JP2014011432A5 - - Google Patents
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- Publication number
- JP2014011432A5 JP2014011432A5 JP2012149414A JP2012149414A JP2014011432A5 JP 2014011432 A5 JP2014011432 A5 JP 2014011432A5 JP 2012149414 A JP2012149414 A JP 2012149414A JP 2012149414 A JP2012149414 A JP 2012149414A JP 2014011432 A5 JP2014011432 A5 JP 2014011432A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- polishing
- holding surface
- pressure chamber
- contact portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 134
- 238000005498 polishing Methods 0.000 claims description 44
- 239000012530 fluid Substances 0.000 claims description 17
- 238000000926 separation method Methods 0.000 claims description 12
- 230000001737 promoting effect Effects 0.000 claims description 7
- 230000003247 decreasing effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 5
- 238000007517 polishing process Methods 0.000 claims 3
- 238000005507 spraying Methods 0.000 claims 2
- 230000003028 elevating effect Effects 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 2
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012149414A JP5891127B2 (ja) | 2012-07-03 | 2012-07-03 | 研磨装置および研磨方法 |
| US13/932,062 US9105516B2 (en) | 2012-07-03 | 2013-07-01 | Polishing apparatus and polishing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012149414A JP5891127B2 (ja) | 2012-07-03 | 2012-07-03 | 研磨装置および研磨方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014011432A JP2014011432A (ja) | 2014-01-20 |
| JP2014011432A5 true JP2014011432A5 (enrdf_load_stackoverflow) | 2015-10-08 |
| JP5891127B2 JP5891127B2 (ja) | 2016-03-22 |
Family
ID=50107815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012149414A Active JP5891127B2 (ja) | 2012-07-03 | 2012-07-03 | 研磨装置および研磨方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5891127B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6427131B2 (ja) | 2016-03-18 | 2018-11-21 | 株式会社荏原製作所 | 研磨装置および研磨方法 |
| JP2017185589A (ja) * | 2016-04-06 | 2017-10-12 | 株式会社荏原製作所 | 基板処理装置 |
| JP6990980B2 (ja) * | 2017-03-31 | 2022-01-12 | 株式会社荏原製作所 | 基板処理装置 |
| JP2021041485A (ja) | 2019-09-10 | 2021-03-18 | キオクシア株式会社 | 研磨装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3917384B2 (ja) * | 2001-02-15 | 2007-05-23 | 大日本スクリーン製造株式会社 | 基板処理装置および基板洗浄装置 |
| JP5390807B2 (ja) * | 2008-08-21 | 2014-01-15 | 株式会社荏原製作所 | 研磨方法および装置 |
| JP5597033B2 (ja) * | 2010-06-07 | 2014-10-01 | 株式会社荏原製作所 | 研磨装置および方法 |
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2012
- 2012-07-03 JP JP2012149414A patent/JP5891127B2/ja active Active