775A (zh) * 2021-09-30 2022-01-11 浙江师范大学 对向靶磁控溅射无损伤薄膜沉积系统
CN114622162A (zh) * 2022-03-14 2022-06-14 南京邮电大学 一种耐高温透明导电复合薄膜及其制备方法和应用

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63205609A (ja) * 1987-02-20 1988-08-25 Unitika Ltd 熱線反射膜
JPH07105740A (ja) * 1993-10-08 1995-04-21 Mitsui Toatsu Chem Inc 透明導電性フィルム
JP4510967B2 (ja) * 1999-12-03 2010-07-28 大阪府 導電性光選択透過シート
JP2004047216A (ja) * 2002-07-10 2004-02-12 Central Glass Co Ltd 透明導電膜
JP4961786B2 (ja) * 2006-03-17 2012-06-27 住友金属鉱山株式会社 透明導電膜、およびこれを用いた透明導電性フィルム
JP5059430B2 (ja) * 2007-01-26 2012-10-24 株式会社大阪真空機器製作所 スパッタ方法及びスパッタ装置

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